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Research Article

A fast scanning strategy based on trajectory shaping for atomic force microscopy

Yinan Wu1,2, Yingao Chang1,2, Yongchun Fang1,2( ), Zhi Fan1,2
Institute of Robotics and Automatic Information System, College of Artificial Intelligence, Nankai University, Tianjin 300350, China
Tianjin Key Laboratory of Intelligent Robotics, Nankai University, Tianjin 300350, China
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Graphical Abstract

This paper designs a smooth scanning method via trajectory shaping for the atomic force microscopy, which improves the imaging quality in high-speed scanning without hardware modification.

Abstract

To improve the scanning speed of an atomic force microscopy (AFM), a smooth scanning pattern is elaborately devised via trajectory shaping in this paper, so as to achieve fast imaging without hardware modification. Specifically, in the proposed scanning method, the piezoelectric actuator tracks a well-designed smooth periodic signal in x-direction, and simultaneously tracks a step signal in y-direction. The advantage of the proposed method is that it does not require additional data reprocessing to construct the morphology of the sample surface, while significantly increasing the scanning bandwidth restricted by the raster scanning method. Particularly, to directly utilize the height data collected by scanning to produce the sample morphology, the forward process in the common raster scanning mode is retained in the proposed method, the tracking signal in the forward process is thus set to a ramp function in x-direction. In addition, to ensure the continuity and smoothness of the entire tracking signal in x-direction, a segment of a sine curve is uniquely determined as the backward tracking signal by position and acceleration constraints, so as to ensure that the forward and backward curves are continuous and acceleration-continuous at the intersection point. Moreover, the frequency spectrum analysis of the designed smooth signal is carried out to exhibit the depressed amplitudes of high-frequency components, which demonstrates that the proposed method is able to reduce the resonance in AFM high-speed scanning, so as to improve the capacity of rapidly generating high-quality images. Finally, convincing comparison experiments are implemented to verify the imaging performance of the designed scanning algorithm.

Keywords

atomic force microscopyfast scanningsmooth signaltrajectory shaping

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Nano Research
Volume 15 Issue 7,
July 2022
Pages 6438-6446
DOI: 10.1007/s12274-022-4309-3
Cite this article:
Wu Y, Chang Y, Fang Y, et al. A fast scanning strategy based on trajectory shaping for atomic force microscopy. Nano Research, 2022, 15(7): 6438-6446. https://doi.org/10.1007/s12274-022-4309-3
Topics:
Atomic force microscopy

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Received: 22 November 2021
Revised: 10 March 2022
Accepted: 10 March 2022
Published: 10 May 2022
© Tsinghua University Press 2022
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