Atomic layer deposition to heterostructures for application in gas sensors

Lei G L, Lou C M, Liu X H, Xie J Y, Li Z S, Zheng W and Zhang J 2021 Thin films of tungsten oxide materials for advanced gas sensors Sens. Actuators B 341 129996

Qu F D, Yuan Y and Yang M H 2017 Programmed synthesis of Sn₃N₄ nanoparticles via a soft chemistry approach with urea: application for ethanol vapor sensing Chem. Mater. 29 969–74

Cheng Z X, Qi W L, Pang C H, Thomas T, Wu T, Liu S Q and Yang M H 2021 Recent advances in transition metal nitride-based materials for photocatalytic applications Adv. Funct. Mater. 31 2100553

Raza M H, Movlaee K, Leonardi S G, Barsan N, Neri G and Pinna N 2020 Gas sensing of NiO–SCCNT core-shell heterostructures: optimization by radial modulation of the hole-accumulation layer Adv. Funct. Mater. 30 1906874

Raza M H, Movlaee K, Wu Y L, El-Refaei S M, Karg M, Leonardi S G, Neri G and Pinna N 2019 Tuning the NiO thin film morphology on carbon nanotubes by atomic layer deposition for enzyme-free glucose sensing ChemElectroChem 6 383–92

Yuan Y, Wang J C, Adimi S, Shen H J, Thomas T, Ma R G, Attfield J P and Yang M H 2020 Zirconium nitride catalysts surpass platinum for oxygen reduction Nat. Mater. 19 282–6

Fan X X, Xu Y J, Ma C Y and He W M 2021 In-situ growth of Co₃O₄ nanoparticles based on electrospray for an acetone gas sensor J. Alloys Compd. 854 157234

Chen X X, Shen Y B, Zhou P F, Zhao S K, Zhong X X, Li T T, Han C, Wei D Z and Meng D 2019 NO₂ sensing properties of one-pot-synthesized ZnO nanowires with Pd functionalization Sens. Actuators B 280 151–61

Ren Y, Zou Y D, Liu Y, Zhou X R, Ma J H, Zhao D Y, Wei G F, Ai Y J, Xi S B and Deng Y H 2020 Synthesis of orthogonally assembled 3D cross-stacked metal oxide semiconducting nanowires Nat. Mater. 19 203–11

Li Q C, Chen D, Miao J M, Lin S J, Yu Z X, Cui D X, Yang Z and Chen X P 2021 Highly sensitive sensor based on ordered porous ZnO nanosheets for ethanol detecting application Sens. Actuators B 326 128952

Shendage S S, Patil V L, Vanalakar S A, Patil S P, Harale N S, Bhosale J L, Kim J H and Patil P S 2017 Sensitive and selective NO₂ gas sensor based on WO₃ nanoplates Sens. Actuators B 240 426–33

Wang S R, Yang J D, Zhang H X, Wang Y S, Gao X L, Wang L W and Zhu Z Y 2015 One-pot synthesis of 3D hierarchical SnO₂ nanostructures and their application for gas sensor Sens. Actuators B 207 83–89

Lou C M, Lei G L, Liu X H, Xie J Y, Li Z S, Zheng W, Goel N, Kumar M and Zhang J 2022 Design and optimization strategies of metal oxide semiconductor nanostructures for advanced formaldehyde sensors Coord. Chem. Rev. 452 214280

Yu Q et al 2022 Bimetallic MOFs-derived core-shell structured mesoporous Sn-doped NiO for conductometric ppb-level xylene gas sensors Sens. Actuators B 372 132620

Gong H M, Zhao C H and Wang F 2018 On-chip growth of SnO₂/ZnO core-shell nanosheet arrays for ethanol detection IEEE Electron Device Lett. 39 1065–8

Pan H Y, Li Z S, Lou C M, Lei G L, Xie J Y, Zheng W, Liu X H and Zhang J 2022 Anchoring Fe₂O₃ nanosheets on NiO nanoprisms to regulate the electronic properties for improved n-butanol detection Sens. Actuators B 354 131223

