[1]
Cavallo, F.; Lagally, M. G. Semiconductors turn soft: Inorganic nanomembranes. Soft Matter 2010, 6, 439-455.
[2]
Mack, S.; Meitl, M. A.; Baca, A. J.; Zhu, Z.-T.; Rogers, J. A. Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers. Appl. Phys. Lett. 2006, 88, 213101.
[3]
Hu, J. J.; Li, L.; Lin, H. T.; Zhang, P.; Zhou, W. D.; Ma, Z. Q. Flexible integrated photonics: Where materials, mechanics and optics meet [invited]. Opt. Mater. Express 2013, 3, 1313-1331.
[4]
Lu, W.; Lieber, C. M. Nanoelectronics from the bottom up. Nanosci. Nat. Mater. 2007, 6, 841-850.
[5]
Paskiewicz, D. M.; Savage, D. E.; Holt, M. V.; Evans, P. G.; Lagally, M. G. Nanomembrane-based materials for group IV semiconductor quantum electronics. Sci. Rep. 2014, 4, 4218.
[6]
Yin, L.; Sheng, X. Nonconventional biosensors based on nanomembrane materials. In Nanobiomaterials: Classification, Fabrication and Biomedical Applications; Wang, X. M.; Ramalingam, M.; Kong, X. D.; Zhao, L. Y., Eds.; Wiley-VCH Verlag GmbH & Co. KGa: Weinheim, Germany, 2018; pp 241-257.
[7]
Ferrari, A. C.; Bonaccorso, F.; Fal’ko, V.; Novoselov, K. S.; Roche, S.; Bøggild, P.; Borini, S.; Koppens, F. H. L.; Palermo, V.; Pugno, N. et al. Science and technology roadmap for graphene, related two-dimensional crystals, and hybrid systems. Nanoscale 2015, 7, 4598-4810.
[8]
Ying, M.; Bonifas, A. P.; Lu, N. S.; Su, Y. W.; Li, R.; Cheng, H. Y.; Ameen, A.; Huang, Y. G.; Rogers, J. A. Silicon nanomembranes for fingertip electronics. Nanotechnology 2012, 23, 344004.
[9]
Lagally, M. G. Silicon nanomembranes. MRS Bull. 2007, 32, 57-63.
[10]
Zhou, W. D.; Ma, Z. Q. Breakthroughs in photonics 2012: Breakthroughs in nanomembranes and nanomembrane lasers. IEEE Photonics J. 2013, 5, 0700707.
[11]
Zhou, H.; Seo, J. H.; Paskiewicz, D. M.; Zhu, Y.; Celler, G. K.; Voyles, P. M.; Zhou, W. D.; Lagally, M. G.; Ma, Z. Q. Fast flexible electronics with strained silicon nanomembranes. Sci. Rep. 2013, 3, 1291.
[12]
Clausen, A. M.; Paskiewicz, D. M.; Sadeghirad, A.; Jakes, J.; Savage, D. E.; Stone, D. S.; Liu, F.; Lagally, M. G. Silicon nanomembranes as a means to evaluate stress evolution in deposited thin films. Extreme Mech. Lett. 2014, 1, 9-16.
[13]
Katiyar, A. K.; Davidson, A. A.; Jang, H.; Hwangbo, Y.; Han, B.; Lee, S.; Hagiwara, Y.; Shimada, T.; Hirakata, H.; Kitamura, T. et al. Ultrasoft silicon nanomembranes: Thickness-dependent effective elastic modulus. Nanoscale 2019, 11, 15184-15194.
[14]
Khang, D. Y.; Jiang, H. Q.; Huang, Y.; Rogers, J. A. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates. Science 2006, 311, 208-212.
[15]
Zhang, P. P.; Tevaarwerk, E.; Park, B. N.; Savage, D. E.; Celler, G. K.; Knezevic, I.; Evans, P. G.; Eriksson, M. A.; Lagally, M. G. Electronic transport in nanometre-scale silicon-on-insulator membranes. Nature 2006, 439, 703-706.
[16]
Schmidt, O. G.; Eberl, K. Into nanotubes. 2001, 410, 2001.
[17]
Baca, A. J.; Meitl, M. A.; Ko, H. C.; Mack, S.; Kim, H. S.; Dong, J.; Ferreira, P. M.; Rogers, J. A. Printable single-crystal silicon micro/nanoscale ribbons, platelets and bars generated from bulk wafers. Adv. Funct. Mater. 2007, 17, 3051-3062.
[18]
Cavallo, F.; Lagally, M. G. Semiconductor nanomembranes: A platform for new properties via strain engineering. Nanoscale Res. Lett. 2012, 7, 628.
[19]
Baca, A. J.; Ahn, J. H.; Sun, Y. G.; Meitl, M. A.; Menard, E.; Kim, H. S.; Choi, W. M.; Kim, D. H.; Huang, Y.; Rogers, J. A. Semiconductor wires and ribbons for high-performance flexible electronics. Angew. Chem., Int. Ed. 2008, 47, 5524-5542.
[20]
Hwang, S. W.; Song, J. K.; Huang, X.; Cheng, H. Y.; Kang, S. K.; Kim, B. H.; Kim, J. H.; Yu, S.; Huang, Y. G.; Rogers, J. A. High-performance biodegradable/transient electronics on biodegradable polymers. Adv. Mater. 2014, 26, 3905-3911.
[21]
Seo, J. H.; Zhang, K.; Kim, M.; Zhou, W. D.; Ma, Z. Q. High-performance flexible BICMOS electronics based on single-crystal Si nanomembrane. npj Flex. Electron. 2017, 1, 1.
