AI Chat Paper
Note: Please note that the following content is generated by AMiner AI. SciOpen does not take any responsibility related to this content.
{{lang === 'zh_CN' ? '文章概述' : 'Summary'}}
{{lang === 'en_US' ? '中' : 'Eng'}}
Chat more with AI
Powered by AMiner. Clicking this button will take you away from SciOpen.
Home Nano Research Article
Article Link
Cite
EndNote(RIS) BibTeX
Collect
Submit Manuscript
Show Outline
Outline
Show full outline
Hide outline
Outline
Show full outline
Hide outline
Research Article

Ultrafast growth of wafer-scale fold-free bilayer graphene

Jilin Tang1,2,3, Yuechen Wang1,2,3, Yuwei Ma4, Xiaoyin Gao1, Xin Gao1,2,3, Ning Li5, Yani Wang1,3, Shishu Zhang1, Liming Zheng1,3, Bing Deng1,3, Rui Yan3, Yisen Cao3, Ronghua Zhang3, Lianming Tong1, Jin Zhang1,2,3, Peng Gao5, Zhongfan Liu1,2,3, Xiaoding Wei4, Hongtao Liu1( ), Hailin Peng1,2,3( )
Center for Nanochemistry, Beijing Science and Engineering Centre for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China
Beijing Graphene Institute, Beijing 100095, China
State Key Laboratory for Turbulence and Complex System, Department of Mechanics and Engineering Science, College of Engineering, Beijing Innovation Center for Engineering Science and Advanced Technology, Peking University, Beijing 100871, China
Electron Microscopy Laboratory, School of Physics, International Center for Quantum Materials, Peking University, Beijing 100871, China
Show Author Information

Graphical Abstract

We present a method for ultrafast growing wafer-scale bilayer graphene with high layer uniformity and fold-free atomic flatness within 30 s, which was achieved through strain regulation of a single-crystal CuNi(111) substrate with well-tuned thickness epitaxially deposited on a sapphire wafer. The bilayer graphene film exhibits high electrical conductivity and enhanced mechanical property comparable to the exfoliated ones.

Abstract

Bilayer graphene provides a versatile platform for exploring a variety of intriguing phenomena and shows much promise for applications in electronics, optoelectronics, etc. Controlled growth of large-area bilayer graphene is therefore highly desired yet still suffers from a slow growth rate and poor layer uniformity. Meanwhile, graphene wrinkles, including folds and ripples, form during cooling due to the thermal contraction mismatch between graphene and the metal substrates, and have been far from suppressed or eliminated, especially in bilayer graphene, which would greatly degrade the extraordinary properties of graphene. Here we report the ultrafast growth of wafer-scale fold-free bilayer graphene by chemical vapor deposition. Through well-tuning the alloy thickness and strain regulation of the single-crystal CuNi(111)/sapphire, the full coverage of a 2-inch fold-free bilayer graphene wafer via mainly isothermal segregation has been achieved as fast as 30 s. The tensile-strained CuNi(111) film reduces the thermal contraction mismatch and suppresses the formation of graphene folds during cooling, which is directly observed through in situ optical microscopy. The ultraflat bilayer graphene exhibits wafer-scale uniformity in electrical performance and enhanced mechanical property comparable to the exfoliated ones. Our results offer a promising route for large-scale production of bilayer graphene and enable its various applications.

Keywords

bilayer graphenegraphene wrinklesultrafast growthin situ optical microscopysingle crystal wafer

Electronic Supplementary Material

Video
12274_2023_5697_MOESM2_ESM.mp4
12274_2023_5697_MOESM4_ESM.mp4
12274_2023_5697_MOESM5_ESM.mp4
12274_2023_5697_MOESM3_ESM.mp4
Download File(s)
12274_2023_5697_MOESM1_ESM.pdf (1.4 MB)

References

[1]

Cao, Y.; Fatemi, V.; Fang, S. A.; Watanabe, K.; Taniguchi, T.; Kaxiras, E.; Jarillo-Herrero, P. Unconventional superconductivity in magic-angle graphene superlattices. Nature 2018, 556, 43–50.
Crossref Google Scholar
[2]

