Laser-liquid composite micromachining technologies: A review of research progress
Abstract
Laser micromachining technology is widely used in various industrial fields because of its high machining accuracy, high machining flexibility, and low machining cost. However, the existence of thermal effects and recast layers on the machining surface has limited the further development of this technology. To improve the machining quality, laser-liquid composite micromachining technologies flourish, which has achieved brilliant results in recent years. Laser-liquid composite micromachining technology achieves improvement in surface quality and machining efficiency through the effects of cooling, flushing, dissolution and so on. This paper reviews the current research status of laser-liquid micromachining, mainly including the water guided laser machining technology, underwater laser ablation technology, water jet assisted laser machining technology, and laser-electrochemical composite machining. The mechanism of composite machining and the material removal process under the coupling of multiple energy fields are discussed. The existing problems and future development trends in various composite machining technologies are summarized.
Keywords
References
Lorenz P, Zajadacz J, Bayer L, et al. Nanodrilling of fused silica using nanosecond laser radiation. Appl Surf Sci 2015;351:935-945.
Li JX, Hu XB, Yang Y. Development and application of micro manufacturing technology. Modern Machinery 2007;4:76-78.
Xiong YF, Wang WH, Shi YY, et al. Machining performance of in-situ tib 2 particle reinforced al-based metal matrix composites: A literature review. J Adv Manuf Science Technol 2021;1(2):2021003.
Dang XB, Wan M, Yang Y. Prediction and suppression of chatter in milling of structures with low-rigidity: A review. J Adv Manuf Science Technol 2021;1(3):2021010.
Sharma A, Yadava V. Experimental analysis of nd-yag laser cutting of sheet materials-a review. Opt Laser Technol 2018;98:264-280.
Pandey AK, Dubey AK. Simultaneous optimization of multiple quality characteristics in laser cutting of titanium alloy sheet. Opt Laser Technol 2012;44(6):1858-1865.
Kanyilmaz A. The problematic nature of steel hollow section joint fabrication, and a remedy using laser cutting technology: A review of research, applications, opportunities. Eng Struct 2019;183:1027-1048.
Herzog D, Jaeschke P, Meier O, et al. Investigations on the thermal effect caused by laser cutting with respect to static strength of cfrp. Int J Mach Tools Manuf 2008;48(12-13):1464-1473.
Niu JB, Xu JT, Ren F, et al. A short review on milling dynamics in low-stiffness cutting conditions: Modeling and analysis. J Adv Manuf Science Technol 2021;1(1):2020004.
Xiao GJ, Zhang YD, Huang Y, et al. Grinding mechanism of titanium alloy: Research status and prospect. J Adv Manuf Science Technol 2021;1(1):4496-4496.
Zhang Y, Li W, Tang L, et al. Abrasive water jet tool passivation: From mechanism to application. J Adv Manuf Science Technol 2022; 3(1):2022018.
Wang X, Ding WF, Zhao B. A review on machining technology of aero-engine casings. J Adv Manuf Science Technol 2022;2(3):2022011.
Pei HN, Zhou WJ, Zhang PY, et al. A review of point set registration: From fundamental algorithms to geometric quality inspection of aviation complex parts. J Adv Manuf Science Technol 2023;3(4):2023012.
Naeem M. Laser processing of reflective materials: A new technology managing reflection effects. Laser Tech J 2013;10(1):18-20.
Li TX, Shi TL, Tang ZR, et al. Real-time tool wear monitoring using thin-film thermocouple. J Mater Process Technol 2021;288:116901.
Li K, Xie Y, Liang L, et al. Wetting behavior investigation of a complex surface prepared by laser processing combined with carbon films coating. Surf Coat Technol 2019;378:124989.
Liu YN, Ding Y, Yang LJ, et al. Research and progress of laser cladding on engineering alloys: A review. J Manuf Processes 2021;66:341-363.
Yuan W, Li R, Chen Z, et al. A comparative study on microstructure and properties of traditional laser cladding and high-speed laser cladding of ni45 alloy coatings. Surf Coat Technol 2021;405:126582.
Weng F, Chen CZ, Yu HJ. Research status of laser cladding on titanium and its alloys: A review. Materials & Design 2014;58:412-425.
Tamanna N, Crouch R, Naher S. Progress in numerical simulation of the laser cladding process. Opt Lasers Eng 2019;122:151-163.
Sexton L, Lavin S, Byrne G, et al. Laser cladding of aerospace materials. J Mater Process Technol 2002;122(1):63-68.
