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Research Article

A universal calibration method for eliminating topography-dependent current in conductive AFM and its application in nanoscale imaging

Chunlin Hao1Hao Xu1Shiquan Lin3Yaju Zhang1( )Jinmiao He1Bei Liu1Yuanzheng Zhang1Banghao Wu1Guozhen Shen2( )Haiwu Zheng1( )
Henan Province Engineering Research Center of Smart Micro-nano Sensing Technology and Application, School of Physics and Electronics, Henan University, Kaifeng 475004, China
School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083, China
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Graphical Abstract

The origin of topographic crosstalk during conductive atomic force microscopy (CAFM) testing has been systematically investigated and a universal calibration method has been proposed.

Abstract

The topography and electrical properties are two crucial characteristics that determine the roles and functionalities of materials. Conductive atomic force microscopy (CAFM) is widely recognized for its ability to independently measure the topography and conductivity. The increasing trend towards miniaturization in electrical devices and sensors has encouraged an urgent demand for enhancing the accuracy of CAFM characterization. However, when performing CAFM tests on Bi0.5Na0.5TiO3 bulk ceramic, it is interesting to observe significant currents related to the topography. Why do insulators exhibit “conductivity” in CAFM testing? Herein, we thoroughly investigated the topography-dependent current during CAFM testing for the first time. Based on the linear dependence between the current and the first derivative of topography, the calibration method has been proposed to eliminate the topographic crosstalk. This method is evaluated on Bi0.5Na0.5TiO3 bulk ceramic, one-dimensional (1D) ZnO nanowire, two-dimensional (2D) NbOI2 flake, and biological lotus leaf. The corresponding results of negligible topography-interference current affirm the feasibility and universality of this calibration method. This work effectively addresses the challenge of topographic crosstalk in CAFM characterization, thereby preventing the erroneous estimation of the conductivity of any unknown sample.

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Nano Research
Pages 6509-6517
Cite this article:
Hao C, Xu H, Lin S, et al. A universal calibration method for eliminating topography-dependent current in conductive AFM and its application in nanoscale imaging. Nano Research, 2024, 17(7): 6509-6517. https://doi.org/10.1007/s12274-024-6651-0
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Received: 17 January 2024
Revised: 12 March 2024
Accepted: 24 March 2024
Published: 22 April 2024
© Tsinghua University Press 2024
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