Lin, Q. Y.; Zeng, Y. H.; Liu, D.; Jing, G. Y.; Liao, Z. M.; Yu, D. P. Step-by-step fracture of two-layer stacked graphene membranes. ACS Nano 2014, 8, 10246–10251.
Crossref Google Scholar
[3]

Bae, S.; Kim, H.; Lee, Y.; Xu, X. F.; Park, J. S.; Zheng, Y.; Balakrishnan, J.; Lei, T.; Kim, H. R.; Song, Y. I. et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat. Nanotechnol. 2010, 5, 574–578.
Crossref Google Scholar
[4]

Novoselov, K. S.; Jiang, D.; Schedin, F.; Booth, T. J.; Khotkevich, V. V.; Morozov, S. V.; Geim, A. K. Two-dimensional atomic crystals. Proc. Natl. Acad. Sci. USA 2005, 102, 10451–10453.
Crossref Google Scholar
[5]

Nguyen, V. L.; Perello, D. J.; Lee, S.; Nai, C. T.; Shin, B. G.; Kim, J. G.; Park, H. Y.; Jeong, H. Y.; Zhao, J.; Vu, Q. A. et al. Wafer-scale single-crystalline AB-stacked bilayer graphene. Adv. Mater. 2016, 28, 8177–8183.
Crossref Google Scholar
[6]

Liu, L. X.; Zhou, H. L.; Cheng, R.; Yu, W. J.; Liu, Y.; Chen, Y.; Shaw, J.; Zhong, X.; Huang, Y.; Duan, X. F. High-yield chemical vapor deposition growth of high-quality large-area AB-stacked bilayer graphene. ACS Nano 2012, 6, 8241–8249.
Crossref Google Scholar
[7]

Wang, H. Z.; Yao, Z. P.; Jung, G. S.; Song, Q. C.; Hempel, M.; Palacios, T.; Chen, G.; Buehler, M. J.; Aspuru-Guzik, A.; Kong, J. Frank-van der Merwe growth in bilayer graphene. Matter 2021, 4, 3339–3353.
Crossref Google Scholar
[8]

Hao, Y. F.; Wang, L.; Liu, Y. Y.; Chen, H.; Wang, X. H.; Tan, C.; Nie, S.; Suk, J. W.; Jiang, T. F.; Liang, T. F. et al. Oxygen-activated growth and bandgap tunability of large single-crystal bilayer graphene. Nat. Nanotechnol. 2016, 11, 426–431.
Crossref Google Scholar
[9]

Takesaki, Y.; Kawahara, K.; Hibino, H.; Okada, S.; Tsuji, M.; Ago, H. Highly uniform bilayer graphene on epitaxial Cu-Ni(111) alloy. Chem. Mater. 2016, 28, 4583–4592.
Crossref Google Scholar
[10]

Gao, Z. L.; Zhang, Q. C.; Naylor, C. H.; Kim, Y.; Abidi, I. H.; Ping, J. L.; Ducos, P.; Zauberman, J.; Zhao, M. Q.; Rappe, A. M. et al. Crystalline bilayer graphene with preferential stacking from Ni-Cu gradient alloy. ACS Nano 2018, 12, 2275–2282.
Crossref Google Scholar
[11]

Huang, M.; Bakharev, P. V.; Wang, Z. J.; Biswal, M.; Yang, Z.; Jin, S.; Wang, B.; Park, H. J.; Li, Y. Q.; Qu, D. S. et al. Large-area single-crystal AB-bilayer and ABA-trilayer graphene grown on a Cu/Ni(111) foil. Nat. Nanotechnol. 2020, 15, 289–295.
Crossref Google Scholar
[12]

Solis-Fernandez, P.; Terao, Y.; Kawahara, K.; Nishiyama, W.; Uwanno, T.; Lin, Y. C.; Yamamoto, K.; Nakashima, H.; Nagashio, K.; Hibino, H. et al. Isothermal growth and stacking evolution in highly uniform bernal-stacked bilayer graphene. ACS Nano 2020, 14, 6834–6844.
Crossref Google Scholar
[13]