[22]
Qin, G. X.; Yuan, H. C.; Yang, H. J.; Zhou, W. D.; Ma, Z. Q. High-performance flexible thin-film transistors fabricated using print-transferrable polycrystalline silicon membranes on a plastic substrate. Semicond. Sci. Technol. 2010, 26, 025005.
[23]
Seo, J. H.; Zhang, Y.; Yuan, H. C.; Wang, Y. X.; Zhou, W. D.; Ma, J. G.; Ma, Z. Q.; Qin, G. X. Investigation of various mechanical bending strains on characteristics of flexible monocrystalline silicon nanomembrane diodes on a plastic substrate. Microelectron. Eng. 2013, 110, 40-43.
[24]
Seo, J. H.; Park, J.; Zhao, D. Y.; Yang, H. J.; Zhou, W. D.; Ju, B. K.; Ma, Z. Q. Large-area printed broadband membrane reflectors by laser interference lithography. IEEE Photonics J. 2013, 5, 2200106.
[25]
Won, S. M.; Kim, H. S.; Lu, N. S.; Kim, D. G.; Del Solar, C.; Duenas, T.; Ameen, A.; Rogers, J. A. Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates. IEEE Trans. Electron Devices 2011, 58, 4074-4078.
[26]
Artukovic, E.; Kaempgen, M.; Hecht, D. S.; Roth, S.; Grüner, G. Transparent and flexible carbon nanotube transistors. Nano Lett. 2005, 5, 757-760.
[27]
Kim, B. H.; Lee, J.; Won, S. M.; Xie, Z. Q.; Chang, J. K.; Yu, Y.; Cho, Y. K.; Jang, H.; Jeong, J. Y.; Lee, Y. et al. Three-dimensional silicon electronic systems fabricated by compressive buckling process. ACS Nano 2018, 12, 4164-4171.
[28]
Rogers, J. A.; Lagally, M. G.; Nuzzo, R. G. Synthesis, assembly and applications of semiconductor nanomembranes. Nature 2011, 477, 45-53.
[29]
Lee, W.; Jang, H.; Jang, B.; Kim, J. H.; Ahn, J. H. Stretchable Si logic devices with graphene interconnects. Small 2015, 11, 6272-6277.
[30]
Kim, D.-H.; Ahn, J.-H.; Choi, W. M.; Kim, H.-S.; Kim, T.-H.; Song, J. Z.; Huang, Y. Y.; Liu, Z. J.; Lu, C.; Rogers, J. A. Stretchable and foldable silicon integrated circuits Science 2008, 320, 507-511.
[31]
Guo, Q. L.; Di, Z. F.; Lagally, M. G.; Mei, Y. F. Strain engineering and mechanical assembly of silicon/germanium nanomembranes. Mater. Sci. Eng. R Rep. 2018, 128, 1-31.
[32]
Nomura, K.; Ohta, H.; Takagi, A.; Kamiya, T.; Hirano, M.; Hosono, H. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature 2004, 432, 488-492.
[33]
Rogers, J. A.; Someya, T.; Huang, Y. G. Materials and mechanics for stretchable electronics. Science 2010, 327, 1603-1607.
[34]
Menard, E.; Lee, K. J.; Khang, D. Y.; Nuzzo, R. G.; Rogers, J. A. A printable form of silicon for high performance thin film transistors on plastic substrates. Appl. Phys. Lett. 2004, 84, 5398-5400.
[35]
Shuai, Y. C.; Zhao, D. Y.; Singh Chadha, A.; Seo, J. H.; Yang, H. J.; Fan, S. H.; Ma, Z. Q.; Zhou, W. D. Coupled double-layer Fano resonance photonic crystal filters with lattice-displacement. Appl. Phys. Lett. 2013, 103, 241106.
[36]
Ju, S.; Facchetti, A.; Xuan, Y.; Liu, J.; Ishikawa, F.; Ye, P. D.; Zhou, C. W.; Marks, T. J.; Janes, D. B. Fabrication of fully transparent nanowire transistors for transparent and flexible electronics. Nat. Nanotechnol. 2007, 2, 378-384.
[37]
Qin, G. X.; Tu, G. P.; Cai, T. H.; Ma, J. G.; Ma, Z. Q. Fabrication, characterisation and modelling of fast flexible semiconductor nanomembrane electronics. Int. J. Nanotechnol. 2014, 11, 190-206.
[38]
Kim, D.-H.; Kim, Y.-S.; Wu, J.; Liu, Z. J.; Song, J. Z.; Kim, H.-S.; Huang, Y. G.; Hwang, K.-C.; Rogers, J. A. Flexible electronics: Ultrathin silicon circuits with strain-isolation layers and mesh layouts for high-performance electronics on fabric, vinyl, leather, and paper (Adv. Mater. 36/2009). Adv. Mater. 2009, 21, NA-NA.
[39]
Kim, T. I.; McCall, J. G.; Jung, Y. H.; Huang, X.; Siuda, E. R.; Li, Y. H.; Song, J. Z.; Song, Y. M.; Pao, H. A.; Kim, R. H. et al. Injectable, cellular-scale optoelectronics with applications for wireless optogenetics. Science 2013, 340, 211-216.
[40]
Yeo, W. H.; Kim, Y. S.; Lee, J.; Ameen, A.; Shi, L. K.; Li, M.; Wang, S. D.; Ma, R.; Jin, S. H.; Kang, Z. et al. Multifunctional epidermal electronics printed directly onto the skin. Adv. Mater. 2013, 25, 2773-2778.
