AI Chat Paper
Note: Please note that the following content is generated by AMiner AI. SciOpen does not take any responsibility related to this content.
{{lang === 'zh_CN' ? '文章概述' : 'Summary'}}
{{lang === 'en_US' ? '中' : 'Eng'}}
Chat more with AI
Powered by AMiner. Clicking this button will take you away from SciOpen.
Home Nano Research Article
Article Link
Cite
EndNote(RIS) BibTeX
Collect
Submit Manuscript
Show Outline
Outline
Show full outline
Hide outline
Outline
Show full outline
Hide outline
Review Article

Pave the way to the batch production of SWNT arrays for carbon-based electronic devices

Ying Xie1,§, Yue Li2,§, Ziqiang Zhao2, Jin Zhang1( )
College of Chemistry and Molecular Engineering, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, Peking University, Beijing 100871, China
State Key Laboratory of Nuclear Physics and Technology, School of Physics, Peking University, Beijing 100871, China

§ Ying Xie and Yue Li contributed equally to this work.

Show Author Information

Graphical Abstract

In this manuscript, we reviewed the synthesis, characterization, and electronic applications of horizontally aligned single-walled nanotube arrays (HASAs), and tried to provide our ideas about how to pave the way to the batch production of HASAs for carbon-based electronic devices.

Abstract

Single-walled carbon nanotubes (SWNTs) have been regarded as one of the most promising candidates to supplement or even replace silicon in the post-Moore era. The requirement is to prepare the horizontally aligned SWNTs arrays (HASAs) with multiple indicators, including high density, high semiconducting purity, and wafer-scale uniformity. However, after all the fevered works being done in controlled synthesis, we still have a long way to go before realizing the application of SWNTs in highly performed electronic devices. The methods of batch production and high-throughput characterization techniques of the HASAs are the two main challenges. In this outlook, we first summarized the progresses in synthesis of HASAs with either high density or high semiconducting purity. Then the methods adopted in characterizing SWNTs and HASAs were discussed according to the different principles of characterization techniques. Afterwards, the development of carbon nanotube based electronic devices, specifically, the field effect transistors (FETs), was reviewed from three perspectives. The problems involved in electronic applications bring forward the higher request to the HASAs itself. Therefore, in the end of this outlook, we prospected the future of the synthesis and corresponding characterization of HASAs, and tried to provide our ideas about how to pave the way to the batch production of HASAs for carbon based electronic devices.

Keywords

horizontally aligned carbon nanotubesbatch productionhigh-throughput characterizationelectronic application

References

[1]

Cao, Q.; Han, S. J.; Tersoff, J.; Franklin, A. D.; Zhu, Y.; Zhang, Z.; Tulevski, G. S.; Tang, J. S.; Haensch, W. End-bonded contacts for carbon nanotube transistors with low, size-independent resistance. Science 2015, 350, 68–72.
Crossref Google Scholar
[2]

Peng, L. M.; Zhang, Z. Y.; Qiu, C. G. Carbon nanotube digital electronics. Nat. Electron. 2019, 2, 499–505.
Crossref Google Scholar
[3]

Zhang, Y. G.; Chang, A.; Cao, J. E.; Wang, Q.; Kim, W.; Li, Y. M.; Morris, N.; Yenilmez, E.; Kong, J.; Dai, H. J. Electric-field-directed growth of aligned single-walled carbon nanotubes. Appl. Phys. Lett. 2001, 79, 3155–3157.
Crossref Google Scholar
[4]

Jin, Z.; Chu, H. B.; Wang, J. Y.; Hong, J. X.; Tan, W. C.; Li, Y. Ultralow feeding gas flow guiding growth of large-scale horizontally aligned single-walled carbon nanotube arrays. Nano Lett. 2007, 7, 2073–2079.
Crossref Google Scholar
[5]

Ismach, A.; Kantorovich, D.; Joselevich, E. Carbon nanotube graphoepitaxy: Highly oriented growth by faceted nanosteps. J. Am. Chem. Soc. 2005, 127, 11554–11555.
Crossref Google Scholar
[6]

Ago, H.; Nakamura, K.; Ikeda, K. I.; Uehara, N.; Ishigami, N.; Tsuji, M. Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface. Chem. Phys. Lett. 2005, 408, 433–438.
Crossref Google Scholar
[7]

Franklin, A. D. The road to carbon nanotube transistors. Nature 2013, 498, 443–444.
Crossref Google Scholar
[8]

He, M. S.; Wang, Y.; Zhang, X. Y.; Zhang, H.; Meng, Y. N.; Shang, D. H.; Xue, H.; Li, D.; Wu, Z. J. Stability of iron-containing nanoparticles for selectively growing single-walled carbon nanotubes. Carbon 2020, 158, 795–801.
Crossref Google Scholar
[9]

