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Research Article

Two-dimensional van der Waals thin film transistors as active matrix for spatially resolved pressure sensing

Chao Ma1,2,§, Dong Xu1,§, Peiqi Wang3, Zhaoyang Lin3, Jingyuan Zhou3, Chuancheng Jia3, Jin Huang1, Shengtao Li2, Yu Huang1,4( ), Xiangfeng Duan3,4( )
Department of Materials Science and Engineering,University of California,Los Angeles, CA,90095,USA;
State Key Laboratory of Electrical Insulation and Power Equipment,Xi'an Jiaotong University,Xi'an,710049,China;
Department of Chemistry and Biochemistry,University of California,Los Angeles, CA,90095,USA;
Department of Chemistry and Biochemistry,University of California,Los Angeles, CA,90095,USA;

§Chao Ma and Dong Xu contributed equally to this work.

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Graphical Abstract

Abstract

The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots, prostheses, human–machine interfaces, and artificial intelligence (AI). Here we report an integrated pressure sensor array, by combining solution-processed two-dimensional (2D) MoS2 van der Waals (vdW) thin film transistor (TFT) active matrix and conductive micropyramidal pressure-sensitive rubber (PSR) electrodes made of polydimethylsiloxane/ carbon nanotube composites, to achieve spatially revolved pressure mapping with excellent contrast and low power consumption. We demonstrate a 10 × 10 active matrix by using the 2D MoS2 vdW-TFTs with high on-off ratio > 106, minimal hysteresis, and excellent device-to-device uniformity. The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping. This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays, and could be extended for other active-matrix arrays of electronic or optoelectronic devices.

Keywords

pressure sensor arrayvan der Waals thin film transistortwo-dimensional materialactive matrixmicropyramids

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Nano Research
Volume 14 Issue 10,
October 2021
Pages 3395-3401
DOI: 10.1007/s12274-021-3717-0
Cite this article:
Ma C, Xu D, Wang P, et al. Two-dimensional van der Waals thin film transistors as active matrix for spatially resolved pressure sensing. Nano Research, 2021, 14(10): 3395-3401. https://doi.org/10.1007/s12274-021-3717-0
Topics:
Thin film transistors

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Received: 20 May 2021
Revised: 23 June 2021
Accepted: 24 June 2021
Published: 04 September 2021
© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021
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