Zhu LD, Xue PS, Lan Q, et al. Recent research and development status of laser cladding: A review. Opt Laser Technol 2021;138:106915.
Maharjan N, Zhou W, Zhou Y, et al. Comparative study of laser surface hardening of 50crmo4 steel using continuous-wave laser and pulsed lasers with ms, ns, ps and fs pulse duration. Surf Coat Technol 2019;366:311-320.
Orazi L, Rota A, Reggiani B. Experimental investigation on a novel approach for laser surface hardening modelling. Int J Mech Mater Eng 2021;16(1):1-10.
Moradi M, Karamimoghadam M. High power diode laser surface hardening of aisi 4130; statistical modelling and optimization. Opt Laser Technol 2019;111:554-570.
Soriano C, Leunda J, Lambarri J, et al. Effect of laser surface hardening on the microstructure, hardness and residual stresses of austempered ductile iron grades. Appl Surf Sci 2011;257(16):7101-7106.
Moradi M, Arabi H, Nasab SJ, et al. A comparative study of laser surface hardening of aisi 410 and 420 martensitic stainless steels by using diode laser. Opt Laser Technol 2019;111:347-357.
Dinesh Babu P, Balasubramanian K, Buvanashekaran G. Laser surface hardening: A review. Int J Surf Sci Eng 2011;5(2-3):131-151.
Pakuła D, Staszuk M, Dziekońska M, et al. Laser micro-texturing of sintered tool materials surface. Materials 2019;12(19):3152.
Mirhosseini N, Crouse P, Schmidth M, et al. Laser surface micro-texturing of ti-6al-4v substrates for improved cell integration. Appl Surf Sci 2007;253(19):7738-7743.
Kümmel J, Braun D, Gibmeier J, et al. Study on micro texturing of uncoated cemented carbide cutting tools for wear improvement and built-up edge stabilisation. J Mater Process Technol 2015;215:62-70.
Hua XJ, Sun JG, Zhang PY, et al. Research on discriminating partition laser surface micro-texturing technology of engine cylinder. Tribol Int 2016;98:190-196.
Deshmukh N, Rajurkar A, Kolekar O, et al. Thermal modeling of laser surface micro-texturing: Investigation on effects of laser parameters on dimple-texture dimensions and aspect ratio. Mater Today Proc 2021;46:8374-8380.
Zhang S, Wu CL, Zhang CH, et al. Laser surface alloying of fecocralni high-entropy alloy on 304 stainless steel to enhance corrosion and cavitation erosion resistance. Opt Laser Technol 2016;84:23-31.
Siddiqui AA, Dubey AK. Recent trends in laser cladding and surface alloying. Opt Laser Technol 2021;134:106619.
Zhang S, Wu CL, Yi JZ, et al. Synthesis and characterization of fecocralcu high-entropy alloy coating by laser surface alloying. Surf Coat Technol 2015;262:64-69.
Makuch N, Kulka M, Dziarski P, et al. Laser surface alloying of commercially pure titanium with boron and carbon. Opt Lasers Eng 2014;57:64-81.
Chi YM, Gu GC, Yu HJ, et al. Laser surface alloying on aluminum and its alloys: A review. Opt Lasers Eng 2018;100:23-37.
Luo KY, Lu J, Zhang YD, et al. Effects of laser shock processing on mechanical properties and micro-structure of ansi 304 austenitic stainless steel. Mater Sci Eng, A 2011;528(13-14):4783-4788.
Deng W, Wang C, Lu H, et al. Progressive developments, challenges and future trends in laser shock peening of metallic materials and alloys: A comprehensive review. International Journal of Machine Tools and Manufacture, 2023;191:104061.
Morales M, Porro J, Blasco M, et al. Numerical simulation of plasma dynamics in laser shock processing experiments. Appl Surf Sci 2009;255(10):5181-5185.
Lu JZ, Luo KY, Zhang YK, et al. Grain refinement mechanism of multiple laser shock processing impacts on ansi 304 stainless steel. Acta Mater 2010;58(16):5354-5362.
Wu JJ, Zhao JB, Qiao HC, et al. The application status and development of laser shock processing. Opto-Electron Eng 2018; 45(2):170691-170697.
Wang EM, Hao XZ, He D, et al. Physical prior and tikhonov regularization based residual stress inference method for annular parts using deformation force. J Adv Manuf Science Technol 2023;3(3):2023006.