Page, A. J.; Ohta, Y.; Irle, S.; Morokuma, K. Mechanisms of single-walled carbon nanotube nucleation, growth, and healing determined using QM/MD methods. Acc. Chem. Res. 2010, 43, 1375–1385.
Crossref Google Scholar
[10]

Wang, X.; He, M. S.; Ding, F. Chirality-controlled synthesis of single-walled carbon nanotubes-from mechanistic studies toward experimental realization. Mater. Today 2018, 21, 845–860.
Crossref Google Scholar
[11]

Takagi, D.; Kobayashi, Y.; Homma, Y. Carbon nanotube growth from diamond. J. Am. Chem. Soc. 2009, 131, 6922–6923.
Crossref Google Scholar
[12]

Liu, B. L.; Ren, W. C.; Gao, L. B.; Li, S. S.; Pei, S. F.; Liu, C.; Jiang, C. B.; Cheng, H. M. Metal-catalyst-free growth of single-walled carbon nanotubes. J. Am. Chem. Soc. 2009, 131, 2082–2083.
Crossref Google Scholar
[13]

Chen, Y. B.; Zhang, J. Diameter controlled growth of single-walled carbon nanotubes from SiO2 nanoparticles. Carbon 2011, 49, 3316–3324.
Crossref Google Scholar
[14]

Fiawoo, M. F. C.; Bonnot, A. M.; Amara, H.; Bichara, C.; Thibault-Pénisson, J.; Loiseau, A. Evidence of correlation between catalyst particles and the single-wall carbon nanotube diameter: A first step towards chirality control. Phys. Rev. Lett. 2012, 108, 195503.
Crossref Google Scholar
[15]

He, M. S.; Magnin, Y.; Amara, H.; Jiang, H.; Cui, H. Z.; Fossard, F.; Castan, A.; Kauppinen, E.; Loiseau, A.; Bichara, C. Linking growth mode to lengths of single-walled carbon nanotubes. Carbon 2017, 113, 231–236.
Crossref Google Scholar
[16]

He, M. S.; Magnin, Y.; Jiang, H.; Amara, H.; Kauppinen, E. I.; Loiseau, A.; Bichara, C. Growth modes and chiral selectivity of single-walled carbon nanotubes. Nanoscale 2018, 10, 6744–6750.
Crossref Google Scholar
[17]

Amama, P. B.; Pint, C. L.; McJilton, L.; Kim, S. M.; Stach, E. A.; Murray, P. T.; Hauge, R. H.; Maruyama, B. Role of water in super growth of single-walled carbon nanotube carpets. Nano Lett. 2009, 9, 44–49.
Crossref Google Scholar
[18]

Hong, S. W.; Banks, T.; Rogers, J. A. Improved density in aligned arrays of single-walled carbon nanotubes by sequential chemical vapor deposition on quartz. Adv. Mater. 2010, 22, 1826–1830.
Crossref Google Scholar
[19]

Zhou, W. W.; Ding, L.; Yang, S.; Liu, J. Synthesis of high-density, large-diameter, and aligned single-walled carbon nanotubes by multiple-cycle growth methods. ACS Nano 2011, 5, 3849–3857.
Crossref Google Scholar
[20]

Wu, B.; Geng, D. C.; Guo, Y. L.; Huang, L. P.; Chen, J. Y.; Xue, Y. Z.; Yu, G.; Liu, Y. Q.; Kajiura, H.; Li, Y. M. Ultrahigh density modulation of aligned single-walled carbon nanotube arrays. Nano Res. 2011, 4, 931–937.
Crossref Google Scholar
[21]

Ding, L.; Yuan, D. N.; Liu, J. Growth of high-density parallel arrays of long single-walled carbon nanotubes on quartz substrates. J. Am. Chem. Soc. 2008, 130, 5428–5429.
Crossref Google Scholar
[22]

Hu, Y.; Kang, L. X.; Zhao, Q. C.; Zhong, H.; Zhang, S. C.; Yang, L. W.; Wang, Z. Q.; Lin, J. J.; Li, Q. W.; Zhang, Z. Y. et al. Growth of high-density horizontally aligned SWNT arrays using Trojan catalysts. Nat. Commun. 2015, 6, 6099.
Crossref Google Scholar
[23]

Kang, L. X.; Hu, Y.; Zhong, H.; Si, J.; Zhang, S. C.; Zhao, Q. C.; Lin, J. J.; Li, Q. W.; Zhang, Z. Y.; Peng, L. M. et al. Large-area growth of ultra-high-density single-walled carbon nanotube arrays on sapphire surface. Nano Res. 2015, 8, 3694–3703.
Crossref Google Scholar
[24]