George S M 2010 Atomic layer deposition: an overview Chem. Rev. 110 111–31

Ritala M, Leskelä M, Dekker J P, Mutsaers C, Soininen P J and Skarp J 1999 Perfectly conformal TiN and Al₂O₃ films deposited by atomic layer deposition Chem. Vapor Depos. 5 7–9

Suntola T 1992 Atomic layer epitaxy Thin Solid Films 216 84–89

George S M, Ott A W and Klaus J W 1996 Surface chemistry for atomic layer growth J. Phys. Chem. 100 13121–31

Xu Y S, Zheng L L, Yang C, Zheng W, Liu X H and Zhang J 2020 Chemiresistive sensors based on core-shell ZnO@TiO₂ nanorods designed by atomic layer deposition for n-butanol detection Sens. Actuators B 310 127846

Sysoev V V, Button B K, Wepsiec K, Dmitriev S and Kolmakov A 2006 Toward the nanoscopic ”electronic nose”: hydrogen vs carbon monoxide discrimination with an array of individual metal oxide nano- and mesowire sensors Nano Lett. 6 1584–8

Mai L et al 2020 From precursor chemistry to gas sensors: plasma-enhanced atomic layer deposition process engineering for zinc oxide layers from a nonpyrophoric zinc precursor for gas barrier and sensor applications Small 16 1907506

Liu B, Alamri M, Walsh M, Doolin J L, Berrie C L and Wu J Z 2020 Development of an ALD-Pt@SWCNT/graphene 3D nanohybrid architecture for hydrogen sensing ACS Appl. Mater. Interfaces 12 53115–24

Weber M, Graniel O, Balme S, Miele P and Bechelany M 2019 On the use of MOFs and ALD layers as nanomembranes for the enhancement of gas sensors selectivity Nanomaterials 9 1552

Li Z S, Lou C M, Lei G L, Lu G C, Pan H Y, Liu X H and Zhang J 2022 Atomic layer deposition of Rh/ZnO nanostructures for anti-humidity detection of trimethylamine Sens. Actuators B 355 131347

Duy L T, Kang H, Shin H C, Han S, Singh R and Seo H 2021 Multifunctional nanohybrid of alumina and indium oxide prepared using the atomic layer deposition technique ACS Appl. Mater. Interfaces 13 59115–25

Song Y G, Baek I H, Yim J G, Eom T, Chung T M, Lee C H, Hwang C S, Kang C Y and Kim S K 2022 Cross-linked structure of self-aligned p-type SnS nanoplates for highly sensitive NO₂ detection at room temperature J. Mater. Chem. A 10 4711–9

Xu Y S, Zheng W, Liu X H, Zhang L Q, Zheng L L, Yang C, Pinna N and Zhang J 2020 Platinum single atoms on tin oxide ultrathin films for extremely sensitive gas detection Mater. Horiz. 7 1519–27

Hu Q M, Ma Z H, Yang J, Gao T G, Wu Y, Dong Z, Li X Y, Zeng W, Zhao S C and Xu J Q 2021 Ultrathin PANI-decorated, highly purified and well dispersed array cncs for highly sensitive HCHO sensors Chemosensors 9 276

Lei G L, Pan H Y, Mei H S, Liu X H, Lu G C, Lou C M, Li Z S and Zhang J 2022 Emerging single atom catalysts in gas sensors Chem. Soc. Rev. 51 7260–80

Fonseca J and Lu J L 2021 Single-atom catalysts designed and prepared by the atomic layer deposition technique ACS Catal. 11 7018–59

Pinna N and Knez M 2012 Atomic Layer Deposition of Nanostructured Materials (Weinheim: Wiley) (https://doi.org/10.1002/9783527639915)

Marichy C, Bechelany M and Pinna N 2012 Atomic layer deposition of nanostructured materials for energy and environmental applications Adv. Mater. 24 1017–32

