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Research Article

Schottky barrier-based silicon nanowire pH sensor with live sensitivity control

Felix M. Zörgiebel1,5, Sebastian Pregl1,5, Lotta Römhildt1, Jörg Opitz3, W. Weber2,5, T. Mikolajick4,5, Larysa Baraban1( ), Gianaurelio Cuniberti1,5
Institute for Materials Science and Max Bergmann Center of Biomaterials TU Dresden 01062 Dresden, Germany
NaMLab GmbH 01187 Dresden, Germany
Fraunhofer Institute IZFP Dresden 01109 Dresden, Germany
Institute for Semiconductors and Microsystems Technology, TU Dresden 01187 Dresden, Germany
Dresden, Germany, Center for Advancing Electronics Dresden, TU Dresden 01062 Dresden, Germany
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Abstract

We demonstrate a pH sensor based on ultrasensitive nanosize Schottky junctions formed within bottom-up grown dopant-free arrays of assembled silicon nanowires. A new measurement concept relying on a continuous gate sweep is presented, which allows the straightforward determination of the point of maximum sensitivity of the device and allows sensing experiments to be performed in the optimum regime. Integration of devices into a portable fluidic system and an electrode isolation strategy affords a stable environment and enables long time robust FET sensing measurements in a liquid environment to be carried out. Investigations of the physical and chemical sensitivity of our devices at different pH values and a comparison with theoretical limits are also discussed. We believe that such a combination of nanofabrication and engineering advances makes this Schottky barrier-powered silicon nanowire lab-on-a-chip platform suitable for efficient biodetection and even for more complex biochemical analysis.

Keywords

silicon nanowiresfield effect transistorsub-threshold regimenanosensorspH sensorbottom-up fabricationmaximum sensitivity of sensor

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Nano Research
Volume 7 Issue 2,
February 2014
Pages 263-271
DOI: 10.1007/s12274-013-0393-8
Cite this article:
Zörgiebel FM, Pregl S, Römhildt L, et al. Schottky barrier-based silicon nanowire pH sensor with live sensitivity control. Nano Research, 2014, 7(2): 263-271. https://doi.org/10.1007/s12274-013-0393-8

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Received: 14 September 2013
Revised: 20 November 2013
Accepted: 21 November 2013
Published: 03 January 2014
© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2013
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