Xie, Y.; Qian, L.; Lin, D. W.; Yu, Y.; Wang, S. S.; Zhang, J. Growth of homogeneous high-density horizontal SWNT arrays on sapphire through a magnesium-assisted catalyst anchoring strategy. Angew. Chem., Int. Ed. 2021, 60, 9330–9333.
Crossref Google Scholar
[25]

Qian, L.; Shao, Q.; Yu, Y.; Liu, W. M.; Wang, S. S.; Gao, E. L.; Zhang, J. Spatially confined CVD growth of high-density semiconducting single-walled carbon nanotube horizontal arrays. Adv. Funct. Mater. 2022, 32, 2106643.
Crossref Google Scholar
[26]

Liu, W. M.; Zhang, S. C.; Qian, L.; Lin, D. W.; Zhang, J. Growth of high-density horizontal SWNT arrays using multi-cycle in-situ loading catalysts. Carbon 2020, 157, 164–168.
Crossref Google Scholar
[27]

Cao, Q.; Han, S. J.; Tulevski, G. S.; Zhu, Y.; Lu, D. D.; Haensch, W. Arrays of single-walled carbon nanotubes with full surface coverage for high-performance electronics. Nat. Nanotechnol. 2013, 8, 180–186.
Crossref Google Scholar
[28]

Shulaker, M. M.; Wei, H.; Patil, N.; Provine, J.; Chen, H. Y.; Wong, H. S. P.; Mitra, S. Linear increases in carbon nanotube density through multiple transfer technique. Nano Lett. 2011, 11, 1881–1886.
Crossref Google Scholar
[29]

Wang, C.; Ryu, K.; De Arco, L. G.; Badmaev, A.; Zhang, J. L.; Lin, X.; Che, Y. C.; Zhou, C. W. Synthesis and device applications of high-density aligned carbon nanotubes using low-pressure chemical vapor deposition and stacked multiple transfer. Nano Res. 2010, 3, 831–842.
Crossref Google Scholar
[30]

Guo, Y. F.; Shi, E. Z.; Zhu, J. D.; Shen, P. C.; Wang, J. T.; Lin, Y. X.; Mao, Y. W.; Deng, S. B.; Li, B. N.; Park, J. H. et al. Soft-lock drawing of super-aligned carbon nanotube bundles for nanometre electrical contacts. Nat. Nanotechnol. 2022, 17, 331–331.
Crossref Google Scholar
[31]

Arnold, M. S.; Green, A. A.; Hulvat, J. F.; Stupp, S. I.; Hersam, M. C. Sorting carbon nanotubes by electronic structure using density differentiation. Nat. Nanotechnol. 2006, 1, 60–65.
Crossref Google Scholar
[32]

Liu, H. P.; Nishide, D.; Tanaka, T.; Kataura, H. Large-scale single-chirality separation of single-wall carbon nanotubes by simple gel chromatography. Nat. Commun. 2011, 2, 309.
Crossref Google Scholar
[33]

Khripin, C. Y.; Fagan, J. A.; Zheng, M. Spontaneous partition of carbon nanotubes in polymer-modified aqueous phases. J. Am. Chem. Soc. 2013, 135, 6822–6825.
Crossref Google Scholar
[34]

Nish, A.; Hwang, J. Y.; Doig, J.; Nicholas, R. J. Highly selective dispersion of single-walled carbon nanotubes using aromatic polymers. Nat. Nanotechnol. 2007, 2, 640–646.
Crossref Google Scholar
[35]

Zheng, M.; Jagota, A.; Semke, E. D.; Diner, B. A.; Mclean, R. S.; Lustig, S. R.; Richardson, R. E.; Tassi, N. G. DNA-assisted dispersion and separation of carbon nanotubes. Nat. Mater. 2003, 2, 338–342.
Crossref Google Scholar
[36]

Hong, G.; Zhou, M.; Zhang, R. X.; Hou, S. M.; Choi, W.; Woo, Y. S.; Choi, J. Y.; Liu, Z. F.; Zhang, J. Separation of metallic and semiconducting single-walled carbon nanotube arrays by “Scotch tape”. Angew. Chem., Int. Ed. 2011, 50, 6819–6823.
Crossref Google Scholar
[37]

Hu, Y.; Chen, Y. B.; Li, P.; Zhang, J. Sorting out semiconducting single-walled carbon nanotube arrays by washing off metallic tubes using SDS aqueous solution. Small 2013, 9, 1306–1311.
Crossref Google Scholar
[38]

Collins, P. G.; Arnold, M. S.; Avouris, P. Engineering carbon nanotubes and nanotube circuits using electrical breakdown. Science 2001, 292, 706–709.
Crossref Google Scholar
[39]