[41]
Zhang, K.; Jung, Y. H.; Mikael, S.; Seo, J. H.; Kim, M.; Mi, H. Y.; Zhou, H.; Xia, Z. Y.; Zhou, W. D.; Gong, S. Q. et al. Origami silicon optoelectronics for hemispherical electronic eye systems. Nat. Commun. 2017, 8, 1782.
[42]
Park, M.; Kim, M. S.; Park, Y. K.; Ahn, J. H. Si membrane based tactile sensor with active matrix circuitry for artificial skin applications. Appl. Phys. Lett. 2015, 106, 043502.
[43]
Yang, H. J.; Zhao, D. Y.; Chuwongin, S.; Seo, J. H.; Yang, W. Q.; Shuai, Y. C.; Berggren, J.; Hammar, M.; Ma, Z. Q.; Zhou, W. D. Transfer-printed stacked nanomembrane lasers on silicon. Nat. Photonics 2012, 6, 615-620.
[44]
Kim, J.; Lee, M.; Shim, H. J.; Ghaffari, R.; Cho, H. R.; Son, D.; Jung, Y. H.; Soh, M.; Choi, C.; Jung, S. et al. Stretchable silicon nanoribbon electronics for skin prosthesis. Nat. Commun. 2014, 5, 5747.
[45]
Choi, W. M.; Song, J. Z.; Khang, D. Y.; Jiang, H. Q.; Huang, Y. Y.; Rogers, J. A. Biaxially stretchable “wavy” silicon nanomembranes. Nano Lett. 2007, 7, 1655-1663.
[46]
Kang, S. K.; Hwang, S. W.; Yu, S.; Seo, J. H.; Corbin, E. A.; Shin, J.; Wie, D. S.; Bashir, R.; Ma, Z. Q.; Rogers, J. A. Biodegradable thin metal foils and spin-on glass materials for transient electronics. Adv. Funct. Mater. 2015, 25, 1789-1797.
[47]
Lu, L. Y.; Yang, Z. J.; Meacham, K.; Cvetkovic, C.; Corbin, E. A.; Vázquez-Guardado, A.; Xue, M. T.; Yin, L.; Boroumand, J.; Pakeltis, G. et al. Biodegradable monocrystalline silicon photovoltaic microcells as power supplies for transient biomedical implants. Adv. Energy Mater. 2018, 8, 1703035.
[48]
Kang, S. K.; Murphy, R. K. J.; Hwang, S. W.; Lee, S. M.; Harburg, D. V.; Krueger, N. A.; Shin, J.; Gamble, P.; Cheng, H. Y.; Yu, S. et al. Bioresorbable silicon electronic sensors for the brain. Nature 2016, 530, 71-76.
[49]
Park, S. I.; Xiong, Y. J.; Kim, R. H.; Elvikis, P.; Meitl, M.; Kim, D. H.; Wu, J.; Yoon, J.; Yu, C. J.; Liu, Z. J. et al. Printed assemblies of inorganic light-emitting diodes for deformable and semitransparent displays. Science 2009, 325, 977-981.
[50]
Qin, G. X.; Yang, L. C.; Seo, J. H.; Yuan, H. C.; Celler, G. K.; Ma, J. G.; Ma, Z. Q. Experimental characterization and modeling of the bending strain effect on flexible microwave diodes and switches on plastic substrate. Appl. Phys. Lett. 2011, 99, 243104.
[51]
Zhou, W. D.; Ma, Z. Q.; Chuwongin, S.; Shuai, Y. C.; Seo, J. H.; Zhao, D. Y.; Yang, H. J.; Yang, W. Q. Semiconductor nanomembranes for integrated silicon photonics and flexible Photonics. Opt. Quantum Electron. 2012, 44, 605-611.
[52]
Rodrigues, D.; Barbosa, A. I.; Rebelo, R.; Kwon, I. K.; Reis, R. L.; Correlo, V. M. Skin-integrated wearable systems and implantable biosensors: A comprehensive review. Biosensors 2020, 10, 79.
[53]
Ma, Y. J.; Feng, X.; Rogers, J. A.; Huang, Y. G.; Zhang, Y. H. Design and application of “J-shaped” stress-strain behavior in stretchable electronics: A review. Lab Chip 2017, 17, 1689-1704.
[54]
Khang, D. Y.; Jiang, H. Q.; Huang, Y.; Rogers, J. A. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates. Science 2006, 311, 208-212.
[55]
Salleo, A.; Wong, W. S. Flexible Electronics: Materials and Applications; Springer: Boston, MA, USA, 2009; pp 1-28.
[56]
Viventi, J.; Kim, D. H.; Moss, J. D.; Kim, Y. S.; Blanco, J. A.; Annetta, N.; Hicks, A.; Xiao, J. L.; Huang, Y. G.; Callans, D. J. et al. A conformal, bio-interfaced class of silicon electronics for mapping cardiac electrophysiology. Sci. Transl. Med. 2010, 2, 24ra22.
[57]
Cho, M.; Seo, J. H.; Park, D. W.; Zhou, W. D.; Ma, Z. Q. Capacitance-voltage characteristics of Si and Ge nanomembrane based flexible metal-oxide-semiconductor devices under bending conditions. Appl. Phys. Lett. 2016, 108, 233505.
[58]
Zhang, K.; Seo, J. H.; Zhou, W. D.; Ma, Z. Q. Fast flexible electronics using transferrable silicon nanomembranes. J. Phys. D. Appl. Phys. 2012, 45, 143001.
[59]
Liu, D.; Zhou, W. D.; Ma, Z. Q. Semiconductor nanomembrane-based light-emitting and photodetecting devices. Photonics 2016, 3, 40.
