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Research Article | Open Access

MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration

Zilian Qia,1, Tianwei Zhanga,1, Xiao-Dong Zhangb( ), Qing Xua, Kun Caoa( ), Rong Chena ( )
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China
State Key Laboratory of Materials Processing and Die & Mold Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China

1 These authors contributed equally to this work.

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Abstract

The flexible pressure sensor has been credited for leading performance including higher sensitivity, faster response/recovery, wider detection range and higher mechanical durability, thus driving the development of novel sensing materials enabled by new processing technologies. Using atomic layer infiltration, Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene, allowing a modulation of its interlayer spacing, electrical conductivity and piezoresistive property. The flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper substrate. It is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor, including increase of sensitivity from 0.08 ​kPa−1 to 0.5 ​kPa−1, extension of detection limit from 5 ​kPa to 9 ​kPa, decrease of response time from 200 ​ms to 20 ​ms, and reduction of recovery time from 230 ​ms to 50 ​ms. The mechanical durability of the flexible sensor is also improved, with the piezoresistive performance stable over 1000 cycles of flexure fatigue. The atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications.

Keywords

Atomic layer depositionMXeneFlexible pressure sensorPt infiltrationPiezoresistive

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Nano Materials Science
Volume 5 Issue 4,
December 2023
Pages 439-446
DOI: 10.1016/j.nanoms.2022.10.003
Cite this article:
Qi Z, Zhang T, Zhang X-D, et al. MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration. Nano Materials Science, 2023, 5(4): 439-446. https://doi.org/10.1016/j.nanoms.2022.10.003

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Received: 11 August 2022
Accepted: 07 October 2022
Published: 25 October 2022
© 2022 Chongqing University.

This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
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