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Research Article

High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography

Xiaowan Yuan1,§, Daiqin Xiao2,§, Wei Yao2,§, Zhihao Zhang1, Lin Yang1, Liyuan Zhang3, Yibo Zeng2, Jiaqi Liao2, Shanxiong Luo2, Chonghao Li2, Hong Chen2,4( ), Xiangmeng Qu1( )
Key Laboratory of Sensing Technology and Biomedical Instruments of Guangdong Province and School of Biomedical Engineering, Sun Yat-sen University, Shenzhen 518107, China
Pen-Tung Sah Institute of Micro-Nano Science and Technology, School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen University, Xiamen 361005, China
Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
Jiujiang Research Institute of Xiamen University, Jiujiang 332000, China

§ Xiaowan Yuan, Daiqin Xiao, and Wei Yao contributed equally to this work.

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Graphical Abstract

In this work, we establish a DNA origami-assisted nanolithography based on area-selective atomiclayer deposition (ALD) strategy for fabricating custom shapes hafnium oxide (HfO2) nanostructureswith high-fidelity and high-throughput. HfO2 atomic be selectively deposited on the hydroxyl-richDNA origami surface by ALD strategy due to difference in surface group of DNA origami andprotective layer substrates. Our strategy overcomes the uncontrollable growth of the nanomaterials,improving the integrity and resolution of the pattern transfer process. The strategy provides agenerality technology for nanofabrication strategy.

Abstract

DNA origami-assisted nanolithography (DOANL) for fabricating custom-designed nanomaterials through pattern transfer from DNA origami to different substrates materials are presented. However, the pattern's integrity and resolution face considerable challenges due to the uncontrollable growth of the nanomaterials during transformation and the unclear mechanism of DOANL. Herein, we report a DOANL combined with area-selective atomic layer deposition (ALD) strategy for fabricating custom shapes hafnium oxide (HfO2) with the high-fidelity and high-throughput. We find that the HfO2 selectively grows on DNA origami substrates in a hydroxyl-rich area instead of a methyl-rich protective layer. Combined with the merit of the area-selective ALD method, the HfO2 atom selectively coated on the DNA origami surface, thus, precisely modeling the shapes with high-precision in our study based on the surface groups difference of DNA origami and the naked hexamethyldisilane (HMDS)-treated substrates, which reveal the mechanical of high-fidelity pattern transfer based on DOANL. As a result, DNA origami structures can program the shape of HfO2 nanostructures. The DOANL that is based on the principle of "bottom-up" precision assembly breaks through the shape complexity and high-throughput fabrication limitation of the HfO2 nanostructures, including two- and three-dimensional structures, plane and curved structures, monolithic and hollow structures. Based on the "top-down" accurate fabrication principle, the area-selective ALD on methyl-rich protective layer substrates improves the integrity and resolution of the pattern transfer process. Overall, this work provides a general technology for nanofabrication strategy.

Keywords

HfO2DNA origami masksDNA Origami-assisted nanolithographyarea-selective atomic layer deposition

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References

1

Qian, L.; Zheng, Y.; Xue, J. G.; Holloway, P. H. Stable and efficient quantum-dot light-emitting diodes based on solution-processed multilayer structures. Nat. Photon. 2011, 5, 543–548.
Crossref Google Scholar
2

Nasiri, N.; Bo, R. H.; Hung, T. F.; Roy, V. A. L.; Fu, L.; Tricoli, A. Tunable band-selective UV-Photodetectors by 3D self-assembly of heterogeneous nanoparticle networks. Adv. Funct. Mater. 2016, 26, 7359–7366.
Crossref Google Scholar
3

O'Regan, B.; Grätzel, M. A low-cost, high-efficiency solar cell based on dye-sensitized colloidal TiO2 films. Nature 1991, 353, 737–740.
Crossref Google Scholar
4