Johnson R W, Hultqvist A and Bent S F 2014 A brief review of atomic layer deposition: from fundamentals to applications Mater. Today 17 236–46

Leskelä M and Ritala M 2003 Atomic layer deposition chemistry: recent developments and future challenges Angew. Chem., Int. Ed. 42 5548–54

Cremers V, Puurunen R L and Dendooven J 2019 Conformality in atomic layer deposition: current status overview of analysis and modelling Appl. Phys. Rev. 6 021302

Chalker P R 2016 Photochemical atomic layer deposition and etching Surf. Coat. Technol. 291 258–63

Poodt P, Knaapen N, Illiberi A, Roozeboom F and van Asten A 2012 Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics J. Vac. Sci. Technol. A 30 01A142

Hong T, Kim K, Choi S H, Lee S H, Han K L, Lim J H and Park J S 2022 Structural, optical, and electrical properties of InO_x thin films deposited by plasma-enhanced atomic layer deposition for flexible device applications ACS Appl. Electron. Mater. 4 3010–7

Oviroh P O, Akbarzadeh R, Pan D Q, Coetzee R A M and Jen T C 2019 New development of atomic layer deposition: processes, methods and applications Sci. Technol. Adv. Mater. 20 465–96

Parsons G N, George S M and Knez M 2011 Progress and future directions for atomic layer deposition and ALD-based chemistry MRS Bull. 36 865–71

Ali K, Choi K H and Muhammad N M 2014 Roll‐to‐roll atmospheric atomic layer deposition of Al₂O₃ thin films on PET substrates Chem. Vapor Depos. 20 380–7

Walker J M, Akbar S A and Morris P A 2019 Synergistic effects in gas sensing semiconducting oxide nano-heterostructures: a review Sens. Actuators B 286 624–40

Wang J, Yin Z G, Hermerschmidt F, List-Kratochvil E J W and Pinna N 2021 Impact of different intermediate layers on the morphology and crystallinity of TiO₂ grown on carbon nanotubes by atomic layer deposition Adv. Mater. Interfaces 8 2100759

Gai L, Lai R, Dong X, Wu X, Luan Q, Wang J, Lin H, Ding W, Wu G and Xie W 2022 Recent advances in ethanol gas sensors based on metal oxide semiconductor heterojunctions Rare Met. 41 1818–42

Xu S P, Xu Y, Zhao H P, Xu R and Lei Y 2018 Sensitive gas-sensing by creating adsorption active sites: coating an SnO₂ layer on triangle arrays ACS Appl. Mater. Interfaces 10 29092–9

Li Z J et al 2019 Advances in designs and mechanisms of semiconducting metal oxide nanostructures for high-precision gas sensors operated at room temperature Mater. Horiz. 6 470–506

Lou C M, Wang K, Mei H S, Xie J Y, Zheng W, Liu X H and Zhang J 2021 ZnO nanoarrays via a thermal decomposition–deposition method for sensitive and selective NO₂ detection CrystEngComm 23 3654–63

Bai J L, Luo Y B, An B X, Wang Q, Cheng X, Li J P, Pan X J, Zhou J Y, Wang Y R and Xie E Q 2020 Ni/Au bimetal decorated In₂O₃ nanotubes for ultra-sensitive ethanol detection Sens. Actuators B 311 127938

Kim J H, Lee J H, Kim J Y, Mirzaei A, Kim H W and Kim S S 2019 Enhancement of CO and NO₂ sensing in n–SnO₂–p–Cu₂O core-shell nanofibers by shell optimization J. Hazards Mater. 376 68–82

Han C H, Li X W, Shao C L, Li X H, Ma J G, Zhang X T and Liu Y C 2019 Composition-controllable p–CuO/n–ZnO hollow nanofibers for high-performance H₂S detection Sens. Actuators B 285 495–503

Hu Q M, Wu C X, Dong Z, Zhang G X, Ma Z H, Wang X H, Sun S H and Xu J Q 2022 Direct confirmation of confinement effects by NiO confined in helical SnO₂ nanocoils and its application in sensors J. Mater. Chem. A 10 2786–94