Nguyen, V. L.; Duong, D. L.; Lee, S. H.; Avila, J.; Han, G.; Kim, Y. M.; Asensio, M. C.; Jeong, S. Y.; Lee, Y. H. Layer-controlled single-crystalline graphene film with stacking order via Cu-Si alloy formation. Nat. Nanotechnol. 2020, 15, 861–867.
Crossref Google Scholar
[14]

Ma, W.; Chen, M. L.; Yin, L. C.; Liu, Z. B.; Li, H.; Xu, C.; Xin, X.; Sun, D. M.; Cheng, H. M.; Ren, W. C. Interlayer epitaxy of wafer-scale high-quality uniform AB-stacked bilayer graphene films on liquid Pt3Si/solid Pt. Nat. Commun. 2019, 10, 2809.
Crossref Google Scholar
[15]

Zhu, W. J.; Low, T.; Perebeinos, V.; Bol, A. A.; Zhu, Y.; Yan, H. G.; Tersoff, J.; Avouris, P. Structure and electronic transport in graphene wrinkles. Nano Lett. 2012, 12, 3431–3436.
Crossref Google Scholar
[16]

Deng, B.; Pang, Z. Q.; Chen, S. L.; Li, X.; Meng, C. X.; Li, J. Y.; Liu, M. X.; Wu, J. X.; Qi, Y.; Dang, W. H. et al. Wrinkle-free single-crystal graphene wafer grown on strain-engineered substrates. ACS Nano 2017, 11, 12337–12345.
Crossref Google Scholar
[17]

Chen, S. S.; Li, Q. Y.; Zhang, Q. M.; Qu, Y.; Ji, H. X.; Ruoff, R. S.; Cai, W. W. Thermal conductivity measurements of suspended graphene with and without wrinkles by micro-Raman mapping. Nanotechnology 2012, 23, 365701.
Crossref Google Scholar
[18]

Deng, B.; Hou, Y.; Liu, Y.; Khodkov, T.; Goossens, S.; Tang, J. L.; Wang, Y. N.; Yan, R.; Du, Y.; Koppens, F. H. L. et al. Growth of ultraflat graphene with greatly enhanced mechanical properties. Nano Lett. 2020, 20, 6798–6806.
Crossref Google Scholar
[19]

Zhang, Y. H.; Wang, B.; Zhang, H. R.; Chen, Z. Y.; Zhang, Y. Q.; Wang, B.; Sui, Y. P.; Li, X. L.; Xie, X. M.; Yu, G. H. et al. The distribution of wrinkles and their effects on the oxidation resistance of chemical vapor deposition graphene. Carbon 2014, 70, 81–86.
Crossref Google Scholar
[20]

Wang, B.; Huang, M.; Tao, L.; Lee, S. H.; Jang, A. R.; Li, B. W.; Shin, H. S.; Akinwande, D.; Ruoff, R. S. Support-free transfer of ultrasmooth graphene films facilitated by self-assembled monolayers for electronic devices and patterns. ACS Nano 2016, 10, 1404–1410.
Crossref Google Scholar
[21]

Deng, B.; Wu, J. X.; Zhang, S. S.; Qi, Y.; Zheng, L. M.; Yang, H.; Tang, J. L.; Tong, L. M.; Zhang, J.; Liu, Z. F. et al. Anisotropic strain relaxation of graphene by corrugation on copper crystal surfaces. Small 2018, 14, 1800725.
Crossref Google Scholar
[22]

Wang, M. H.; Huang, M.; Luo, D.; Li, Y. Q.; Choe, M.; Seong, W. K.; Kim, M.; Jin, S.; Wang, M. R.; Chatterjee, S. et al. Single-crystal, large-area, fold-free monolayer graphene. Nature 2021, 596, 519–524.
Crossref Google Scholar
[23]

Yi, D.; Luo, D.; Wang, Z. J.; Dong, J. C.; Zhang, X.; Willinger, M. G.; Ruoff, R. S.; Ding, F. What drives metal-surface step bunching in graphene chemical vapor deposition. Phys. Rev. Lett. 2018, 120, 246101.
Crossref Google Scholar
[24]