Teixidor D, Ciurana J, Rodríguez C. Multiobjective optimization of laser milling parameters of microcavities for the manufacturing of des. Mater Manuf Processes 2013;28(12):1370-1378.
Petkov P, Dimov S, Minev R, et al. Laser milling: Pulse duration effects on surface integrity. P I Mech Eng B-J Eng 2008;222(1):35-45.
Campanelli S, Ludovico A, Bonserio C, et al. Experimental analysis of the laser milling process parameters. J Mater Process Technol 2007;191(1-3):220-223.
Campanelli S, Casalino G, Contuzzi N. Multi-objective optimization of laser milling of 5754 aluminum alloy. Opt Laser Technol 2013;52:48-56.
Madhukar YK, Mullick S, Nath AK. A study on co-axial water-jet assisted fiber laser grooving of silicon. J Mater Process Technol 2016;227:200-215.
Li X, Chen YL, Si XD, et al. Laser and laser-liquid composite etching of si wafers. Laser Eng 2022;52(4-6):233-245.
Markauskas E, Zubauskas L, Gečys P. Efficient milling and cutting of borosilicate glasses through a thin flowing water film with a picosecond laser. J Manuf Processes 2021;68:898-909.
Subasi L, Gokler MI, Yaman U. Real-time measurement of laser beam characteristics for a waterjet-guided laser machine. Int J Adv Manuf Technol 2022;122(11-12):4309-4320.
Porter JA, Louhisalmi YA, Karjalainen JA, et al. Cutting thin sheet metal with a water jet guided laser using various cutting distances, feed speeds and angles of incidence. Int J Adv Manuf Technol 2007;33: 961-967.
Mullick S, Madhukar YK, Roy S, et al. Performance optimization of water-jet assisted underwater laser cutting of aisi 304 stainless steel sheet. Opt Lasers Eng 2016;83:32-47.
Elkington H, Marimuthu S, Smith B. High power water jet guided laser drilling of angular holes through nickel superalloy. Procedia CIRP 2022;111:750-753.
Adelmann B, Ngo C, Hellmann R. High aspect ratio cutting of metals using water jet guided laser. Int J Adv Manuf Technol 2015;80(9-12):2053-2060.
Wang S, Ding Y, Li Y, et al. Investigations on the water-jet guided laser scribing of thermal barrier coated ic21 nickel-based superalloy. Opt Laser Technol 2024;170:110155.
Nikolić V, Petković D, Lazov L, et al. Selection of the most influential factors on the water-jet assisted underwater laser process by adaptive neuro-fuzzy technique. Infrared Phys Technol 2016;77:45-50.
Mullick S, Madhukar YK, Roy S, et al. Development and parametric study of a water-jet assisted underwater laser cutting process. Int J Mach Tools Manuf 2013;68:48-55.
Madhukar YK, Mullick S, Nath AK. An investigation on co-axial water-jet assisted fiber laser cutting of metal sheets. Opt Lasers Eng 2016;77:203-218.
Kalyanasundaram D, Shehata G, Neumann C, et al. Design and validation of a hybrid laser/water-jet machining system for brittle materials. J Laser Appl 2008;20(2):127-134.
Zhu XP, Suzuki T, Nakayama T, et al. Underwater laser ablation approach to fabricating monodisperse metallic nanoparticles. Chem Phys Lett 2006;427(1-3):127-131.
Zhang DS, Ranjan B, Tanaka T, et al. Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring. Int J Extrem Manuf 2020;2(1):015001.
Yong J, Chen F, Fang Y, et al. Bioinspired design of underwater superaerophobic and superaerophilic surfaces by femtosecond laser ablation for anti-or capturing bubbles. ACS Appl Mater Interfaces 2017;9(45):39863-39871.
Lu J, Xu RQ, Chen X, et al. Mechanisms of laser drilling of metal plates underwater. J Appl Phys 2004;95(8):3890-3894.
Duangwas S, Tangwarodomnukun V, Dumkum C. Development of an overflow-assisted underwater laser ablation. Mater Manuf Processes 2014;29(10):1226-1231.
Wang Y, Yang F, Zhang W. Development of laser and electrochemical machining based on internal total reflection. J Electrochem Soc 2019;166(14):E481.
Wang YF, Yang F, Zhang GY, et al. Fabrication of deep and small holes by synchronized laser and shaped tube electrochemical machining (laser-stem) hybrid process. Int J Adv Manuf Technol 2019; 105: 2721-2731.