[60]
Kim, M.; Mi, H. Y.; Cho, M.; Seo, J. H.; Zhou, W. D.; Gong, S. Q.; Ma, Z. Q. Tunable biaxial in-plane compressive strain in a Si nanomembrane transferred on a polyimide film. Appl. Phys. Lett. 2015, 106, 212107.
[61]
Yang, H. J.; Zhao, D. Y.; Liu, S.; Liu, Y. H.; Seo, J. H.; Ma, Z. Q.; Zhou, W. D. Transfer printed nanomembranes for heterogeneously integrated membrane photonics. Photonics 2015, 2, 1081-1100.
[62]
Tao, H.; Brenckle, M. A.; Yang, M. M.; Zhang, J. D.; Liu, M. K.; Siebert, S. M.; Averitt, R. D.; Mannoor, M. S.; McAlpine, M. C.; Rogers, J. A. et al. Silk-based conformal, adhesive, edible food sensors. Adv. Mater. 2012, 24, 1067-1072.
[63]
Jang, H.; Lee, W.; Won, S. M.; Ryu, S. Y.; Lee, D.; Koo, J. B.; Ahn, S. D.; Yang, C. W.; Jo, M. H.; Cho, J. H. et al. Quantum confinement effects in transferrable silicon nanomembranes and their applications on unusual substrates. Nano Lett. 2013, 13, 5600-5607.
[64]
Shergujri, M. A.; Jaman, R.; Baruah, A. J.; Mahato, M.; Pyngrope, D.; Singh, L. R.; Gogoi, M. Paper-based sensors for biomedical applications. In Biomedical Engineering and Its Applications in Healthcare; Paul, S., Ed.; Springer: Singapore, 2019; pp 355-376.
[65]
Rogers, J. A.; Ahn, J. H. Silicon Nanomembranes: Fundamental Science and Applications; Wiley-VCH Verlag GmbH & Co. KGaA: Weinheim, Germany, 2016.
[66]
Kim, D. H.; Lu, N. S.; Ghaffari, R.; Kim, Y. S.; Lee, S. P.; Xu, L. Z.; Wu, J.; Kim, R. H.; Song, J. Z.; Liu, Z. J. et al. Materials for multifunctional balloon catheters with capabilities in cardiac electrophysiological mapping and ablation therapy. Nat. Mater. 2011, 10, 316-323.
[67]
Hwang, S. W.; Huang, X.; Seo, J. H.; Song, J. K.; Kim, S.; Hage-Ali, S.; Chung, H. J.; Tao, H.; Omenetto, F. G.; Ma, Z. Q. et al. Materials for bioresorbable radio frequency electronics. Adv. Mater. 2013, 25, 3526-3531.
[68]
Hwang, S. W.; Park, G.; Edwards, C.; Corbin, E. A.; Kang, S. K.; Cheng, H. Y.; Song, J. K.; Kim, J. H.; Yu, S.; Ng, J. et al. Dissolution chemistry and biocompatibility of single-crystalline silicon nanomembranes and associated materials for transient electronics. ACS Nano 2014, 8, 5843-5851.
[69]
Yu, K. J.; Kuzum, D.; Hwang, S. W.; Kim, B. H.; Juul, H.; Kim, N. H.; Won, S. M.; Chiang, K.; Trumpis, M.; Richardson, A. G. et al. Bioresorbable silicon electronics for transient spatiotemporal mapping of electrical activity from the cerebral cortex. Nat. Mater. 2016, 15, 782-791.
[70]
Shin, J.; Yan, Y.; Bai, W. B.; Xue, Y. G.; Gamble, P.; Tian, L. M.; Kandela, I.; Haney, C. R.; Spees, W.; Lee, Y. et al. Bioresorbable pressure sensors protected with thermally grown silicon dioxide for the monitoring of chronic diseases and healing processes. Nat. Biomed. Eng. 2019, 3, 37-46.
[71]
Hwang, S. W.; Lee, C. H.; Cheng, H. Y.; Jeong, J. W.; Kang, S. K.; Kim, J. H.; Shin, J.; Yang, J.; Liu, Z. J.; Ameer, G. A. et al. Biodegradable elastomers and silicon nanomembranes/nanoribbons for stretchable, transient electronics, and biosensors. Nano Lett. 2015, 15, 2801-2808.
[72]
Sun, Y. G.; Choi, W. M.; Jiang, H. Q.; Huang, Y. Y.; Rogers, J. A. Controlled buckling of semiconductor nanoribbons for stretchable electronics. Nat. Nanotechnol. 2006, 1, 201-207.
[73]
Xia, F.; Kim, S. B.; Cheng, H. Y.; Lee, J. M.; Song, T.; Huang, Y. G.; Rogers, J. A.; Paik, U.; Park, W. I. Facile synthesis of free-standing silicon membranes with three-dimensional nanoarchitecture for anodes of lithium ion batteries. Nano Lett. 2013, 13, 3340-3346.
[74]
Lee, W.; Hwangbo, Y.; Kim, J. H.; Ahn, J. H. Mobility enhancement of strained Si transistors by transfer printing on plastic substrates. NPG Asia Mater. 2016, 8, e256.
[75]
Keum, H.; Carlson, A.; Ning, H. L.; Mihi, A.; Eisenhaure, J. D.; Braun, P. V.; Rogers, J. A.; Kim, S. Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication. J. Micromech. Microeng. 2012, 22, 055018.
[76]
Ko, H. C.; Baca, A. J.; Rogers, J. A. Bulk quantities of single-crystal silicon micro-/nanoribbons generated from bulk wafers. Nano Lett. 2006, 6, 2318-2324.
[77]
Carlson, A.; Bowen, A. M.; Huang, Y. G.; Nuzzo, R. G.; Rogers, J. A. Transfer printing techniques for materials assembly and micro/nanodevice fabrication. Adv. Mater. 2012, 24, 5284-5318.