Wang, H. B.; Kubo, T.; Nakazaki, J.; Segawa, H. Solution-processed short-wave infrared PbS colloidal quantum Dot/ZnO nanowire solar cells giving high open-circuit voltage. ACS Energy Lett. 2017, 2, 2110–2117.
Crossref Google Scholar
5

Sinha, S. S.; Jones, S.; Pramanik, A.; Ray, P. C. Nanoarchitecture based SERS for biomolecular fingerprinting and label-free disease markers diagnosis. Acc. Chem. Res. 2016, 49, 2725–2735.
Crossref Google Scholar
6

Liang, J.; Hu, H.; Park, H.; Xiao, C. H.; Ding, S. J.; Paik, U.; Lou, X. W. Construction of hybrid bowl-like structures by anchoring NiO nanosheets on flat carbon hollow particles with enhanced lithium storage properties. Energy Environ. Sci. 2015, 8, 1707–1711.
Crossref Google Scholar
7

Cao, B. B.; Liu, H. R.; Yang, L. K.; Li, X.; Liu, H.; Dong, P.; Mai, X. M.; Hou, C. X.; Wang, N.; Zhang, J. X. et al. Interfacial engineering for high-efficiency nanorod array-structured perovskite solar cells. ACS Appl. Mater. Interfaces 2019, 11, 33770–33780.
Crossref Google Scholar
8

Zheng, L. T.; Zhu, R.; Chen, L. L.; Fu, Q. R.; Li, J. Y.; Chen, C.; Song, J. B.; Yang, H. H. X-ray sensitive high-Z metal nanocrystals for cancer imaging and therapy. Nano Res. 2021, 14, 3744–3755.
Crossref Google Scholar
9

Li, Y. Y.; Qi, Y. C.; Zhang, H. B.; Xia, Z. M.; Xie, T. T.; Li, W. L.; Zhong, D. N.; Zhu, H. L.; Zhou, M. Gram-scale synthesis of highly biocompatible and intravenous injectable hafnium oxide nanocrystal with enhanced radiotherapy efficacy for cancer theranostic. Biomaterials 2020, 226, 119538.
Crossref Google Scholar
10

Tirosh, E.; Markovich, G. Control of defects and magnetic properties in colloidal HfO2 nanorods. Adv. Mater. 2007, 19, 2608–2612.
Crossref Google Scholar
11

Xia, W. R.; Wu, H.; Xue, P. J.; Zhu, X. H. Microstructural, magnetic, and optical properties of Pr-doped perovskite manganite La0.67Ca0.33MnO3 nanoparticles synthesized via sol-gel process. Nanoscale Res. Lett. 2018, 13, 135.
Crossref Google Scholar
12

Darr, J. A.; Zhang, J. Y.; Makwana, N. M.; Weng, X. L. Continuous hydrothermal synthesis of inorganic nanoparticles: Applications and future directions. Chem. Rev. 2017, 117, 11125–11238.
Crossref Google Scholar
13

Valencia, P. M.; Farokhzad, O. C.; Karnik, R.; Langer, R. Microfluidic technologies for accelerating the clinical translation of nanoparticles. Nat. Nanotechnol. 2012, 7, 623–629.
Crossref Google Scholar
14

Devan, R. S.; Patil, R. A.; Lin, J. H.; Ma, Y. R. One-dimensional metal-oxide nanostructures: Recent developments in synthesis, characterization, and applications. Adv. Funct. Mater. 2012, 22, 3326–3370.
Crossref Google Scholar
15

Teoh, W. Y.; Amal, R.; Mädler, L. Flame spray pyrolysis: An enabling technology for nanoparticles design and fabrication. Nanoscale 2010, 2, 1324–1347.
Crossref Google Scholar
16

Cai, Z. Y.; Liu, B. L.; Zou, X. L.; Cheng, H. M. Chemical vapor deposition growth and applications of two-dimensional materials and their heterostructures. Chem. Rev. 2018, 118, 6091–6133.
Crossref Google Scholar
17

