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Research Article

A tri-layer approach to controlling nanopore formation in oxide supports

Abha A. Gosavi1,2James L. Hedrick1,2Peng-Cheng Chen2,3Justin M. Notestein1( )Chad A. Mirkin1,2,3,4( )
Department of Chemical and Biological Engineering,Northwestern University, 2145 Sheridan Road, Evanston,Illinois,60208,USA;
International Institute for Nanotechnology,Northwestern University, 2145 Sheridan Road,Evanston, Illinois,60208,USA;
,,,,; Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA
,,,,; Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA
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Abstract

A novel tri-layer approach for immobilizing metal nanoparticles in SiO2 supports is presented. In this work, we show that under rapid heating to temperatures of approximately 1, 000 ℃, metal nanoparticles less than 15 nm in size will entrench in the SiO2 layer on a silicon wafer to create pores as deep as 250 nm. We studied and characterized this entrenching behavior and subsequent nanopore formation for a wide variety of metal nanoparticles, including Au, Ag, Pt, Pd, and Cu. We also demonstrate that an Al2O3 layer acts as a barrier to such pore formation. Thus, by creating a tri-layer architecture consisting of SiO2 on Al2O3 on silicon wafers, we can control the depth to which nanoparticles entrench between 3-5 nm. This small range allows one to entrench particles for the purpose of immobilization but still present them above the surface. The two advances of moving into the sub-15 nm size regime and of controlled particle immobilization through entrenchment have important implications in studying site-isolated and stabilized metal nanoparticles for applications in sensing, separations, and catalysis.

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Nano Research
Pages 1223-1228
Cite this article:
Gosavi AA, Hedrick JL, Chen P-C, et al. A tri-layer approach to controlling nanopore formation in oxide supports. Nano Research, 2019, 12(6): 1223-1228. https://doi.org/10.1007/s12274-019-2332-9
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Received: 02 January 2019
Revised: 28 January 2019
Accepted: 02 February 2019
Published: 29 May 2019
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2019
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