AI Chat Paper
Note: Please note that the following content is generated by AMiner AI. SciOpen does not take any responsibility related to this content.
{{lang === 'zh_CN' ? '文章概述' : 'Summary'}}
{{lang === 'en_US' ? '中' : 'Eng'}}
Chat more with AI
Powered by AMiner. Clicking this button will take you away from SciOpen.
Home Nano Research Article
Article Link
Cite
EndNote(RIS) BibTeX
Collect
Submit Manuscript
Show Outline
Outline
Show full outline
Hide outline
Outline
Show full outline
Hide outline
Research Article

Molecule-based vertical transistor via intermolecular charge transport through π-π stacking

Cheng Liu1,§, Cheng Fu1,2,§, Lingyu Tang1, Jianghua Wu3, Zhangyan Mu1, Yamei Sun1, Yanghang Pan1, Bailin Tian1, Kai Bao4, Jing Ma1,2( ), Qiyuan He4( ), Mengning Ding1( )
Key Laboratory of Mesoscopic Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
Jiangsu Key Laboratory of Advanced Organic Materials, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
Department of Materials Science and Engineering, City University of Hong Kong, Hong Kong 999077, China

§ Cheng Liu and Cheng Fu contributed equally to this work.

Show Author Information

Graphical Abstract

A molecular intercalation strategy provides an ideal platform for probing intrinsic charge transport across π-π stacked conjugated molecules and integrates two-dimensional layered materials with functional organic semiconductor molecules for functional molecule-based electronics.

Abstract

The π-π stacking is a well-recognized intermolecular interaction that is responsible for the construction of electron hopping channels in numerous conducting frameworks/aggregates. However, the exact role of π-to-π channels within typical single crystalline organic semiconductors remains unclear as the orientations of these molecules are diverse, and their control usually requires additional side chain groups that misrepresent the intrinsic properties of the original semiconducting molecules. Therefore, the construction of conduction channels with intrinsic π-π stacking in the molecule-based device is crucial for the utilization of their unique transport characteristics and understanding of the transport mechanism. To this end, we present a molecular intercalation strategy that integrates two-dimensional layered materials with functional organic semiconductor molecules for functional molecule-based electronics. Various organic semiconductor molecules can be effectively intercalated into the van der Waals gaps of semi-metallic TaS2 with π-π stacking configuration and controlled intercalant content. Our results show that the vertical charge transport in the stacking direction shows a tunneling-dominated mechanism that strongly depends on the molecular structures. Furthermore, we demonstrated a new type of molecule-based vertical transistor in which TaS2 and π-π stacked organic molecules function as the electrical contact and the active channel, respectively. On/off ratios as high as 447 are achieved under electrostatic modulation in ionic liquid, comparable to the current state-of-the-art molecular transistors. Our study provides an ideal platform for probing intrinsic charge transport across π-π stacked conjugated molecules and also a feasible approach for the construction of high-performance molecule-based electronic devices.

Keywords

π-π stackingelectrochemical intercalationorganic semiconductorelectrical transporttunneling field effect transistor

Electronic Supplementary Material

Download File(s)
12274_2023_6252_MOESM1_ESM.pdf (2.1 MB)

References

[1]

Xin, N.; Guan, J. X.; Zhou, C. G.; Chen, X. J. N.; Gu, C. H.; Li, Y.; Ratner, M. A.; Nitzan, A.; Stoddart, J. F.; Guo, X. F. Concepts in the design and engineering of single-molecule electronic devices. Nat. Rev. Phys. 2019, 1, 211–230.
Crossref Google Scholar
[2]

Sun, L. L.; Diaz-Fernandez, Y. A.; Gschneidtner, T. A.; Westerlund, F.; Lara-Avila, S.; Moth-Poulsen, K. Single-molecule electronics: From chemical design to functional devices. Chem. Soc. Rev. 2014, 43, 7378–7411.
Crossref Google Scholar
[3]

Xiang, D.; Wang, X. L.; Jia, C. C.; Lee, T.; Guo, X. F. Molecular-scale electronics: From concept to function. Chem. Rev. 2016, 116, 4318–4440.
Crossref Google Scholar
[4]

Chen, H. L.; Stoddart, J. F. From molecular to supramolecular electronics. Nat. Rev. Mater. 2021, 6, 804–828.
Crossref Google Scholar
[5]

