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Research Article

Ultra-high sensitivity fiber optic microphone with corrugated graphene-oxide diaphragm for voice recognition

Yang Liu1, Cheng Li1,2( ), Lingxiao Yu3, Zhengwei Wu4, Shangchun Fan1, Ruitao Lv3( )
School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
Shenzhen Institute of Beihang University, Shenzhen 518063, China
Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
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Graphical Abstract

Herein, a stable corrugation structure is introduced into the graphene-oxide diaphragm to fabricate the Fabry–Perot acoustic sensor. The proposed sensor exhibits high sensitivity (43.70 nm/Pa@17 kHz), flat frequency response (−3.2 to 3.7 dB within 300–3500 Hz), high signal-to-noise ratio (76.66 dB@1 kHz), and high voice recognition accuracy (98.4%), which has potential applications in weak acoustic sensing and human–machine interaction.

Abstract

To avoid interference from unexpected background noises and obtain high fidelity voice signal, acoustic sensors with high sensitivity, flat frequency response, and high signal-to-noise ratio (SNR) are urgently needed for voice recognition. Graphene-oxide (GO) has received extensive attention due to its advantages of controllable thickness and high fracture strength. However, low mechanical sensitivity (SM) introduced by undesirable initial stress limits the performance of GO material in the field of voice recognition. To alleviate the aforementioned issue, GO diaphragm with annular corrugations is proposed. By means of the reusable copper mold machined by picosecond laser, the fabrication and transfer of corrugated GO diaphragm are realized, thus achieving a Fabry–Perot (F–P) acoustic sensor. Benefitting from the structural advantage of the corrugated GO diaphragm, our F–P acoustic sensor exhibits high SM (43.70 nm/Pa@17 kHz), flat frequency response (−3.2 to 3.7 dB within 300–3500 Hz), and high SNR (76.66 dB@1 kHz). In addition, further acoustic measurements also demonstrate other merits, including an excellent frequency detection resolution (0.01 Hz) and high time stability (output relative variation less than 6.7% for 90 min). Given the merits presented before, the fabricated F–P acoustic sensor with corrugated GO diaphragm can serve as a high-fidelity platform for acoustic detection and voice recognition. In conjunction with the deep residual learning framework, high recognition accuracy of 98.4% is achieved by training and testing the data recorded by the fabricated F–P acoustic sensor.

Keywords

corrugated graphene-oxide (GO) diaphragmFabry–Perot (F–P) acoustic sensormechanical sensitivityvoice recognition

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Nano Research
Volume 17 Issue 8,
August 2024
Pages 7593-7602
DOI: 10.1007/s12274-024-6686-2
Cite this article:
Liu Y, Li C, Yu L, et al. Ultra-high sensitivity fiber optic microphone with corrugated graphene-oxide diaphragm for voice recognition. Nano Research, 2024, 17(8): 7593-7602. https://doi.org/10.1007/s12274-024-6686-2
Topics:
Fiber optic sensorsGraphene oxide

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Received: 14 February 2024
Revised: 22 March 2024
Accepted: 04 April 2024
Published: 30 May 2024
© Tsinghua University Press 2024
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