Hui, L. W.; Zhang, Q. M.; Deng, W.; Liu, H. T. DNA-based nanofabrication: Pathway to applications in surface engineering. Small 2019, 15, 1805428.
Crossref Google Scholar
18

Van De Kerkhof, M. A.; Benschop, J. P. H.; Banine, V. Y. Lithography for now and the future. Solid-State Electron. 2019, 155, 20–26.
Crossref Google Scholar
19

Ma, X.; Wang, Z. Q.; Chen, X. B.; Li, Y. Q.; Arce, G. R. Gradient-based source mask optimization for extreme ultraviolet lithography. IEEE Trans. Comput. Imaging 2019, 5, 120–135.
Crossref Google Scholar
20

Donthu, S.; Pan, Z. X.; Myers, B.; Shekhawat, G.; Wu, N. Q.; Dravid, V. Facile scheme for fabricating solid-state nanostructures using E-beam lithography and solution precursors. Nano Lett. 2005, 5, 1710–1715.
Crossref Google Scholar
21

Drost, M.; Tu, F.; Berger, L.; Preischl, C.; Zhou, W. C.; Gliemann, H.; Wöll, C.; Marbach, H. Surface-anchored metal-organic frameworks as versatile resists for gas-assisted E-beam lithography: Fabrication of sub-10 nanometer structures. ACS Nano 2018, 12, 3825–3835.
Crossref Google Scholar
22

Yin, P.; Hariadi, R. F.; Sahu, S.; Choi, H. M. T.; Park, S. H.; LaBean, T. H.; Reif, J. H. Programming DNA tube circumferences. Science 2008, 321, 824–826.
Crossref Google Scholar
23

Rothemund, P. W. K. Folding DNA to create nanoscale shapes and patterns. Nature 2006, 440, 297–302.
Crossref Google Scholar
24

Qian, L. L.; Wang, Y.; Zhang, Z.; Zhao, J.; Pan, D.; Zhang, Y.; Liu, Q.; Fan, C. H.; Hu, J.; He, L. Analogic China map constructed by DNA. Chin. Sci. Bull. 2006, 51, 2973–2976.
Crossref Google Scholar
25

Andersen, E. S.; Dong, M. D.; Nielsen, M. M.; Jahn, K.; Lind-Thomsen, A.; Mamdouh, W.; Gothelf, K. V.; Besenbacher, F.; Kjems, J. DNA origami design of dolphin-shaped structures with flexible tails. ACS Nano 2008, 2, 1213–1218.
Crossref Google Scholar
26

Liu, W. Y.; Zhong, H.; Wang, R. S.; Seeman, N. C. Crystalline two-dimensional DNA-origami arrays. Angew. Chem., Int. Ed. 2011, 50, 264–267.
Crossref Google Scholar
27

Ke, Y. G.; Sharma, J.; Liu, M. H.; Jahn, K.; Liu, Y.; Yan, H. Scaffolded DNA origami of a DNA tetrahedron molecular container. Nano Lett. 2009, 9, 2445–2447.
Crossref Google Scholar
28

Kuzuya, A.; Komiyama, M. Design and construction of a box-shaped 3D-DNA origami. Chem. Commun. 2009, 4182–4184.
Crossref Google Scholar
29

Qu, X. M.; Zhu, D.; Yao, G. B.; Su, S.; Chao, J.; Liu, H. J.; Zuo, X. L.; Wang, L. H.; Shi, J. Y.; Wang, L. H. et al. An exonuclease III-powered, on-particle stochastic DNA walker. Angew. Chem., Int. Ed. 2017, 56, 1855–1858.
Crossref Google Scholar
30

Li, Z. J.; Jiang, L.; Jiang, Y. Z.; Yuan, X. W.; Aizitiaili, M.; Yue, J.; Qu, X. M. DNA-based chemical reaction networks for biosensing applications. Adv. Intell. Syst. 2020, 2, 2000086.
Crossref Google Scholar
31