Tang, J. H.; Li, Y. Q.; Wu, Q. Q.; Wang, Z. X.; Hou, S. J.; Tang, K.; Sun, Y.; Wang, H.; Wang, H.; Lu, C. et al. Single-molecule level control of host–guest interactions in metallocycle-C60 complexes. Nat. Commun. 2019, 10, 4599.
Crossref Google Scholar
[6]

Chen, H. L.; Brasiliense, V.; Mo, J. S.; Zhang, L.; Jiao, Y.; Chen, Z.; Jones, L. O.; He, G.; Guo, Q. H.; Chen, X. Y. et al. Single-molecule charge transport through positively charged electrostatic anchors. J. Am. Chem. Soc. 2021, 143, 2886–2895.
Crossref Google Scholar
[7]

Venkataraman, L.; Klare, J. E.; Nuckolls, C.; Hybertsen, M. S.; Steigerwald, M. L. Dependence of single-molecule junction conductance on molecular conformation. Nature 2006, 442, 904–907.
Crossref Google Scholar
[8]

Zang, Y. P.; Fu, T. R.; Zou, Q.; Ng, F.; Li, H. X.; Steigerwald, M. L.; Nuckolls, C.; Venkataraman, L. Cumulene wires display increasing conductance with increasing length. Nano. Lett. 2020, 20, 8415–8419.
Crossref Google Scholar
[9]

Li, P. H.; Hou, S. J.; Alharbi, B.; Wu, Q. Q.; Chen, Y. J.; Zhou, L.; Gao, T. Y.; Li, R. H.; Yang, L.; Chang, X. Y. et al. Quantum interference-controlled conductance enhancement in stacked graphene-like dimers. J. Am. Chem. Soc. 2022, 144, 15689–15697.
Crossref Google Scholar
[10]

Famili, M.; Jia, C. C.; Liu, X. S.; Wang, P. Q.; Grace, I. M.; Guo, J.; Liu, Y.; Feng, Z. Y.; Wang, Y. L.; Zhao, Z. P. et al. Self-assembled molecular-electronic films controlled by room temperature quantum interference. Chem 2019, 5, 474–484.
Crossref Google Scholar
[11]

Jia, C. C.; Famili, M.; Carlotti, M.; Liu, Y.; Wang, P. Q.; Grace, I. M.; Feng, Z. Y.; Wang, Y. L.; Zhao, Z. P.; Ding, M. N.et al. Quantum interference mediated vertical molecular tunneling transistors. Sci. Adv. 2018, 4, eaat8237.
Crossref Google Scholar
[12]

Gimzewski, J. K.; Joachim, C. Nanoscale science of single molecules using local probes. Science 1999, 283, 1683–1688.
Crossref Google Scholar
[13]

Donhauser, Z. J.; Mantooth, B. A.; Kelly, K. F.; Bumm, L. A.; Monnell, J. D.; Stapleton, J. J.; Price, D. W.; Rawlett, A. M.; Allara, D. L.; Tour, J. M. et al. Conductance switching in single molecules through conformational changes. Science 2001, 292, 2303–2307.
Crossref Google Scholar
[14]

Fan, F. R. F.; Yang, J. P.; Cai, L. T.; Price, D. W.; Dirk, S. M.; Kosynkin, D. V.; Yao, Y. X.; Rawlett, A. M.; Tour, J. M.; Bard, A. J. Charge transport through self-assembled monolayers of compounds of interest in molecular electronics. J. Am. Chem. Soc. 2002, 124, 5550–5560.
Crossref Google Scholar
[15]

Mas-Torrent, M.; Rovira, C. Role of molecular order and solid-state structure in organic field-effect transistors. Chem. Rev. 2011, 111, 4833–4856.
Crossref Google Scholar
[16]

Beaujuge, P. M.; Fréchet, J. M. J. Molecular design and ordering effects in π-functional materials for transistor and solar cell applications. J. Am. Chem. Soc. 2011, 133, 20009–20029.
Crossref Google Scholar
[17]

Frisenda, R.; Janssen, V. A. E. C.; Grozema, F. C.; Van Der Zant, H. S. J.; Renaud, N. Mechanically controlled quantum interference in individual π-stacked dimers. Nat. Chem. 2016, 8, 1099–1104.
Crossref Google Scholar
[18]

