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Review Article

Si nanomebranes: Material properties and applications

Arijit Sarkar, Yongjun Lee, Jong-Hyun Ahn( )
School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seoul 03722, Republic of Korea
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Graphical Abstract

Abstract

Silicon (Si) has widely been used as an essential material in the modern semiconductor industry. Recently, new attempts have been actively made to apply Si to a variety of fields such as flexible electronic devices and biosensors by manufacturing Si nanomembranes (NMs) having nanometer thickness. In particular, as the thickness of Si is reduced to a nanometer scale, its mechanical, electrical, and optical properties differ from that of its bulk form, which provides opportunities for the development of new conceptual devices. In this review, we present recent advances in Si NM technology that exhibit functional features different from the bulk materials. In addition, we discuss the opportunities and current challenges related to this field.

Keywords

Si nanomebranesflexible electronicsbio-integrated electronicsSi optoelectronicsstrain engineering

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Nano Research
Volume 14 Issue 9,
September 2021
Pages 3010-3032
DOI: 10.1007/s12274-021-3440-x
Cite this article:
Sarkar A, Lee Y, Ahn J-H. Si nanomebranes: Material properties and applications. Nano Research, 2021, 14(9): 3010-3032. https://doi.org/10.1007/s12274-021-3440-x
Topics:
Layered semiconductors
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Seventh Nano Research Award

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Received: 05 January 2021
Revised: 03 March 2021
Accepted: 05 March 2021
Published: 15 April 2021
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021
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