Otsuka, K.; Inoue, T.; Chiashi, S.; Maruyama, S. Selective removal of metallic single-walled carbon nanotubes in full length by organic film-assisted electrical breakdown. Nanoscale 2014, 6, 8831–8835.
Crossref Google Scholar
[40]

Zhang, G. Y.; Qi, P. F.; Wang, X. R.; Lu, Y. R.; Li, X. L.; Tu, R. Y.; Bangsaruntip, S.; Mann, D.; Zhang, L.; Dai, H. J. Selective etching of metallic carbon nanotubes by gas-phase reaction. Science 2006, 314, 974–977.
Crossref Google Scholar
[41]

Zhang, Y. Y.; Zhang, Y.; Xian, X. J.; Zhang, J.; Liu, Z. F. Sorting out semiconducting single-walled carbon nanotube arrays by preferential destruction of metallic tubes using xenon-lamp irradiation. J. Phys. Chem. C. 2008, 112, 3849–3856.
Crossref Google Scholar
[42]

Jin, S. H.; Dunham, S. N.; Song, J. Z.; Xie, X.; Kim, J. H.; Lu, C. F.; Islam, A.; Du, F.; Kim, J.; Felts, J. et al. Using nanoscale thermocapillary flows to create arrays of purely semiconducting single-walled carbon nanotubes. Nat. Nanotechnol. 2013, 8, 347–355.
Crossref Google Scholar
[43]

Xie, X.; Jin, S. H.; Wahab, M. A.; Islam, A. E.; Zhang, C. X.; Du, F.; Seabron, E.; Lu, T. J.; Dunham, S. N.; Cheong, H. I. et al. Microwave purification of large-area horizontally aligned arrays of single-walled carbon nanotubes. Nat. Commun. 2014, 5, 5332.
Crossref Google Scholar
[44]

Che, Y. C.; Wang, C.; Liu, J.; Liu, B. L.; Lin, X.; Parker, J.; Beasley, C.; Wong, H. S. P.; Zhou, C. W. Selective synthesis and device applications of semiconducting single-walled carbon nanotubes using isopropyl alcohol as feedstock. ACS Nano 2012, 6, 7454–7462.
Crossref Google Scholar
[45]

Ding, L.; Tselev, A.; Wang, J. Y.; Yuan, D. N.; Chu, H. B.; McNicholas, T. P.; Li, Y.; Liu, J. Selective growth of well-aligned semiconducting single-walled carbon nanotubes. Nano Lett. 2009, 9, 800–805.
Crossref Google Scholar
[46]

Ibrahim, I.; Kalbacova, J.; Engemaier, V.; Pang, J. B.; Rodriguez, R. D.; Grimm, D.; Gemming, T.; Zahn, D. R. T.; Schmidt, O. G.; Eckert, J. et al. Confirming the dual role of etchants during the enrichment of semiconducting single wall carbon nanotubes by chemical vapor deposition. Chem. Mater. 2015, 27, 5964–5973.
Crossref Google Scholar
[47]

Kang, L. X.; Zhang, S. C.; Li, Q. W.; Zhang, J. Growth of horizontal semiconducting SWNT arrays with density higher than 100 tubes/μm using ethanol/methane chemical vapor deposition. J. Am. Chem. Soc. 2016, 138, 6727–6730.
Crossref Google Scholar
[48]

Li, W. S.; Hou, P. X.; Liu, C.; Sun, D. M.; Yuan, J. T.; Zhao, S. Y.; Yin, L. C.; Cong, H. T.; Cheng, H. M. High-quality, highly concentrated semiconducting single-wall carbon nanotubes for use in field effect transistors and biosensors. ACS Nano 2013, 7, 6831–6839.
Crossref Google Scholar
[49]

Sakurai, S.; Yamada, M.; Sakurai, H.; Sekiguchi, A.; Futaba, D. N.; Hata, K. A phenomenological model for selective growth of semiconducting single-walled carbon nanotubes based on catalyst deactivation. Nanoscale 2016, 8, 1015–1023.
Crossref Google Scholar
[50]

Li, P.; Zhang, J. Sorting out semiconducting single-walled carbon nanotube arrays by preferential destruction of metallic tubes using water. J. Mater. Chem. 2011, 21, 11815–11821.
Crossref Google Scholar
[51]

Zhou, W. W.; Zhan, S. T.; Ding, L.; Liu, J. General rules for selective growth of enriched semiconducting single walled carbon nanotubes with water vapor as in situ etchant. J. Am. Chem. Soc. 2012, 134, 14019–14026.
Crossref Google Scholar
[52]

Li, Y. M.; Mann, D.; Rolandi, M.; Kim, W.; Ural, A.; Hung, S.; Javey, A.; Cao, J. E.; Wang, D. W.; Yenilmez, E. et al. Preferential growth of semiconducting single-walled carbon nanotubes by a plasma enhanced CVD method. Nano Lett. 2004, 4, 317–321.
Crossref Google Scholar
[53]