Tan, Z. B.; Zhang, D.; Tian, H. R.; Wu, Q. Q.; Hou, S. J.; Pi, J. C.; Sadeghi, H.; Tang, Z.; Yang, Y.; Liu, J. Y. et al. Atomically defined angstrom-scale all-carbon junctions. Nat. Commun. 2019, 10, 1748.
Crossref Google Scholar
[19]

Zhao, S. Q.; Wu, Q. Q.; Pi, J. C.; Liu, J. Y.; Zheng, J. T.; Hou, S. J.; Wei, J. Y.; Li, R. H.; Sadeghi, H.; Yang, Y. et al. Cross-plane transport in a single-molecule two-dimensional van der Waals heterojunction. Sci. Adv. 2020, 6, eaba6714.
Crossref Google Scholar
[20]

Zhao, S. Q.; Deng, Z. Y.; Albalawi, S.; Wu, Q. Q.; Chen, L. J.; Zhang, H. W.; Zhao, X. J.; Hou, H.; Hou, S. J.; Dong, G. et al. Charge transport through single-molecule bilayer-graphene junctions with atomic thickness. Chem. Sci. 2022, 13, 5854–5859.
Crossref Google Scholar
[21]

Tang, Y. X.; Zhou, Y.; Zhou, D. H.; Chen, Y. R.; Xiao, Z. Y.; Shi, J.; Liu, J. Y.; Hong, W. J. Electric field-induced assembly in single-stacking terphenyl junctions. J. Am. Chem. Soc. 2020, 142, 19101–19109.
Crossref Google Scholar
[22]

Yu, H.; Li, J. L.; Li, S. S.; Liu, Y.; Jackson, N. E.; Moore, J. S.; Schroeder, C. M. Efficient intermolecular charge transport in π-stacked pyridinium dimers using cucurbit[8]uril supramolecular complexes. J. Am. Chem. Soc. 2022, 144, 3162–3173.
Crossref Google Scholar
[23]

Kang, B.; Lim, S.; Lee, W. H.; Jo, S. B.; Cho, K. Work-function-tuned reduced graphene oxide via direct surface functionalization as source/drain electrodes in bottom-contact organic transistors. Adv. Mater. 2013, 25, 5856–5862.
Crossref Google Scholar
[24]

Lee, B.; Chen, Y.; Duerr, F.; Mastrogiovanni, D.; Garfunkel, E.; Andrei, E. Y.; Podzorov, V. Modification of electronic properties of graphene with self-assembled monolayers. Nano Lett. 2010, 10, 2427–2432.
Crossref Google Scholar
[25]

Zhang, T.; Cheng, Z. G.; Wang, Y. B.; Li, Z. J.; Wang, C. X.; Li, Y. B.; Fang, Y. Self-assembled 1-octadecanethiol monolayers on graphene for mercury detection. Nano Lett. 2010, 10, 4738–4741.
Crossref Google Scholar
[26]

Seo, S.; Hwang, E.; Cho, Y.; Lee, J.; Lee, H. Functional molecular junctions derived from double self-assembled monolayers. Angew. Chem., Int. Ed. 2017, 56, 12122–12126.
Crossref Google Scholar
[27]

Chen, C. J.; Wen, Y. W.; Hu, X. L.; Ji, X. L.; Yan, M. Y.; Mai, L. Q.; Hu, P.; Shan, B.; Huang, Y. H. Na+ intercalation pseudocapacitance in graphene-coupled titanium oxide enabling ultra-fast sodium storage and long-term cycling. Nat. Commun. 2015, 6, 6929.
Crossref Google Scholar
[28]

Bao, W. Z.; Wan, J. Y.; Han, X. G.; Cai, X. H.; Zhu, H. L.; Kim, D.; Ma, D. K.; Xu, Y. L.; Munday, J. N.; Drew, H. D. et al. Approaching the limits of transparency and conductivity in graphitic materials through lithium intercalation. Nat. Commun. 2014, 5, 4224.
Crossref Google Scholar
[29]

Zhang, J. S.; Yang, A. K.; Wu, X.; Van De Groep, J.; Tang, P. Z.; Li, S. R.; Liu, B. F.; Shi, F. F.; Wan, J. Y.; Li, Q. T. et al. Reversible and selective ion intercalation through the top surface of few-layer MoS2. Nat. Commun. 2018, 9, 5289.
Crossref Google Scholar
[30]