[78]
Meitl, M. A.; Zhu, Z. T.; Kumar, V.; Lee, K. J.; Feng, X.; Huang, Y. Y.; Adesida, I.; Nuzzo, R. G.; Rogers, J. A. Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nat. Mater. 2006, 5, 33-38.
[79]
Das, T.; Jang, H.; Lee, J. B.; Chu, H.; Kim, S. D.; Ahn, J. H. Vertical field effect tunneling transistor based on graphene-ultrathin Si nanomembrane heterostructures. 2D Mater. 2015, 2, 044006.
[80]
Gomes, M. da M.; Quinhones, M. S.; Engelhardt, E.; Lerner, R. M.; Andrés, A.; Pereira, P. M. C. de M.; Miguens, S.; Nacional, S.; Ministério da Educação e Ciência; Berger, J. et al. We are Intechopen, the world’ s leading publisher of open access books built by scientists, for scientists top 1%. Intech 2013, 15, 13.
[81]
Torres Sevilla, G. A.; Ghoneim, M. T.; Fahad, H.; Rojas, J. P.; Hussain, A. M.; Hussain, M. M. Flexible nanoscale high-performance FinFETs. ACS Nano 2014, 8, 9850-9856.
[82]
Lee, K. J.; Motala, M. J.; Meitl, M. A.; Childs, W. R.; Menard, E.; Shim, A. K.; Rogers, J. A.; Nuzzo, R. G. Large-area, selective transfer of microstructured silicon: A printing-based approach to high-performance thin-film transistors supported on flexible substrates. Adv. Mater. 2005, 17, 2332-2336.
[83]
Seo, J. H.; Yuan, H. C.; Sun, L.; Zhou, W. D.; Ma, Z. Q. Transferrable single-crystal silicon nanomembranes and their application to flexible microwave systems. J. Inf. Disp. 2011, 12, 109-113.
[84]
Menon, L.; Yang, H. J.; Cho, S. J.; Mikael, S.; Ma, Z. Q.; Zhou, W. D. Transferred flexible three-color silicon membrane photodetector arrays. IEEE Photonics J. 2015, 7, 6800106.
[85]
Sun, L.; Qin, G. X.; Seo, J. H.; Celler, G. K.; Zhou, W. D.; Ma, Z. Q. 12-GHz thin-film transistors on transferrable silicon nanomembranes for high-performance flexible electronics. Small 2010, 6, 2553-2557.
[86]
Yang, H. J.; Zhao, D. Y.; Seo, J. H.; Chuwongin, S.; Kim, S.; Rogers, J. A.; Ma, Z. Q.; Zhou, W. D. Broadband membrane reflectors on glass. IEEE Photonics Technol. Lett. 2012, 24, 476-478.
[87]
Feng, X.; Meitl, M. A.; Bowen, A. M.; Huang, Y. G.; Nuzzo, R. G.; Rogers, J. A. Competing fracture in kinetically controlled transfer printing. Langmuir 2007, 23, 12555-12560.
[88]
Carlson, A.; Kim-Lee, H. J.; Wu, J.; Elvikis, P.; Cheng, H. Y.; Kovalsky, A.; Elgan, S.; Yu, Q. M.; Ferreira, P. M.; Huang, Y. G. et al. Shear-enhanced adhesiveless transfer printing for use in deterministic materials assembly. Appl. Phys. Lett. 2011, 98, 264104.
[89]
Carlson, A.; Wang, S. D.; Elvikis, P.; Ferreira, P. M.; Huang, Y. G.; Rogers, J. A. Active, programmable elastomeric surfaces with tunable adhesion for deterministic assembly by transfer printing. Adv. Funct. Mater. 2012, 22, 4476-4484.
[90]
Park, S. I.; Xiong, Y. J.; Kim, R. H.; Elvikis, P.; Meitl, M.; Kim, D. H.; Wu, J.; Yoon, J.; Yu, C. J.; Liu, Z. J. et al. Printed assemblies of inorganic light-emitting diodes for deformable and semitransparent displays. Science 2009, 325, 977-981.
[91]
Khang, D. Y.; Rogers, J. A.; Lee, H. H. Mechanical buckling: Mechanics, metrology, and stretchable electronics. Adv. Funct. Mater. 2009, 19, 1526-1536.
[92]
Jiang, H. Q.; Khang, D. Y.; Song, J. Z.; Sun, Y. G.; Huang, Y. G.; Rogers, J. A. Finite deformation mechanics in buckled thin films on compliant supports. Proc. Natl. Acad. Sci. USA 2007, 104, 15607-15612.
[93]
Gelinck, G. H.; Huitema, H. E. A.; van Veenendaal, E.; Cantatore, E.; Schrijnemakers, L.; van der Putten, J. B. P. H.; Geuns, T. C. T.; Beenhakkers, M.; Giesbers, J. B.; Huisman, B. H. et al. Flexible active-matrix displays and shift registers based on solution-processed organic transistors. Nat. Mater. 2004, 3, 106-110.
[94]
Sun, Y.; Kumar, V.; Adesida, I.; Rogers, J. A. Buckled and wavy ribbons of GaAs for high-performance electronics on elastomeric substrates. Adv. Mater. 2006, 18, 2857-2862.
[95]
Kim, D. H.; Rogers, J. A. Stretchable electronics: Materials strategies and devices. Adv. Mater. 2008, 20, 4887-4892.