Hong, G.; Zhang, B.; Peng, B. H.; Zhang, J.; Choi, W. M.; Choi, J. Y.; Kim, J. M.; Liu, Z. F. Direct growth of semiconducting single-walled carbon nanotube array. J. Am. Chem. Soc. 2009, 131, 14642–14643.
Crossref Google Scholar
[54]

Wang, J. T.; Jin, X.; Liu, Z. B.; Yu, G.; Ji, Q. Q.; Wei, H. M.; Zhang, J.; Zhang, K.; Li, D. Q.; Yuan, Z. et al. Growing highly pure semiconducting carbon nanotubes by electrotwisting the helicity. Nat. Catal. 2018, 1, 326–331.
Crossref Google Scholar
[55]

Zhang, S. C.; Hu, Y.; Wu, J. X.; Liu, D.; Kang, L. X.; Zhao, Q. C.; Zhang, J. Selective scission of C–O and C–C bonds in ethanol using bimetal catalysts for the preferential growth of semiconducting SWNT arrays. J. Am. Chem. Soc. 2015, 137, 1012–1015.
Crossref Google Scholar
[56]

Qin, X. J.; Peng, F.; Yang, F.; He, X. H.; Huang, H. X.; Luo, D.; Yang, J.; Wang, S.; Liu, H. C.; Peng, L. M. et al. Growth of semiconducting single-walled carbon nanotubes by using ceria as catalyst supports. Nano Lett. 2014, 14, 512–517.
Crossref Google Scholar
[57]

Lin, D. W.; Yu, Y.; Li, L. Y.; Zou, M. Z.; Zhang, J. Growth of semiconducting single-walled carbon nanotubes array by precisely inhibiting metallic tubes using ZrO2 nanoparticles. Small 2021, 17, 2006605.
Crossref Google Scholar
[58]

Kang, L. X.; Hu, Y.; Liu, L. L.; Wu, J. X.; Zhang, S. C.; Zhao, Q. C.; Ding, F.; Li, Q. W.; Zhang, J. Growth of close-packed semiconducting single-walled carbon nanotube arrays using oxygen-deficient TiO2 nanoparticles as catalysts. Nano Lett. 2015, 15, 403–409.
Crossref Google Scholar
[59]

Zhang, L. L.; Sun, D. M.; Hou, P. X.; Liu, C.; Liu, T. Y.; Wen, J. F.; Tang, N. J.; Luan, J.; Shi, C.; Li, J. C. et al. Selective growth of metal-free metallic and semiconducting single-wall carbon nanotubes. Adv. Mater. 2017, 29, 1605719.
Crossref Google Scholar
[60]

Zhang, F.; Hou, P. X.; Liu, C.; Wang, B. W.; Jiang, H.; Chen, M. L.; Sun, D. M.; Li, J. C.; Cong, H. T.; Kauppinen, E. I. et al. Correction: Corrigendum: Growth of semiconducting single-wall carbon nanotubes with a narrow band-gap distribution. Nat. Commun. 2016, 7, 11563.
Crossref Google Scholar
[61]

Zhang, S. C.; Kang, L. X.; Wang, X.; Tong, L. M.; Yang, L. W.; Wang, Z. Q.; Qi, K.; Deng, S. B.; Li, Q. W.; Bai, X. D. et al. Arrays of horizontal carbon nanotubes of controlled chirality grown using designed catalysts. Nature 2017, 543, 234–238.
Crossref Google Scholar
[62]

Zhang, S. C.; Wang, X.; Yao, F. R.; He, M. S.; Lin, D. W.; Ma, H.; Sun, Y. Y.; Zhao, Q. C.; Liu, K. H.; Ding, F. et al. Controllable growth of (n, n − 1) family of semiconducting carbon nanotubes. Chem 2019, 5, 1182–1193.
Crossref Google Scholar
[63]

Zhu, Z. X.; Wei, N.; Cheng, W. J.; Shen, B. Y.; Sun, S. L.; Gao, J.; Wen, Q.; Zhang, R. F.; Xu, J.; Wang, Y. et al. Rate-selected growth of ultrapure semiconducting carbon nanotube arrays. Nat. Commun. 2019, 10, 4467.
Crossref Google Scholar
[64]

Huang, S. M.; Qian, Y.; Chen, J. Y.; Cai, Q. R.; Wan, L.; Wang, S.; Hu, W. B. Identification of the structures of superlong oriented single-walled carbon nanotube arrays by electrodeposition of metal and Raman spectroscopy. J. Am. Chem. Soc. 2008, 130, 11860–11861.
Crossref Google Scholar
[65]