Wang, Y. Y.; Yan, D. F.; El Hankari, S.; Zou, Y. Q.; Wang, S. Y. Recent progress on layered double hydroxides and their derivatives for electrocatalytic water splitting. Adv. Sci. (Weinh.) 2018, 5, 1800064.
Crossref Google Scholar
[31]

Su, M. X.; Zhou, W. D.; Jiang, Z. Z.; Chen, M. Y.; Luo, X. F.; He, J.; Yuan, C. L. Elimination of interlayer potential barriers of chromium sulfide by self-intercalation for enhanced hydrogen evolution reaction. ACS Appl. Mater. Interfaces 2021, 13, 13055–13062.
Crossref Google Scholar
[32]

Yan, Z. H.; Sun, H. M.; Chen, X.; Liu, H. H.; Zhao, Y. R.; Li, H. X.; Xie, W.; Cheng, F. Y.; Chen, J. Anion insertion enhanced electrodeposition of robust metal hydroxide/oxide electrodes for oxygen evolution. Nat. Commun. 2018, 9, 2373.
Crossref Google Scholar
[33]

Wang, C.; He, Q. Y.; Halim, U.; Liu, Y. Y.; Zhu, E. B.; Lin, Z. Y.; Xiao, H.; Duan, X. D.; Feng, Z. Y.; Cheng, R. et al. Monolayer atomic crystal molecular superlattices. Nature 2018, 555, 231–236.
Crossref Google Scholar
[34]
He, Q. Y.; Lin, Z. Y.; Ding, M. N.; Yin, A. X.; Halim, U.; Wang, C.; Liu, Y.; Cheng, H. C.; Huang, Y.; Duan, X. F. In situ probing molecular intercalation in two-dimensional layered semiconductors. Nano Lett. 2019 , 19, 6819–6826.
[35]
Zhou, B. X.; Zhou, J. Y.; Wang, L. Y.; Kang, J. H.; Zhang, A.; Zhou, J. X.; Zhang, D. H.; Xu, D.; Hu, B. Y.; Deng, S. B. et al. A chemical-dedoping strategy to tailor electron density in molecular-intercalated bulk monolayer MoS2. Nat. Synth., in press, DOI: 10.1038/s44160-023-00396-2.
[36]

Zhu, Y.; Ji, Y. J.; Ju, Z. Y.; Yu, K.; Ferreira, P. J.; Liu, Y. Y.; Yu, G. H. Ultrafast intercalation enabled by strong solvent-host interactions: Understanding solvent effect at the atomic level. Angew. Chem., Int. Ed. 2019, 58, 17205–17209.
Crossref Google Scholar
[37]

He, W.; Zang, H.; Cai, S. H.; Mu, Z. Y.; Liu, C.; Ding, M. N.; Wang, P.; Wang, X. R. Intercalation and hybrid heterostructure integration of two-dimensional atomic crystals with functional organic semiconductor molecules. Nano Res. 2020, 13, 2917–2924.
Crossref Google Scholar
[38]

Ding, M. N.; He, Q. Y.; Wang, G. M.; Cheng, H. C.; Huang, Y.; Duan, X. F. An on-chip electrical transport spectroscopy approach for in situ monitoring electrochemical interfaces. Nat. Commun. 2015, 6, 7867.
Crossref Google Scholar
[39]

Ding, M. N.; Shiu, H. Y.; Li, S. L.; Lee, C. K.; Wang, G. M.; Wu, H.; Weiss, N. O.; Young, T. D.; Weiss, P. S.; Wong, G. C. et al. Nanoelectronic investigation reveals the electrochemical basis of electrical conductivity in Shewanella and Geobacter. ACS Nano 2016, 10, 9919–9926.
Crossref Google Scholar
[40]

Mu, Z. Y.; Han, N.; Xu, D.; Tian, B. L.; Wang, F. Y.; Wang, Y. Q.; Sun, Y. M.; Liu, C.; Zhang, P. K.; Wu, X. J. et al. Critical role of hydrogen sorption kinetics in electrocatalytic CO2 reduction revealed by on-chip in situ transport investigations. Nat. Commun. 2022, 13, 6911.
Crossref Google Scholar
[41]