Shen, B. X.; Linko, V.; Tapio, K.; Kostiainen, M. A.; Toppari, J. J. Custom-shaped metal nanostructures based on DNA origami silhouettes. Nanoscale 2015, 7, 11267–11272.
Crossref Google Scholar
32

Helmi, S.; Ziegler, C.; Kauert, D. J.; Seidel, R. Shape-controlled synthesis of gold nanostructures using DNA origami molds. Nano Lett. 2014, 14, 6693–6698.
Crossref Google Scholar
33

Sun, W.; Boulais, E.; Hakobyan, Y.; Wang, W. L.; Guan, A.; Bathe, M.; Yin, P. Casting inorganic structures with DNA molds. Science 2014, 346, 1258361.
Crossref Google Scholar
34

Zhou, F.; Sun, W.; Ricardo, K. B.; Wang, D.; Shen, J.; Yin, P.; Liu, H. T. Programmably shaped carbon nanostructure from shape-conserving carbonization of DNA. ACS Nano 2016, 10, 3069–3077.
Crossref Google Scholar
35

Liu, X. G.; Zhang, F.; Jing, X. X.; Pan, M. C.; Liu, P.; Li, W.; Zhu, B. W.; Li, J.; Chen, H.; Wang, L. H. et al. Complex silica composite nanomaterials templated with DNA origami. Nature 2018, 559, 593–598.
Crossref Google Scholar
36

Douglas, S. M.; Dietz, H.; Liedl, T.; Högberg, B.; Graf, F.; Shih, W. M. Self-assembly of DNA into nanoscale three-dimensional shapes. Nature 2009, 459, 414–418.
Crossref Google Scholar
37

Surwade, S. P.; Zhao, S. C.; Liu, H. T. Molecular lithography through DNA-mediated etching and masking of SiO2. J. Am. Chem. Soc. 2011, 133, 11868–11871.
Crossref Google Scholar
38

Zhou, F.; Michael, B.; Surwade, S. P.; Ricardo, K. B.; Zhao, S. C.; Liu, H. T. Mechanistic study of the nanoscale negative-tone pattern transfer from DNA nanostructures to SiO2. Chem. Mater. 2015, 27, 1692–1698.
Crossref Google Scholar
39

Diagne, C. T.; Brun, C.; Gasparutto, D.; Baillin, X.; Tiron, R. DNA origami mask for sub-ten-nanometer lithography. ACS Nano 2016, 10, 6458–6463.
Crossref Google Scholar
40

Surwade, S. P.; Zhou, F.; Wei, B.; Sun, W.; Powell, A.; O'Donnell, C.; Yin, P.; Liu, H. T. Nanoscale growth and patterning of inorganic oxides using DNA nanostructure templates. J. Am. Chem. Soc. 2013, 135, 6778–6781.
Crossref Google Scholar
41

Kang, S. H.; Hwang, W. S.; Lin, Z. Q.; Kwon, S. H.; Hong, S. W. A robust highly aligned DNA nanowire array-enabled lithography for graphene nanoribbon transistors. Nano Lett. 2015, 15, 7913–7920.
Crossref Google Scholar
42

Aizitiaili, M.; Jiang, Y. Z.; Jiang, L.; Yuan, X. W.; Jin, K.; Chen, H.; Zhang, L. Y.; Qu, X. M. Programmable engineering of DNA-AuNP encoders integrated multimodal coupled analysis for precision discrimination of multiple metal ions. Nano Lett. 2021, 21, 2141–2148.
Crossref Google Scholar
43

Tian, C.; Kim, H.; Sun, W.; Kim, Y.; Yin, P.; Liu, H. T. DNA nanostructures-mediated molecular imprinting lithography. ACS Nano 2017, 11, 227–238.
Crossref Google Scholar
44