Chang, N. K.; Hsu, J. H.; Su, C. C.; Chang, S. H. Horizontally oriented carbon nanotubes coated with nanocrystalline carbon. Thin Solid Films 2009, 517, 1917–1921.
Crossref Google Scholar
[66]

Chu, H. B.; Cui, R. L.; Wang, J. Y.; Yang, J.; Li, Y. Visualization of individual single-walled carbon nanotubes under an optical microscope as a result of decoration with gold nanoparticles. Carbon 2011, 49, 1182–1188.
Crossref Google Scholar
[67]

Wang, J. T.; Li, T. Y.; Xia, B. Y.; Jin, X.; Wei, H. M.; Wu, W. Y.; Wei, Y.; Wang, J. P.; Liu, P.; Zhang, L. N. et al. Vapor-condensation-assisted optical microscopy for ultralong carbon nanotubes and other nanostructures. Nano Lett. 2014, 14, 3527–3533.
Crossref Google Scholar
[68]

Liu, K. H.; Hong, X. P.; Zhou, Q.; Jin, C. H.; Li, J. H.; Zhou, W. W.; Liu, J.; Wang, E. G.; Zettl, A.; Wang, F. High-throughput optical imaging and spectroscopy of individual carbon nanotubes in devices. Nat. Nanotechnol. 2013, 8, 917–922.
Crossref Google Scholar
[69]

Jorio, A.; Saito, R.; Hafner, J. H.; Lieber, C. M.; Hunter, M.; McClure, T.; Dresselhaus, G.; Dresselhaus, M. S. Structural (n, m) determination of isolated single-wall carbon nanotubes by resonant Raman scattering. Phys. Rev. Lett. 2001, 86, 1118–1121.
Crossref Google Scholar
[70]

Sfeir, M. Y.; Wang, F.; Huang, L. M.; Chuang, C. C.; Hone, J.; O'Brien, S. P.; Heinz, T. F.; Brus, L. E. Probing electronic transitions in individual carbon nanotubes by Rayleigh scattering. Science 2004, 306, 1540–1543.
Crossref Google Scholar
[71]

Wu, W. Y.; Yue, J. Y.; Lin, X. Y.; Li, D. Q.; Zhu, F. Q.; Yin, X.; Zhu, J.; Wang, J. T.; Zhang, J.; Chen, Y. et al. True-color real-time imaging and spectroscopy of carbon nanotubes on substrates using enhanced Rayleigh scattering. Nano Res. 2015, 8, 2721–2732.
Crossref Google Scholar
[72]

Bachilo, S. M.; Strano, M. S.; Kittrell, C.; Hauge, R. H.; Smalley, R. E.; Weisman, R. B. Structure-assigned optical spectra of single-walled carbon nanotubes. Science 2002, 298, 2361–2366.
Crossref Google Scholar
[73]

Deng, S. B.; Tang, J. Y.; Kang, L. X.; Hu, Y.; Yao, F. R.; Zhao, Q. C.; Zhang, S. C.; Liu, K. H.; Zhang, J. High-throughput determination of statistical structure information for horizontal carbon nanotube arrays by optical imaging. Adv. Mater. 2016, 28, 2018–2023.
Crossref Google Scholar
[74]

Jinkins, K. R.; Foradori, S. M.; Saraswat, V.; Jacobberger, R. M.; Dwyer, J. H.; Gopalan, P.; Berson, A.; Arnold, M. S. Aligned 2D carbon nanotube liquid crystals for wafer-scale electronics. Sci. Adv. 2021, 7, eabh0640.
Crossref Google Scholar
[75]

Joo, Y.; Brady, G. J.; Arnold, M. S.; Gopalan, P. Dose-controlled, floating evaporative self-assembly, and alignment of semiconducting carbon nanotubes from organic solvents. Langmuir 2014, 30, 3460–3466.
Crossref Google Scholar
[76]

Liu, L. J.; Han, J.; Xu, L.; Zhou, J. S.; Zhao, C. Y.; Ding, S. J.; Shi, H. W.; Xiao, M. M.; Ding, L.; Ma, Z. et al. Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics. Science 2020, 368, 850–856.
Crossref Google Scholar
[77]

Odom, T. W.; Huang, J. L.; Kim, P.; Lieber, C. M. Atomic structure and electronic properties of single-walled carbon nanotubes. Nature 1998, 391, 62–64.
Crossref Google Scholar
[78]

Sato, Y.; Yanagi, K.; Miyata, Y.; Suenaga, K.; Kataura, H.; Iijima, S. Chiral-angle distribution for separated single-walled carbon nanotubes. Nano Lett. 2008, 8, 3151–3154.
Crossref Google Scholar
[79]

