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Research Article | Open Access

Adhesive and corrosive wear at microscales in different vapor environments

Sihan SHEN, Yonggang MENG*( )
State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
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Abstract

Adhesive and corrosive wear at microscales are quantitatively distinguished in lifetime tests of resonant bulk-fabricated silicon microelectromechanical systems (MEMS). By analyzing the oscillation decay characteristics in different vapor environments, we find that wear is dominated by asperity adhesion during the initial stages of rubbing in dry N2 or O2/N2 mixtures; in these situations the transient wear rate is inversely proportional to the wear depth. But in water or ethanol vapors, chemical reactions between the corrosive adsorbed layer and the silicon substrate limit the wear rate to a constant. These observations are consistent with atomic explanations. The differences between adhesive and corrosive wear explain the advantages offered by lubricating with alcohol vapors rather than using dry environments for tribo-MEMS devices. Compared to ethanol, the relatively poor anti-wear effect of water vapor is explained by aggressive and rapid tribo-reactions.

Keywords

adhesive wearcorrosive wearmicroelectromechanical systems (MEMS)

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Friction
Volume 1 Issue 1,
March 2013
Pages 72-80
DOI: 10.1007/s40544-013-0006-2
Cite this article:
SHEN S, MENG Y. Adhesive and corrosive wear at microscales in different vapor environments. Friction, 2013, 1(1): 72-80. https://doi.org/10.1007/s40544-013-0006-2

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Received: 24 December 2012
Revised: 18 February 2013
Accepted: 20 February 2013
Published: 26 March 2013
© The author(s) 2013

This article is published with open access at Springerlink.com

Open Access: This article is distributed under the terms of the Creative Commons Attribution Noncommercial License which permits any noncommercial use, distri- bution, and reproduction in any medium, provided the original author(s) and source are credited.
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