Zheng, L.; He, W.; Zhu, K.; Wang, C.X.; Wang, S.; Hong, Y.; Chen, Y. M.; Zhou, G. Y.; Miao, H.; Zhou, J. Q. Investigation of poly (1-vinyl imidazole co 1, 4-butanediol diglycidyl ether) as a leveler for copper electroplating of through-hole. Electrochim. Acta 2018, 283, 560–567.
Crossref Google Scholar
[42]

Kusumoto, Y.; Takeshita, Y.; Kurawaki, J.; Satake, I. Preferential solvation studied by the fluorescence spectrum of pyrene in water-alcohol binary mixtures. Chem. Lett. 1997, 26, 349–350.
Crossref Google Scholar
[43]

Gao, F.; Ren, B. Y.; Yan, Y.; Tong, Z. Changes in solvation state of strong polyelectrolytes in DMSO/THF mixtures. Acta Phys. Chim. Sin. 2000, 16, 450–453.
Crossref Google Scholar
[44]

Azhagurajan, M.; Kajita, T.; Itoh, T.; Kim, Y. G.; Itaya, K. In situ visualization of lithium ion intercalation into MoS2 single crystals using differential optical microscopy with atomic layer resolution. J. Am. Chem. Soc. 2016, 138, 3355–3361.
Crossref Google Scholar
[45]

Fu, W.; Qiao, J. S.; Zhao, X. X.; Chen, Y.; Fu, D. Y.; Yu, W.; Leng, K.; Song, P.; Chen, Z.; Yu, T. et al. Room temperature commensurate charge density wave on epitaxially grown bilayer 2H-tantalum sulfide on hexagonal boron nitride. ACS Nano 2020, 14, 3917–3926.
Crossref Google Scholar
[46]

Shi, J. P.; Wang, X. N.; Zhang, S.; Xiao, L. F.; Huan, Y. H.; Gong, Y.; Zhang, Z. P.; Li, Y. C.; Zhou, X. B.; Hong, M. et al. Two-dimensional metallic tantalum disulfide as a hydrogen evolution catalyst. Nat. Commun. 2017, 8, 958.
Crossref Google Scholar
[47]

Chen, S.; Goh, T. W.; Sabba, D.; Chua, J.; Mathews, N.; Huan, C. H. A.; Sum, T. C. Energy level alignment at the methylammonium lead iodide/copper phthalocyanine interface. APL Mater. 2014, 2, 081512.
Crossref Google Scholar
[48]

Xin, N.; Li, X. X.; Jia, C. C.; Gong, Y.; Li, M. L.; Wang, S. P.; Zhang, G. Y.; Yang, J. L.; Guo, X. F. Tuning charge transport in aromatic-ring single-molecule junctions via ionic-liquid gating. Angew. Chem., Int. Ed. 2018, 57, 14026–14031.
Crossref Google Scholar
[49]

El Abbassi, M.; Sangtarash, S.; Liu, X. S.; Perrin, M. L.; Braun, O.; Lambert, C.; Van Der Zant, H. S. J.; Yitzchaik, S.; Decurtins, S.; Liu, S. X. et al. Robust graphene-based molecular devices. Nat. Nanotechnol. 2019, 14, 957–961.
Crossref Google Scholar
[50]

Uji-I, H.; Nishio, S.; Fukumura, H. Electronic properties of a π-stacked pyrene derivative at a liquid-Solid interface studied with scanning tunneling spectroscopy. Chem. Phys. Lett. 2005, 408, 112–117.
Crossref Google Scholar
[51]

Kang, K.; Lee, K. H.; Han, Y. M.; Gao, H.; Xie, S. E.; Muller, D. A.; Park, J. Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures. Nature 2017, 550, 229–233.
Crossref Google Scholar
[52]

Yuan, L.; Jiang, L.; Zhang, B.; Nijhuis, C. A. Dependency of the tunneling decay coefficient in molecular tunneling junctions on the topography of the bottom electrodes. Angew. Chem., Int. Ed. 2014, 53, 3377–3381.
Crossref Google Scholar
[53]