Li, J.; He, Y. J.; Han, Y. M.; Liu, K.; Wang, J. P.; Li, Q. Q.; Fan, S. S.; Jiang, K. L. Direct identification of metallic and semiconducting single-walled carbon nanotubes in scanning electron microscopy. Nano Lett. 2012, 12, 4095–4101.
Crossref Google Scholar
[80]

Franklin, A. D. Nanomaterials in transistors: From high-performance to thin-film applications. Science 2015, 349.
Crossref Google Scholar
[81]

De Volder, M. F. L.; Tawfick, S. H.; Baughman, R. H.; Hart, A. J. Carbon nanotubes: Present and future commercial applications. Science 2013, 339, 535–539.
Crossref Google Scholar
[82]

Tans, S. J.; Verschueren, A. R. M.; Dekker, C. Room-temperature transistor based on a single carbon nanotube. Nature 1998, 393, 49–52.
Crossref Google Scholar
[83]

Martel, R.; Schmidt, T.; Shea, H. R.; Hertel, T.; Avouris, P. Single-and multi-wall carbon nanotube field-effect transistors. Appl. Phys. Lett. 1998, 73, 2447–2449.
Crossref Google Scholar
[84]

Javey, A.; Guo, J.; Wang, Q.; Lundstrom, M.; Dai, H. J. Ballistic carbon nanotube field-effect transistors. Nature 2003, 424, 654–657.
Crossref Google Scholar
[85]

Zhang, Z. Y.; Liang, X. L.; Wang, S.; Yao, K.; Hu, Y. F.; Zhu, Y. Z.; Chen, Q.; Zhou, W. W.; Li, Y.; Yao, Y. G. et al. Doping-free fabrication of carbon nanotube based ballistic CMOS devices and circuits. Nano Lett. 2007, 7, 3603–3607.
Crossref Google Scholar
[86]
Holmes, D. S.; DeBenedictis, E. P. Superconductor electronics and the international roadmap for devices and systems. In 2017 16th International Superconductive Electronics Conference (ISEC), Naples, Italy, 2017.
Crossref
[87]

Liu, L. J.; Qiu, C. G.; Zhong, D. L.; Si, J.; Zhang, Z. Y.; Peng, L. M. Scaling down contact length in complementary carbon nanotube field-effect transistors. Nanoscale 2017, 9, 9615–9621.
Crossref Google Scholar
[88]

Javey, A.; Kim, H.; Brink, M.; Wang, Q.; Ural, A.; Guo, J.; McIntyre, P.; McEuen, P.; Lundstrom, M.; Dai, H. J. High-κ dielectrics for advanced carbon-nanotube transistors and logic gates. Nat. Mater. 2002, 1, 241–246.
Crossref Google Scholar
[89]

Javey, A.; Guo, J.; Farmer, D. B.; Wang, Q.; Wang, D. W.; Gordon, R. G.; Lundstrom, M.; Dai, H. J. Carbon nanotube field-effect transistors with integrated ohmic contacts and high-κ gate dielectrics. Nano Lett. 2004, 4, 447–450.
Crossref Google Scholar
[90]

Franklin, A. D.; Bojarczuk, N. A.; Copel, M. Consistently low subthreshold swing in carbon nanotube transistors using lanthanum oxide. Appl. Phys. Lett. 2013, 102, 013108.
Crossref Google Scholar
[91]

Franklin, A. D.; Luisier, M.; Han, S. J.; Tulevski, G.; Breslin, C. M.; Gignac, L.; Lundstrom, M. S.; Haensch, W. Sub-10 nm carbon nanotube transistor. Nano Lett. 2012, 12, 758–762.
Crossref Google Scholar
[92]

Franklin, A. D.; Tulevski, G. S.; Han, S. J.; Shahrjerdi, D.; Cao, Q.; Chen, H. Y.; Wong, H. S. P.; Haensch, W. Variability in carbon nanotube transistors: Improving device-to-device consistency. ACS Nano 2012, 6, 1109–1115.
Crossref Google Scholar
[93]

Franklin, A. D.; Koswatta, S. O.; Farmer, D. B.; Smith, J. T.; Gignac, L.; Breslin, C. M.; Han, S. J.; Tulevski, G. S.; Miyazoe, H.; Haensch, W. et al. Carbon nanotube complementary wrap-gate transistors. Nano Lett. 2013, 13, 2490–2495.
Crossref Google Scholar
[94]

Shulaker, M. M.; Hills, G.; Patil, N.; Wei, H.; Chen, H. Y.; Philip Wong, H. S.; Mitra, S. Carbon nanotube computer. Nature 2013, 501, 526–530.
Crossref Google Scholar
[95]

Franklin, A. D.; Chen, Z. H. Length scaling of carbon nanotube transistors. Nat. Nanotechnol. 2010, 5, 858–862.
Crossref Google Scholar
[96]