Lu G C, Liu X H, Zheng W, Xie J Y, Li Z S, Lou C M, Lei G L and Zhang J 2022 UV-activated single-layer WSe₂ for highly sensitive NO₂ detection Rare Met. 41 1520–8

Xu Y S, Xie J Y, Zhang Y F, Tian F H, Yang C, Zheng W, Liu X H, Zhang J and Pinna N 2021 Edge-enriched WS₂ nanosheets on carbon nanofibers boosts NO₂ detection at room temperature J. Hazards Mater. 411 125120

Kim H J and Lee J H 2014 Highly sensitive and selective gas sensors using p-type oxide semiconductors: overview Sens. Actuators B 192 607–27

Hong Y, Kim C H, Shin J, Kim K Y, Kim J S, Hwang C S and Lee J H 2016 Highly selective ZnO gas sensor based on MOSFET having a horizontal floating-gate Sens. Actuators B 232 653–9

Lin Y H, Hsueh Y C, Lee P S, Wang C C, Wu J M, Perng T P and Shih H C 2011 Fabrication of tin dioxide nanowires with ultrahigh gas sensitivity by atomic layer deposition of platinum J. Mater. Chem. 21 10552–8

Abe H, Kimura Y, Ma T, Tadaki D, Hirano-Iwata A and Niwano M 2020 Response characteristics of a highly sensitive gas sensor using a titanium oxide nanotube film decorated with platinum nanoparticles Sens. Actuators B 321 128525

Zhou T and Zhang T 2021 Recent progress of nanostructured sensing materials from 0D to 3D: overview of structure-property-application relationship for chemiresistive gas sensors Small Method 5 2100515

Miller D R, Akbar S A and Morris P A 2014 Nanoscale metal oxide-based heterojunctions for gas sensing: a review Sens. Actuators B 204 250–72

Zheng L L, Xie J Y, Liu X H, Yang C, Zheng W and Zhang J 2020 Unveiling the electronic interaction in ZnO/PtO/Pt nanoarrays for catalytic detection of triethylamine with ultrahigh sensitivity ACS Appl. Mater. Interfaces 12 46267–76

Darmadi I, Nugroho F A A and Langhammer C 2020 High-performance nanostructured palladium-based hydrogen sensors-current limitations and strategies for their mitigation ACS Sens. 5 3306–27

Favier F, Walter E C, Zach M P, Benter T and Penner R M 2001 Hydrogen sensors and switches from electrodeposited palladium mesowire arrays Science 293 2227–31

Jo M S, Kim K H, Choi K W, Lee J S, Yoo J Y, Kim S H, Jin H, Seo M H and Yoon J B 2022 Wireless and linear hydrogen detection up to 4% with high sensitivity through phase-transition-inhibited Pd nanowires ACS Nano 16 11957–67

Lei G L, Lou C M, Li Z S, Xie J Y, Lu G C, Pan H Y, Mei H S, Liu X H and Zhang J 2022 Heterogeneous Co₃O₄/AgO nanorods for conductometric triethylamine sensing at 90 ℃ Sens. Actuators B 351 131005

Liu C, Wang B Q, Liu T, Sun P, Gao Y, Liu F M and Lu G Y 2016 Facile synthesis and gas sensing properties of the flower-like NiO-decorated ZnO microstructures Sens. Actuators B 235 294–301

Al-Hashem M, Akbar S and Morris P 2019 Role of oxygen vacancies in nanostructured metal-oxide gas sensors: a review Sens. Actuators B 301 126845

Romanov R I, Kozodaev M G, Lebedinskii Y Y, Perevalov T V, Slavich A S, Hwang C S and Markeev A M 2020 Radical-enhanced atomic layer deposition of a tungsten oxide film with the tunable oxygen vacancy concentration J. Phys. Chem. C 124 18156–64

Park K and Lee J S 2016 Reliable resistive switching memory based on oxygen-vacancy-controlled bilayer structures RSC Adv. 6 21736–41