Lee, J. H.; Lee, E. K.; Joo, W. J.; Jang, Y.; Kim, B. S.; Lim, J. Y.; Choi, S. H.; Ahn, S. J.; Ahn, J. R.; Park, M. H. et al. Wafer-scale growth of single-crystal monolayer graphene on reusable hydrogen-terminated germanium. Science 2014, 344, 286–289.
Crossref Google Scholar
[25]

Choi, J. K.; Kwak, J.; Park, S. D.; Yun, H. D.; Kim, S. Y.; Jung, M.; Kim, S. Y.; Park, K.; Kang, S.; Kim, S. D. et al. Growth of wrinkle-free graphene on texture-controlled platinum films and thermal-assisted transfer of large-scale patterned graphene. ACS Nano 2015, 9, 679–686.
Crossref Google Scholar
[26]

Zhang, X. F.; Wu, T. R.; Jiang, Q.; Wang, H. S.; Zhu, H. L.; Chen, Z. Y.; Jiang, R.; Niu, T. C.; Li, Z. J.; Zhang, Y. W. et al. Epitaxial growth of 6 in. Single-crystalline graphene on a Cu/Ni (111) film at 750 °C via chemical vapor deposition. Small 2019, 15, 1805395.
Crossref Google Scholar
[27]

Kang, J. H.; Moon, J.; Kim, D. J.; Kim, Y.; Jo, I.; Jeon, C.; Lee, J.; Hong, B. H. Strain relaxation of graphene layers by Cu surface roughening. Nano Lett. 2016, 16, 5993–5998.
Crossref Google Scholar
[28]

Shelton, J. C.; Patil, H. R.; Blakely, J. M. Equilibrium segregation of carbon to a nickel (111) surface: Surface phase transition. Surf. Sci. 1974, 43, 493–520.
Crossref Google Scholar
[29]

Gong, P.; Tang, C.; Wang, B. R.; Xiao, T. S.; Zhu, H.; Li, Q. W.; Sun, Z. Z. Precise CO2 reduction for bilayer graphene. ACS Cent. Sci. 2022, 8, 394–401.
Crossref Google Scholar
[30]

Yim, W. M.; Paff, R. J. Thermal expansion of AlN, sapphire, and silicon. J. Appl. Phys. 1974, 45, 1456–1457.
Crossref Google Scholar
[31]

Suh, I. K.; Ohta, H.; Waseda, Y. High-temperature thermal expansion of six metallic elements measured by dilatation method and X-ray diffraction. J. Mater. Sci. 1988, 23, 757–760.
Crossref Google Scholar
[32]

Zeller, P.; Weinl, M.; Speck, F.; Ostler, M.; Henss, A. K.; Seyller, T.; Schreck, M.; Wintterlin, J. Single crystalline metal films as substrates for graphene growth. Ann. Der Phys. 2017, 529, 1700023.
Crossref Google Scholar
[33]

Lee, C.; Wei, X. D.; Kysar, J. W.; Hone, J. Measurement of the elastic properties and intrinsic strength of monolayer graphene. Science 2008, 321, 385–388.
Crossref Google Scholar
[34]

Lee, C.; Wei, X. D.; Li, Q. Y.; Carpick, R.; Kysar, J. W.; Hone, J. Elastic and frictional properties of graphene. Phys. Status Solidi B 2009, 246, 2562–2567.
Crossref Google Scholar
Nano Research
Volume 16 Issue 7,
July 2023
Pages 10684-10689
DOI: 10.1007/s12274-023-5697-8
Cite this article:
Tang J, Wang Y, Ma Y, et al. Ultrafast growth of wafer-scale fold-free bilayer graphene. Nano Research, 2023, 16(7): 10684-10689. https://doi.org/10.1007/s12274-023-5697-8
Topics:
Film growthGrapheneThin films

1358

Views

1

Crossref

1

Web of Science

0

Scopus

0

CSCD

Altmetrics
Received: 29 December 2022
Revised: 21 March 2023
Accepted: 28 March 2023
Published: 31 May 2023
© Tsinghua University Press 2023
Return