Britnell, L.; Gorbachev, R. V.; Jalil, R.; Belle, B. D.; Schedin, F.; Katsnelson, M. I.; Eaves, L.; Morozov, S. V.; Mayorov, A. S.; Peres, N. M. et al. Electron tunneling through ultrathin boron nitride crystalline barriers. Nano Lett. 2012, 12, 1707–1710.
Crossref Google Scholar
[54]

Senkovskiy, B. V.; Nenashev, A. V.; Alavi, S. K.; Falke, Y.; Hell, M.; Bampoulis, P.; Rybkovskiy, D. V.; Usachov, D. Y.; Fedorov, A. V.; Chernov, A. I. et al. Tunneling current modulation in atomically precise graphene nanoribbon heterojunctions. Nat. Commun. 2021, 12, 2542.
Crossref Google Scholar
[55]

Sarkar, D.; Xie, X. J.; Liu, W.; Cao, W.; Kang, J. H.; Gong, Y. J.; Kraemer, S.; Ajayan, P. M.; Banerjee, K. A subthermionic tunnel field-effect transistor with an atomically thin channel. Nature 2015, 526, 91–95.
Crossref Google Scholar
[56]

Britnell, L.; Gorbachev, R. V.; Jalil, R.; Belle, B. D.; Schedin, F.; Mishchenko, A.; Georgiou, T.; Katsnelson, M. I.; Eaves, L.; Morozov, S. V. et al. Field-effect tunneling transistor based on vertical graphene heterostructures. Science 2012, 335, 947–950.
Crossref Google Scholar
[57]

Georgiou, T.; Jalil, R.; Belle, B. D.; Britnell, L.; Gorbachev, R. V.; Morozov, S. V.; Kim, Y. J.; Gholinia, A.; Haigh, S. J.; Makarovsky, O. et al. Vertical field-effect transistor based on graphene-WS2 heterostructures for flexible and transparent electronics. Nat. Nanotechnol. 2013, 8, 100–103.
Crossref Google Scholar
[58]

Bai, J.; Daaoub, A.; Sangtarash, S.; Li, X. H.; Tang, Y. X.; Zou, Q.; Sadeghi, H.; Liu, S.; Huang, X.; Tan, Z. B. et al. Anti-resonance features of destructive quantum interference in single-molecule thiophene junctions achieved by electrochemical gating. Nat. Mater. 2019, 18, 364–369.
Crossref Google Scholar
[59]

Li, Y. Q.; Buerkle, M.; Li, G. F.; Rostamian, A.; Wang, H.; Wang, Z. X.; Bowler, D. R.; Miyazaki, T.; Xiang, L. M.; Asai, Y. et al. Gate controlling of quantum interference and direct observation of anti-resonances in single molecule charge transport. Nat. Mater. 2019, 18, 357–363.
Crossref Google Scholar
[60]

Ojeda-Aristizabal, C.; Bao, W.; Fuhrer, M. S. Thin-film barristor: A gate-tunable vertical graphene-pentacene device. Phys. Rev. B 2013, 88, 035435.
Crossref Google Scholar
[61]

Hlaing, H.; Kim, C. H.; Carta, F.; Nam, C. Y.; Barton, R. A.; Petrone, N.; Hone, J.; Kymissis, I. Low-voltage organic electronics based on a gate-tunable injection barrier in vertical graphene-organic semiconductor heterostructures. Nano Lett. 2015, 15, 69–74.
Crossref Google Scholar
[62]

Liu, Y.; Zhou, H. L.; Weiss, N. O.; Huang, Y.; Duan, X. F. High-performance organic vertical thin film transistor using graphene as a tunable contact. ACS Nano 2015, 9, 11102–11108.
Crossref Google Scholar
Nano Research
Volume 17 Issue 5,
May 2024
Pages 4573-4581
DOI: 10.1007/s12274-023-6252-3
Cite this article:
Liu C, Fu C, Tang L, et al. Molecule-based vertical transistor via intermolecular charge transport through π-π stacking. Nano Research, 2024, 17(5): 4573-4581. https://doi.org/10.1007/s12274-023-6252-3
Topics:
Semiconductor device manufacture

459

Views

2

Crossref

2

Web of Science

2

Scopus

0

CSCD

Altmetrics
Received: 11 August 2023
Revised: 27 September 2023
Accepted: 07 October 2023
Published: 02 December 2023
© Tsinghua University Press 2023
Return