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Research Article | Open Access | Just Accepted

Direct photopatterning of perovskite nanocrystal films for building pixelated photodetector arrays

Hannikezi Abudukeremu1,§Guan-Hua Dun2,§Hengwei Qiu1Dan Liu1Fu Li3Song Wang1Junyang Hou1Wangyu Liu1Mingfeng Cai1Tian-Ling Ren2()Hao Zhang1()Jinghong Li1()

1 Department of Chemistry, Center for BioAnalytical Chemistry, Key Laboratory of Bioorganic Phosphorus Chemistry & Chemical Biology (Ministry of Education), Tsinghua University, Beijing 100084, China

2 School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China

3 State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

§ Hannikezi Abudukeremu and Guan-Hua Dun contributed equally to this work.

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Abstract

Metal halide-based perovskites, with their exceptional photoelectric conversion efficiency, are promising materials for photodetectors and image sensors. Achieving high-definition optical imaging requires not only high-quality perovskite materials but also effective patterning methods. Here, we show the fabrication of pixelated photodetector arrays through a two-step process: (1) direct optical patterning of CsPbBr3 perovskite nanocrystal films using ligand cross-linkers, and (2) post-patterning ligand-exchange process. The direct optical patterning achieves high-resolution (≈2 μm in pixel sizes), uniform CsPbBr3 nanocrystal film patterns over 2-inch wafers. The ligand-exchange process replaces the long hydrocarbon ligands and cross-linkers with compact ionic ligands, which enhance the charge transport efficacy without compromising the quality of the patterned films. Consequently, the patterned photodetectors, in the photoconductor configuration, show responsivity (0.11 A W−1) and specific detectivity (1.81×1011 Jones) on par with their non-patterned counterparts. These features permit the creation of pixelated photodetector arrays that minimize the charge-sharing crosstalk effect and enable improved imaging capabilities. This work shows a promising approach in building high-performance perovskite image sensors.

Nano Research
Cite this article:
Abudukeremu H, Dun G-H, Qiu H, et al. Direct photopatterning of perovskite nanocrystal films for building pixelated photodetector arrays. Nano Research, 2025, https://doi.org/10.26599/NR.2025.94907279
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