[96]
Xu, S.; Yan, Z.; Jang, K. I.; Huang, W.; Fu, H. R.; Kim, J.; Wei, Z. J.; Flavin, M.; McCracken, J.; Wang, R. H. et al. Assembly of micro/nanomaterials into complex, three-dimensional architectures by compressive buckling. Science 2015, 347, 154-159.
[97]
Babaee, S.; Shim, J.; Weaver, J. C.; Chen, E. R.; Patel, N.; Bertoldi, K. 3D soft metamaterials with negative Poisson’s ratio. Adv. Mater. 2013, 25, 5044-5049.
[98]
Roberts, M. M.; Klein, L. J.; Savage, D. E.; Slinker, K. A.; Friesen, M.; Celler, G.; Eriksson, M. A.; Lagally, M. G. Elastically relaxed free-standing strained-silicon nanomembranes. Nat. Mater. 2006, 5, 388-393.
[99]
Lee, S.; Kim, K.; Dhakal, K. P.; Kim, H.; Yun, W. S.; Lee, J.; Cheong, H.; Ahn, J. H. Thickness-dependent phonon renormalization and enhanced Raman scattering in ultrathin silicon nanomembranes. Nano Lett. 2017, 17, 7744-7750.
[100]
Sarkar, A.; Bar, R.; Singh, S.; Chowdhury, R. K.; Bhattacharya, S.; Das, A. K.; Ray, S. K. Size-tunable electroluminescence characteristics of quantum confined Si nanocrystals embedded in Si-rich oxide matrix. Appl. Phys. Lett. 2020, 116, 231105.
[101]
Brus, L. Zero-dimensional “excitons” in semiconductor clusters. IEEE J. Quantum Electron. 1986, 22, 1909-1914.
[102]
Groenewold, J. Wrinkling of plates coupled with soft elastic media. Phys. A Stat. Mech. Appl. 2001, 298, 32-45.
[103]
Sarkar, A.; Katiyar, A. K.; Mukherjee, S.; Singh, S.; Singh, S. K.; Das, A. K.; Ray, S. K. Geometry controlled white light emission and extraction in CdS/black-Si conical heterojunctions. ACS Appl. Electron. Mater. 2019, 1, 25-33.
[104]
Ray, S. K.; Katiyar, A. K.; Raychaudhuri, A. K. One-dimensional Si/Ge nanowires and their heterostructures for multifunctional applications—A review. Nanotechnology 2017, 28, 092001.
[105]
Cho, M.; Seo, J. H.; Lee, J.; Zhao, D. Y.; Mi, H. Y.; Yin, X.; Kim, M.; Wang, X. D.; Zhou, W. D.; Ma, Z. Q. Ultra-thin distributed Bragg reflectors via stacked single-crystal silicon nanomembranes. Appl. Phys. Lett. 2015, 106, 181107.
[106]
Zhou, W. D.; Zhao, D. Y.; Shuai, Y. C.; Yang, H. J.; Chuwongin, S.; Chadha, A.; Seo, J. H.; Wang, K. X.; Liu, V.; Ma, Z. Q. et al. Progress in 2D photonic crystal Fano resonance photonics. Prog. Quantum Electron. 2014, 38, 1-74.
[107]
Zhao, D. Y.; Yang, H. J.; Ma, Z. Q.; Zhou, W. D. Polarization independent broadband reflectors based on cross-stacked gratings. Opt. Express 2011, 19, 9050-9055.
[108]
Shuai, Y. C.; Zhao, D. Y.; Medhi, G.; Peale, R.; Ma, Z. Q.; Buchwald, W.; Soref, R.; Zhou, W. D. Fano-resonance photonic crystal membrane reflectors at mid- and far-infrared. IEEE Photonics J. 2013, 5, 4700206.
[109]
Shuai, Y. C.; Zhao, D. Y.; Tian, Z. B.; Seo, J. H.; Plant, D. V.; Ma, Z. Q.; Fan, S. H.; Zhou, W. D. Double-layer Fano resonance photonic crystal filters. Opt. Express 2013, 21, 24582-24589.
[110]
Qiang, Z. X.; Yang, H. J.; Chuwongin, S.; Zhao, D. Y.; Ma, Z. Q.; Zhou, W. D. Design of Fano broadband reflectors on SOI. IEEE Photonics Technol. Lett. 2010, 22, 1108-1110.
[111]
Cho, M.; Seo, J. H.; Zhao, D. Y.; Lee, J.; Xiong, K. L.; Yin, X.; Liu, Y. H.; Liu, S. C.; Kim, M.; Kim, T. J. et al. Amorphous Si/SiO2 distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes. J. Vac. Sci. Technol. B 2016, 34, 040601.
[112]
Liu, V.; Povinelli, M.; Fan, S. H. Resonance-enhanced optical forces between coupled photonic crystal slabs. Opt. Express 2009, 17, 21897-21909.
[113]
Rogers, J. A.; Lagally, M. G.; Nuzzo, R. G. Synthesis, assembly and applications of semiconductor nanomembranes. Nature 2011, 477, 45-53.
[114]
Peng, W. N.; Aksamija, Z.; Scott, S. A.; Endres, J. J.; Savage, D. E.; Knezevic, I.; Eriksson, M. A.; Lagally, M. G. Probing the electronic structure at semiconductor surfaces using charge transport in nanomembranes. Nat. Commun. 2013, 4, 1339.
[115]
Peng, W. N.; Zamiri, M.; Scott, S. A.; Cavallo, F.; Endres, J. J.; Knezevic, I.; Eriksson, M. A.; Lagally, M. G. Electronic transport in hydrogen-terminated Si(001) nanomembranes. Phys. Rev. Appl. 2018, 9, 024037.
