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Aligned carbon nanotube films coated with amorphous carbon were developed into novel templates by atomic layer deposition. Freestanding macroscopic metal-oxide nanotube films were then successfully synthesized by using these templates. The reactive amorphous carbon layer greatly improved the nuclei density, which ensured the high quality of the films and allowed for precise control of the wall thickness of the nanotubes. Using template-synthesized alumina nanotube films, we demonstrate a humidity sensor with a high response speed, a transmission electron microscopy (TEM) grid, and a catalyst support. The cross-stacked assembly, ultrathin thickness, chemical inertness, and high thermal stability of the alumina nanotube films contributed to the excellent performance of these devices. In addition, it is expected that the metal-oxide nanotube films would have significant potential owing to their material richness, macroscopic appearance, flexibility, compatibility with the semiconducting technologies, and the feasibility of mass production.
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