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Research Article

Stressed carbon nanotube devices for high tunability, high quality factor, single mode GHz resonators

Xinhe Wang1,4,5,§, Dong Zhu2,§, Xinhe Yang1,5, Long Yuan2, Haiou Li2, Jiangtao Wang1,5, Mo Chen1, Guangwei Deng2, Wenjie Liang3, Qunqing Li1,5, Shoushan Fan1,5, Guoping Guo2( ), Kaili Jiang1,5( )
State Key Laboratory of Low-Dimensional Quantum PhysicsDept. of Physics and Tsinghua-Foxconn Nanotechnology Research CenterTsinghua UniversityBeijing100084China
Key Laboratory of Quantum InformationCASUniversity of Science and Technology of ChinaHefei230026China
Institute of PhysicsChinese Academy of SciencesBeijing100080China
Fert Beijing Research InstituteSchool of Electrical and Information EngineeringBDBCBeihang UniversityBeijing100191China
Collaborative Innovation Center of Quantum MatterBeijing100084China

§ Xinhe Wang and Dong Zhu contributed equally to this work.

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Graphical Abstract

Abstract

The emerging applications of nanoelectromechanical systems (NEMS) in ground-state cooling, quantum manipulation, communication devices, etc., call for a nanoresonator with high frequency, quality factor, and tunability, as well as easy integration. Here we show that such a nanoresonator can be achieved by using a unique assembly technique that transfers the stressed inner shell of carbon nanotubes (CNTs) to a self-aligned device geometry. The as-fabricated nanoresonator shows excellent comprehensive performance, i.e., high frequency (2–3 GHz), high tunability (80–110 MHz/V), high quality factor (3 × 104), and single mode operation. The defect-free nature of the inner shell of the CNT gives rise to a high quality factor, and the preloaded tension improves the resonant frequency and tunability. This resonator with excellent performance also enables the integration of homogeneous devices and will play a key role in the emerging applications of NEMS.

Keywords

carbon nanotubenanomechanical resonatorstresshigh tunabilityhigh frequency

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Nano Research
Volume 11 Issue 11,
November 2018
Pages 5812-5822
DOI: 10.1007/s12274-018-2085-x
Cite this article:
Wang X, Zhu D, Yang X, et al. Stressed carbon nanotube devices for high tunability, high quality factor, single mode GHz resonators. Nano Research, 2018, 11(11): 5812-5822. https://doi.org/10.1007/s12274-018-2085-x

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Received: 13 December 2017
Revised: 25 April 2018
Accepted: 26 April 2018
Published: 18 May 2018
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2018
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