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Research Article | Open Access

Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface

Dogan Kaya1,2, Richard J. Cobley3( ), Richard E. Palmer3
Department of Electronics and Automation, Vocational School of Adana, Cukurova University, 01160 Cukurova, Adana, Turkey
Nanoscale Physics Research Laboratory, School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham, B15 2TT, UK
College of Engineering, Swansea University, Bay Campus, Fabian Way, Swansea, SA1 8EN, UK
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Abstract

Understanding the atomistic formation of oxide layers on semiconductors is important for thin film fabrication, scaling down conventional devices and for the integration of emerging research materials. Here, the initial oxidation of Si(111) is studied using the scanning tunneling microscope. Prior to the complete saturation of the silicon surface with oxygen, we are able to probe the atomic nature of the oxide layer formation. We establish the threshold for local manipulation of inserted oxygen sites to be +3.8 V. Only by combining imaging with local atomic manipulation are we able to determine whether inserted oxygen exists beneath surface-bonded oxygen sites and differentiate between sites that have one and more than one oxygen atom inserted beneath the surface. Prior to the creation of the thin oxide film we observe a flip in the manipulation rates of inserted oxygen sites consistent with more oxygen inserting beneath the silicon surface.

Keywords

scanning tunneling microscopy (STM)local manipulationSi(111)oxidation

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Nano Research
Volume 13 Issue 1,
January 2020
Pages 145-150
DOI: 10.1007/s12274-019-2587-1
Cite this article:
Kaya D, Cobley RJ, Palmer RE. Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface. Nano Research, 2020, 13(1): 145-150. https://doi.org/10.1007/s12274-019-2587-1
Topics:
OxidationOxide filmsScanning tunneling microscopy

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Received: 15 August 2019
Revised: 04 November 2019
Accepted: 28 November 2019
Published: 02 January 2020
© The Authors 2019

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