Martínez-Puente M A, Horley P, Aguirre-Tostado F S, López-Medina J, Borbón-Nuñez H A, Tiznado H, Susarrey-Arce A and Martínez-Guerra E 2022 ALD and PEALD deposition of HfO₂ and its effects on the nature of oxygen vacancies Mater. Sci. Eng. B 285 115964

Bae G, Kim M, Lee A, Ji S, Jang M, Yim S, Song W, Lee S S, Yoon D H and An K S 2022 Nanometric lamination of zinc oxide nanofilms with gold nanoparticles for self-perceived periodontal disease sensors Composites B 230 109490

Choi K I, Hwang S J, Dai Z F, Chan Kang Y and Lee J H 2014 Rh-catalyzed WO₃ with anomalous humidity dependence of gas sensing characteristics RSC Adv. 4 53130–6

Chinh N D, Hien T T, Do Van L, Hieu N M, Quang N D, Lee S M, Kim C and Kim D 2019 Adsorption/desorption kinetics of nitric oxide on zinc oxide nano film sensor enhanced by light irradiation and gold-nanoparticles decoration Sens. Actuators B 281 262–72

Xu Y S, Lou C M, Zheng L L, Zheng W, Liu X H, Kumar M and Zhang J 2020 Highly sensitive and selective detection of acetone based on platinum sensitized porous tungsten oxide nanospheres Sens. Actuators B 307 127616

Weber M, Kim J H, Lee J H, Kim J Y, Iatsunskyi I, Coy E, Drobek M, Julbe A, Bechelany M and Kim S S 2018 High-performance nanowire hydrogen sensors by exploiting the synergistic effect of Pd nanoparticles and metal-organic framework membranes ACS Appl. Mater. Interfaces 10 34765–73

Kim J H, Mirzaei A, Kim H W and Kim S S 2017 Extremely sensitive and selective sub-ppm CO detection by the synergistic effect of Au nanoparticles and core-shell nanowires Sens. Actuators B 249 177–88

Weber M, Kim J Y, Lee J H, Kim J H, Iatsunskyi I, Coy E, Miele P, Bechelany M and Kim S S 2019 Highly efficient hydrogen sensors based on Pd nanoparticles supported on boron nitride coated ZnO nanowires J. Mater. Chem. A 7 8107–16

Kondalkar V V, Duy L T, Seo H and Lee K 2019 Nanohybrids of Pt-functionalized Al₂O₃/ZnO core shell nanorods for high -performance MEMS-based acetylene gas sensor ACS Appl. Mater. Interfaces 11 25891–900

Lupan O et al 2018 Ultra-thin TiO₂ films by atomic layer deposition and surface functionalization with Au nanodots for sensing applications Mater. Sci. Semicond. Process. 87 44–53

Ko W C, Kim K M, Kwon Y J, Choi H, Park J K and Jeong Y K 2020 ALD-assisted synthesis of V₂O₅ nanoislands on SnO₂ nanowires for improving NO₂ sensing performance Appl. Surf. Sci. 509 144821

Lou C M, Pan H Y, Mei H S, Lu G C, Liu X H and Zhang J 2022 Low coordination states in Co₃O₄/NiO_x heterostructures by atomic layer deposition for enhanced gas detection Chem. Eng. J. 448 137641

Xie J Y, Liu X H, Jing S L, Pang C, Liu Q S and Zhang J 2021 Chemical and electronic modulation via atomic layer deposition of NiO on porous In₂O₃ films to boost NO₂ detection ACS Appl. Mater. Interfaces 13 39621–32

Lou C M, Huang Q X, Li Z S, Lei G L, Liu X H and Zhang J 2021 Fe₂O₃-sensitized SnO₂ nanosheets via atomic layer deposition for sensitive formaldehyde detection Sens. Actuators B 345 130429

Yuan K P, Zhu L Y, Yang J H, Hang C Z, Tao J J, Ma H P, Jiang A Q, Zhang D W and Lu H L 2020 Precise preparation of WO₃@SnO₂ core shell nanosheets for efficient NH₃ gas sensing J. Colloid Interface Sci. 568 81–88