Schreiber, R.; Kempter, S.; Holler, S.; Schüller, V.; Schiffels, D.; Simmel, S. S.; Nickels, P. C.; Liedl, T. DNA origami-templated growth of arbitrarily shaped metal nanoparticles. Small 2011, 7, 1795–1799.
Crossref Google Scholar
45

Nguyen, L.; Döblinger, M.; Liedl, T.; Heuer-Jungemann, A. DNA-origami-templated silica growth by sol-gel chemistry. Angew. Chem., Int. Ed. 2019, 58, 912–916.
Crossref Google Scholar
46

Hui, L. W.; Nixon, R.; Tolman, N.; Mukai, J.; Bai, R. B.; Wang, R. S.; Liu, H. T. Area-selective atomic layer deposition of metal oxides on DNA nanostructures and its applications. ACS Nano 2020, 14, 13047–13055.
Crossref Google Scholar
47
Biyikli, N.; Haider, A.; Deminskyi, P.; Yilmaz, M. Self-aligned nanoscale processing solutions via selective atomic layer deposition of oxide, nitride, and metallic films. In Proceedings of the SPIE 10349 Low-Dimensional Materials and Devices 2017, San Diego, 2017, pp 103490M.https://doi.org/10.1117/12.2276141
Crossref
48

Cummins, C.; Weingärtner, T.; Morris, M. A. Enabling large-area selective deposition on metal-dielectric patterns using polymer brush deactivation. J. Phys. Chem. C 2018, 122, 14698–14705.
Crossref Google Scholar
49

Mameli, A.; Kuang, Y. H.; Aghaee, M.; Ande, C. K.; Karasulu, B.; Creatore, M.; Mackus, A. J. M.; Kessels, W. M. M.; Roozeboom, F. Area-selective atomic layer deposition of In2O3: H using a μ-plasma printer for local area activation. Chem. Mater. 2017, 29, 921–925.
Crossref Google Scholar
50

Mameli, A.; Merkx, M. J. M.; Karasulu, B.; Roozeboom, F.; Kessels, W. M. M.; Mackus, A. J. M. Area-selective atomic layer deposition of SiO2 using acetylacetone as a chemoselective inhibitor in an ABC-type cycle. ACS Nano 2017, 11, 9303–9311.
Crossref Google Scholar
51

Chen, R.; Bent, S. F. Chemistry for positive pattern transfer using area-selective atomic layer deposition. Adv. Mater. 2006, 18, 1086–1090.
Crossref Google Scholar
52

Joo, J.; Yu, T.; Kim, Y. W.; Park, H. M.; Wu, F. X.; Zhang, J. Z.; Hyeon, T. Multigram scale synthesis and characterization of monodisperse tetragonal zirconia nanocrystals. J. Am. Chem. Soc. 2003, 125, 6553–6557.
Crossref Google Scholar
53

Feng, B. B.; Sosa, R. P.; Mårtensson, A. K. F.; Jiang, K.; Tong, A.; Dorfman, K. D.; Takahashi, M.; Lincoln, P.; Bustamante, C. J.; Westerlund, F. et al. Hydrophobic catalysis and a potential biological role of DNA unstacking induced by environment effects. Proc. Natl. Acad. Sci. USA 2019, 116, 17169–17174.
Crossref Google Scholar
54

Jing, B. X.; Yang, Q. B.; Zhu, Y. X.; Zhao, J. Mobility of single DNA chain under electric field during its transient contact with solid surfaces. J. Polym. Sci. Part B: Pol. Phys. 2009, 47, 2541–2546.
Crossref Google Scholar
Nano Research
Volume 15 Issue 6,
June 2022
Pages 5687-5694
DOI: 10.1007/s12274-022-4149-1
Cite this article:
Yuan X, Xiao D, Yao W, et al. High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography. Nano Research, 2022, 15(6): 5687-5694. https://doi.org/10.1007/s12274-022-4149-1
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Received: 28 October 2021
Revised: 10 January 2022
Accepted: 11 January 2022
Published: 28 February 2022
© Tsinghua University Press 2022
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