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Paper | Open Access

Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer

Yoshiki Nakata1 , Eiki Hayashi1, Koji Tsubakimoto1, Noriaki Miyanaga2, Aiko Narazaki3, Tatsuya Shoji4, Yasuyuki Tsuboi4
Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan
Institute for Laser Technology, 1-8-4 Utsubo-honmachi, Nishi-ku, Osaka 550-0004, Japan
National Institute of Advanced Industrial Science and Technology, Chuo 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
Department of Chemistry, Osaka City University, 3-3-138, Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
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Abstract

Laser-induced forward transfer (LIFT) is a direct-writing technique capable of depositing a single dot smaller than the laser wavelength at small shot energy through the laser-induced dot transfer (LIDT) technique. To deposit a single nanodot in a single shot of laser irradiation, a liquid nanodrop is transferred from donor to receiver and finally solidified via a solid–liquid–solid (SLS) process. In conventional LIDT experiments, multi-shots with step scanning have been used to form array structures. However, interference laser processing can achieve an arrayed process and generate a periodic structure in a single shot. In this study, a femtosecond laser interference pattern was first applied to LIDT, and an array of nanodots was successfully deposited in a single shot, producing the following unit structures: a single dot, adjoining dots, and stacking dots. The diameter of the smallest nanodot was 355 nm, and the narrowest gap between two adjoining nanodots was 17.2 nm. The LIDT technique produces high-purity, catalyst-free that do not require post-cleaning or alignment processes. Given these significant advantages, LIDT can expand the usability of nanodots in a wide range of fields.

Keywords

interference laser processinglaser-induced dot transfernanodotarrayfemtosecond lasersolid–liquid–solid mechanismAu

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International Journal of Extreme Manufacturing
Volume 2 Issue 2,
June 2020
Pages 025101-025101
DOI: 10.1088/2631-7990/ab88bf
Cite this article:
Nakata Y, Hayashi E, Tsubakimoto K, et al. Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer. International Journal of Extreme Manufacturing, 2020, 2(2): 025101. https://doi.org/10.1088/2631-7990/ab88bf
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