Kei C C, Wang C C and Perng T P 2021 Modulation of wall thickness of Al-doped ZnO nanotubes by nanolamination of atomic layer deposition for oxygen sensing J. Am. Ceram. Soc. 104 4938–45

Kim J H, Katoch A and Kim S S 2016 Optimum shell thickness and underlying sensing mechanism in p-n CuO–ZnO core-shell nanowires Sens. Actuators B 222 249–56

Raza M H, Kaur N, Comini E and Pinna N 2021 SnO₂–SiO₂ 1D core-shell nanowires heterostructures for selective hydrogen sensing Adv. Mater. Interfaces 8 2100939

Kim J H, Mirzaei A, Bang J H, Kim H W and Kim S S 2021 Achievement of self-heated sensing of hazardous gases by WS₂ (core)–SnO₂ (shell) nanosheets J. Hazards Mater. 412 125196

Xue X T, Zhu L Y, Yuan K P, Zeng C, Li X X, Ma H P, Lu H L and Zhang D W 2020 ZnO branched p–Cu_xO @n–ZnO heterojunction nanowires for improving acetone gas sensing performance Sens. Actuators B 324 128729

Kim J H, Mirzaei A, Kim H W and Kim S S 2020 Variation of shell thickness in ZnO–SnO₂ core-shell nanowires for optimizing sensing behaviors to CO, C₆H₆, and C₇H₈ gases Sens. Actuators B 302 127150

Raza M H, Di Chio R, Movlaee K, Amsalem P, Koch N, Barsan N, Neri G and Pinna N 2022 Role of heterojunctions of core-shell heterostructures in gas sensing ACS Appl. Mater. Interfaces 14 22041–52

Wei Z H, Akbari M K, Hai Z Y, Ramachandran R K, Detavernier C, Verpoort F, Kats E, Xu H Y, Hu J and Zhuiykov S 2019 Ultra-thin sub-10 nm Ga₂O₃–WO₃ heterostructures developed by atomic layer deposition for sensitive and selective C₂H₅OH detection on ppm level Sens. Actuators B 287 147–56

Mirzaei A, Park S, Kheel H, Sun G J, Lee S and Lee C 2016 ZnO-capped nanorod gas sensors Ceram. Int. 42 6187–97

Zhao C H, Bai J L, Gong H M, Liu S and Wang F 2018 Tailorable morphology of core-shell nanofibers with surface wrinkles for enhanced gas-sensing properties ACS Appl. Nano Mater. 1 6357–67

Raza M H, Kaur N, Comini E and Pinna N 2020 Toward optimized radial modulation of the space-charge region in one-dimensional SnO₂–NiO core-shell nanowires for hydrogen sensing ACS Appl. Mater. Interfaces 12 4594–606

Byoun Y, Jin C and Choi S W 2020 Strategy for sensitive and selective NO₂ detection at low temperatures utilizing p-type TeO₂ nanowire-based sensors by formation of discrete n-type ZnO nanoclusters Ceram. Int. 46 19365–74

Bakos L P et al 2020 Photocatalytic and gas sensitive multiwalled carbon nanotube/TiO₂–ZnO and ZnO–TiO₂ composites prepared by atomic layer deposition Nanomaterials 10 252

Yang F, Zhu J Y, Zou X S, Pang X, Yang R Z, Chen S F, Fang Y, Shao T, Luo X and Zhang L 2018 Three-dimensional TiO₂/SiO₂ composite aerogel films via atomic layer deposition with enhanced H₂S gas sensing performance Ceram. Int. 44 1078–85

Wang L L, Jiang K and Shen G Z 2021 Wearable, implantable, and interventional medical devices based on smart electronic skins Adv. Mater. Technol. 6 2100107

Gao W, Ota H, Kiriya D, Takei K and Javey A 2019 Flexible electronics toward wearable sensing Acc. Chem. Res. 52 523–33