[116]
Song, E. M.; Guo, Z. X.; Li, G. D.; Liao, F. Y.; Li, G. J.; Du, H. N.; Schmidt, O. G.; Kim, M.; Yi, Y.; Bao, W. Z. et al. Thickness-dependent electronic transport in ultrathin, single crystalline silicon nanomembranes. Adv. Electron. Mater. 2019, 5, 1900232.
[117]
Thomsen, C.; Strait, J.; Vardeny, Z.; Maris, H. J.; Tauc, J.; Hauser, J. J. Coherent phonon generation and detection by picosecond light pulses. Phys. Rev. Lett. 1984, 53, 989-992.
[118]
Chen, I. J.; Mante, P. A.; Chang, C. K.; Yang, S. C.; Chen, H. Y.; Huang, Y. R.; Chen, L. C.; Chen, K. H.; Gusev, V.; Sun, C. K. Graphene-to-substrate energy transfer through out-of-plane longitudinal acoustic phonons. Nano Lett. 2014, 14, 1317-1323.
[119]
Major, T. A.; Lo, S. S.; Yu, K.; Hartland, G. V. Time-resolved studies of the acoustic vibrational modes of metal and semiconductor Nano-objects. J. Phys. Chem. Lett. 2014, 5, 866-874.
[120]
Bartels, A.; Cerna, R.; Kistner, C.; Thoma, A.; Hudert, F.; Janke, C.; Dekorsy, T. Ultrafast time-domain spectroscopy based on high-speed asynchronous optical sampling. Rev. Sci. Instrum. 2007, 78, 035107.
[121]
Cuffe, J.; Ristow, O.; Chávez, E.; Shchepetov, A.; Chapuis, P. O.; Alzina, F.; Hettich, M.; Prunnila, M.; Ahopelto, J.; Dekorsy, T. et al. Lifetimes of confined acoustic phonons in ultrathin silicon membranes. Phys. Rev. Lett. 2013, 110, 095503.
[122]
Sarkar, A.; Katiyar, A. K.; Mukherjee, S.; Ray, S. K. Enhanced UV-visible photodetection characteristics of a flexible Si membrane-Zno heterojunction utilizing piezo-phototronic effect. J. Phys. D. Appl. Phys. 2017, 50, 145104.
[123]
Sarkar, A.; Katiyar, A. K.; Das, A. K.; Ray, S. K. Si membrane-ZnO heterojunction-based broad band visible light emitting diode for flexible optoelectronic devices. Flex. Print. Electron. 2018, 3, 025004.
[124]
Zhao, D.; Yang, H.; Chuwongin, S.; Seo, J. H.; Ma, Z.; Zhou, W. Design of photonic crystal membrane-reflector-based VCSELs. IEEE Photonics J. 2012, 4, 2169-2175.
[125]
Zhao, D. Y.; Yang, H. J.; Seo, J. H.; Ma, Z. Q.; Zhou, W. D. Design and characterization of photonic crystal membrane reflector based vertical cavity surface emitting lasers on silicon. Rev. Nanosci. Nanotechnol. 2014, 3, 77-87.
[126]
Huang, X.; Liu, Y. H.; Kong, G. W.; Seo, J. H.; Ma, Y. J.; Jang, K. I.; Fan, J. A.; Mao, S. M.; Chen, Q. W.; Li, D. Z. et al. Epidermal radio frequency electronics for wireless power transfer. Microsyst. Nanoeng. 2016, 2, 16052.
[127]
Seo, J. H.; Ling, T.; Gong, S. Q.; Zhou, W. D.; Ma, A. L.; Guo, L. J.; Ma, Z. Q. Fast flexible transistors with a nanotrench structure. Sci. Rep. 2016, 6, 24771.
[128]
Qin, G. X.; Yuan, H. C.; Celler, G. K.; Ma, J. G.; Ma, Z. Q. RF model of flexible microwave switches employing single-crystal silicon nanomembranes on a plastic substrate. Microelectron. Eng. 2012, 95, 21-25.
[129]
Qin, G. X.; Yuan, H. C.; Celler, G. K.; Zhou, W. D.; Ma, J. G.; Ma, Z. Q. RF model of flexible microwave single-crystalline silicon nanomembrane PIN diodes on plastic substrate. Microelectron. J. 2011, 42, 509-514.
[130]
Qin, G. X.; Seo, J. H.; Zhang, Y.; Zhou, H.; Zhou, W. D.; Wang, Y. X.; Ma, J. G.; Ma, Z. Q. RF characterization of gigahertz flexible silicon thin-film transistor on plastic substrates under bending conditions. IEEE Electron Device Lett. 2013, 34, 262-264.
[131]
Qin, G. X.; Yan, Y. X.; Jiang, N. Y.; Ma, J. G.; Ma, P. X.; Racanelli, M.; Ma, Z. Q. RF characteristics of proton radiated large-area SiGe HBTs at extreme temperatures. Microelectron. Reliab. 2012, 52, 2568-2571.
[132]
Menon, L.; Yang, H.; Cho, S. J.; Mikael, S.; Ma, Z.; Zhou, W. Transferred flexible three-color silicon membrane photodetector arrays. IEEE Photonics Journal. 2015, 7, 1-6.
[133]
Das, T.; Chen, X.; Jang, H.; Oh, I. K.; Kim, H.; Ahn, J. H. Highly flexible hybrid CMOS Inverter based on Si nanomembrane and molybdenum disulfide. Small 2016, 12, 5720-5727.
[134]
Li, G. J.; Ma, Z.; You, C. Y.; Huang, G. S.; Song, E. M.; Pan, R. B.; Zhu, H.; Xin, J. Q.; Xu, B. R.; Lee, T. et al. Silicon nanomembrane phototransistor flipped with multifunctional sensors toward smart digital dust. Sci. Adv. 2020, 6, eaaz6511.