Qiu, C. G.; Zhang, Z. Y.; Xiao, M. M.; Yang, Y. J.; Zhong, D. L.; Peng, L. M. Scaling carbon nanotube complementary transistors to 5-nm gate lengths. Science 2017, 355, 271–276.
Crossref Google Scholar
[97]
Shulaker, M. M.; Wu, T. F.; Pal, A.; Zhao, L.; Nishi, Y.; Saraswat, K.; Wong, H. S. P.; Mitra, S. Monolithic 3D integration of logic and memory: Carbon nanotube FETs, resistive RAM, and silicon FETs. In 2014 IEEE International Electron Devices Meeting, San Francisco, CA, USA, 2014.
Crossref
[98]

Shulaker, M. M.; Hills, G.; Park, R. S.; Howe, R. T.; Saraswat, K.; Wong, H. S. P.; Mitra, S. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip. Nature 2017, 547, 74–78.
Crossref Google Scholar
[99]

Zhu, M. G.; Xiao, H. S.; Yan, G. P.; Sun, P. K.; Jiang, J. H.; Cui, Z.; Zhao, J. W.; Zhang, Z. Y.; Peng, L. M. Radiation-hardened and repairable integrated circuits based on carbon nanotube transistors with ion gel gates. Nat. Electron. 2020, 3, 622–629.
Crossref Google Scholar
[100]
Vandersypen, L.; Van Leeuwenhoek, A. Quantum computing—The next challenge in circuit and system design. in 2017 IEEE International Solid-State Circuits Conference (ISSCC), San Francisco, CA, USA, 2017, pp 24–26.
Crossref
[101]

Xie, Y. N.; Zhong, D. L.; Fan, C. W.; Deng, X. S.; Peng, L. M.; Zhang, Z. Y. Highly temperature-stable carbon nanotube transistors and gigahertz integrated circuits for cryogenic electronics. Adv. Electron. Mater. 2021, 7, 2100202.
Crossref Google Scholar
[102]

Kim, S. H.; Haines, C. S.; Li, N.; Kim, K. J.; Mun, T. J.; Choi, C.; Di, J. T.; Oh, Y. J.; Oviedo, J. P.; Bykova, J. et al. Harvesting electrical energy from carbon nanotube yarn twist. Science 2017, 357, 773–778.
Crossref Google Scholar
[103]

Brady, G. J.; Way, A. J.; Safron, N. S.; Evensen, H. T.; Gopalan, P.; Arnold, M. S. Quasi-ballistic carbon nanotube array transistors with current density exceeding Si and GaAs. Sci. Adv. 2016, 2, e1601240.
Crossref Google Scholar
[104]

He, X. W.; Gao, W. L.; Xie, L. J.; Li, B.; Zhang, Q.; Lei, S. D.; Robinson, J. M.; Hároz, E. H.; Doorn, S. K.; Wang, W. P. et al. Wafer-scale monodomain films of spontaneously aligned single-walled carbon nanotubes. Nat. Nanotechnol. 2016, 11, 633–638.
Crossref Google Scholar
[105]

Si, J.; Zhong, D. L.; Xu, H. T.; Xiao, M. M.; Yu, C. X.; Zhang, Z. Y.; Peng, L. M. Scalable preparation of high-density semiconducting carbon nanotube arrays for high-performance field-effect transistors. ACS Nano 2018, 12, 627–634.
Crossref Google Scholar
[106]

Sun, W.; Shen, J.; Zhao, Z.; Arellano, N.; Rettner, C.; Tang, J. S.; Cao, T. Y.; Zhou, Z. Y.; Ta, T.; Streit, J. K. et al. Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches. Science 2020, 368, 874–877.
Crossref Google Scholar
[107]

Cheng, Z. H.; Pang, C. S.; Wang, P. Q.; Le, S. T.; Wu, Y. Q.; Shahrjerdi, D.; Radu, I.; Lemme, M. C.; Peng, L. M.; Duan, X. F. et al. How to report and benchmark emerging field-effect transistors. Nat. Electron. 2022, 5, 416–423.
Crossref Google Scholar
Nano Research
Volume 16 Issue 11,
November 2023
Pages 12516-12530
DOI: 10.1007/s12274-023-6173-1
Cite this article:
Xie Y, Li Y, Zhao Z, et al. Pave the way to the batch production of SWNT arrays for carbon-based electronic devices. Nano Research, 2023, 16(11): 12516-12530. https://doi.org/10.1007/s12274-023-6173-1
Topics:
Carbon

543

Views

2

Crossref

0

Web of Science

1

Scopus

0

CSCD

Altmetrics
Received: 15 June 2023
Revised: 07 September 2023
Accepted: 07 September 2023
Published: 13 October 2023
© Tsinghua University Press 2023
Return