[135]
Hekmatshoar, B.; Cherenack, K. H.; Kattamis, A. Z.; Long, K.; Wagner, S.; Sturm, J. C. Highly stable amorphous-silicon thin-film transistors on clear plastic. Appl. Phys. Lett. 2008, 93, 032103.
[136]
Kim, D. H.; Ahn, J. H.; Choi, W. M.; Kim, H. S.; Kim, T. H.; Song, J. Z.; Huang, Y. Y.; Liu, Z. J.; Lu, C.; Rogers, J. A. Stretchable and foldable silicon integrated circuits. Science 2008, 320, 507-511.
[137]
Xu, C. H.; Pan, R. B.; Guo, Q. L.; Wu, X.; Li, G. J.; Huang, G. S.; An, Z. H.; Li, X. L.; Mei, Y. F. Ultrathin silicon nanomembrane in a tubular geometry for enhanced photodetection. Adv. Opt. Mater. 2019, 7, 1900823.
[138]
Jang, H.; Kim, J.; Kim, M. S.; Cho, J. H.; Choi, H.; Ahn, J. H. Observation of the inverse giant piezoresistance effect in silicon nanomembranes probed by ultrafast terahertz spectroscopy. Nano Lett. 2014, 14, 6942-6948.
[139]
Song, Y. M.; Xie, Y. Z.; Malyarchuk, V.; Xiao, J. L.; Jung, I.; Choi, K. J.; Liu, Z. J.; Park, H.; Lu, C. F.; Kim, R. H. et al. Digital cameras with designs inspired by the arthropod eye. Nature 2013, 497, 95-99.
[140]
Jeong, J. W.; Yeo, W. H.; Akhtar, A.; Norton, J. J. S.; Kwack, Y. J.; Li, S.; Jung, S. Y.; Su, Y. W.; Lee, W.; Xia, J. et al. Materials and optimized designs for human-machine interfaces via epidermal electronics. Adv. Mater. 2013, 25, 6839-6846.
[141]
Won, S. M.; Kim, H. S.; Lu, N. S.; Kim, D. G.; Del Solar, C.; Duenas, T.; Ameen, A.; Rogers, J. A. Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates. IEEE Trans. Electron Devices 2011, 58, 4074-4078.
[142]
Hwang, S. W.; Tao, H.; Kim, D. H.; Cheng, H. Y.; Song, J. K.; Rill, E.; Brenckle, M. A.; Panilaitis, B.; Won, S. M.; Kim, Y. S. et al. A physically transient form of silicon electronics. Science 2012, 337, 1640-1644.
[143]
Maheshwari, V.; Saraf, R. Tactile devices to sense touch on a par with a human finger. Angew. Chem., Int. Ed. 2008, 47, 7808-7826.
[144]
Ying, M.; Bonifas, A. P.; Lu, N. S.; Su, Y. W.; Li, R.; Cheng, H. Y.; Ameen, A.; Huang, Y. G.; Rogers, J. A. Silicon nanomembranes for fingertip electronics. Nanotechnology 2012, 23, 344004.
[145]
Lee, Y. K.; Yu, K. J.; Song, E. M.; Barati Farimani, A.; Vitale, F.; Xie, Z. Q.; Yoon, Y.; Kim, Y.; Richardson, A.; Luan, H. W. et al. Dissolution of monocrystalline silicon nanomembranes and their use as encapsulation layers and electrical interfaces in water-soluble electronics. ACS Nano 2017, 11, 12562-12572.
[146]
Fang, H.; Yu, K. J.; Gloschat, C.; Yang, Z. J.; Song, E. M.; Chiang, C. H.; Zhao, J. N.; Won, S. M.; Xu, S. Y.; Trumpis, M. et al. Capacitively coupled arrays of multiplexed flexible silicon transistors for long-term cardiac electrophysiology. Nat. Biomed. Eng. 2017, 1, 0038.
[147]
Hernandez, H. L.; Kang, S. K.; Lee, O. P.; Hwang, S. W.; Kaitz, J. A.; Inci, B.; Park, C. W.; Chung, S.; Sottos, N. R.; Moore, J. S. et al. Triggered transience of metastable poly(phthalaldehyde) for transient electronics. Adv. Mater. 2014, 26, 7637-7642.
[148]
Shiri, D.; Kong, Y. F.; Buin, A.; Anantram, M. P. Strain induced change of bandgap and effective mass in silicon nanowires. Appl. Phys. Lett. 2008, 93, 073114.
[149]
Hong, K. H.; Kim, J.; Lee, S. H.; Shin, J. K. Strain-driven electronic band structure modulation of Si nanowires. Nano Lett. 2008, 8, 1335-1340.
[150]
Zhou, M.; Liu, Z.; Wang, Z. F.; Bai, Z. Q.; Feng, Y. P.; Lagally, M. G.; Liu, F. Strain-engineered surface transport in Si(001): Complete isolation of the surface state via tensile strain. Phys. Rev. Lett. 2013, 111, 246801.
[151]
Katiyar, A. K.; Thai, K. Y.; Yun, W. S.; Lee, J.; Ahn, J. H. Breaking the absorption limit of Si toward SWIR wavelength range via strain engineering. Sci. Adv. 2020, 6, eabb0576.
[152]
Seo, J. H.; Zhang, K.; Kim, M.; Zhao, D. Y.; Yang, H. J.; Zhou, W. D.; Ma, Z. Q. Flexible phototransistors based on single-crystalline silicon nanomembranes. Adv. Opt. Mater. 2016, 4, 120-125.