Malik A, Manna A. Study on precision microholes using pulsed laser with jet electrochemical machining. Arab J Sci Eng 2018; 43: 4593-4608.
Malik A, Manna A. Multi-response optimization of laser-assisted jet electrochemical machining parameters based on gray relational analysis. J Braz Soc Mech Sci 2018;40:1-21.
Desilva AK, Pajak P, Harrison DK, et al. Modelling and experimental investigation of laser assisted jet electrochemical machining. CIRP Ann 2004;53(1):179-182.
Zhang YM, Zhang Z, Zhang Y, et al. Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon. J Adv Res 2021;30:39-51.
Versolato OO. Physics of laser-driven tin plasma sources of euv radiation for nanolithography. Plasma Sources Sci Technol 2019; 28(8):083001.
Versolato O, Sheil J, Witte S, et al. Microdroplet-tin plasma sources of euv radiation driven by solid-state-lasers (topical review). J Opt 2022;24(5):054014.
Li XX, Guan YC. Theoretical fundamentals of short pulse laser-metal interaction: A review. Nanotech Precis Eng 2020;3(3):105-125.
Langin TK, Gorman GM, Killian TC. Laser cooling of ions in a neutral plasma. Science 2019;363(6422):61-64.
De Giacomo A, Alrifai R, Gardette V, et al. Nanoparticle enhanced laser ablation and consequent effects on laser induced plasma optical emission. Spectrochim Acta Part B 2020;166:105794.
Ahmed R, Akthar M, Jabbar A, et al. Signal intensity enhancement by cavity confinement of laser-produced plasma. IEEE Trans Plasma Sci 2019;47(3):1616-1620.
Tangwarodomnukun V, Wang J, Mathew P. A comparison of dry and underwater laser micromachining of silicon substrates. Key Eng Mater. 2010; 443: 693-698.
Muhammad N, Whitehead D, Boor A, et al. Comparison of dry and wet fibre laser profile cutting of thin 316l stainless steel tubes for medical device applications. J Mater Process Technol 2010;210(15):2261-2267.
Noll R, Fricke-Begemann C, Brunk M, et al. Laser-induced breakdown spectroscopy expands into industrial applications. Spectrochim Acta Part B 2014;93:41-51.
Li GL, Hu SS, Tang HQ, et al. Laser repeat drilling of alumina ceramics in static water. Int J Adv Manuf Technol 2018;96:2885-2891.
Chen XH, Li X, Song W, et al. Effects of a low-pressure water jet assisting the laser etching of polycrystalline silicon. Appl PhysA 2018;124:1-14.
Zhou GQ, Li CY, Zhang DJ, et al. Overview of underwater transmission characteristics of oceanic lidar. IEEE J-Starts 2021;14:8144-8159.
Shi JL, Xu J, Guo YN, et al. Dependence of stimulated brillouin scattering in water on temperature, pressure, and attenuation coefficient. Phys Rev Appl 2021;15(5):054024.
Shannon G, Mcnaught W, Deans W, et al. High power laser welding in hyperbaric gas and water environments. J Laser Appl 1997;9(3):129-136.
El-Hofy M, El-Hofy H. Laser beam machining of carbon fiber reinforced composites: A review. Int J Adv Manuf Technol 2019;101(9-12):2965-2975.
Chen XH, Xu X, Liu W, et al. Study on the influence of surface temperature field of aluminum alloy etched by laser water jet composite machining. Materials 2020;13(14):3206.
Geng TY, Xu ZY. Electrochemical discharge machining for fabricating holes in conductive materials: A review. J Adv Manuf Science Technol 2021;1(3):2021006.
Sathish T. Experimental investigation of machined hole and optimization of machining parameters using electrochemical machining. J Mater Res Technol 2019;8(5):4354-4363.
Liu GX, Zhang YJ, Natsu W. Influence of electrolyte flow mode on characteristics of electrochemical machining with electrolyte suction tool. Int J Mach Tools Manuf 2019;142:66-75.
El-Hofy H. Vibration-assisted electrochemical machining: A review. Int J Adv Manuf Technol 2019;105(1-4):579-593.
Chen XL, Zhu JJ, Xu ZZ, et al. Modeling and experimental research on the evolution process of micro through-slit array generated with masked jet electrochemical machining. J Mater Process Technol 2021;298:117304.
Xu JY, Hu H, Lei YL. Morphological features of silicon substrate by using different frequency laser ablation in air and water. Appl Surf Sci 2014;317:666-671.
Liu Y, Wei MR, Zhang T, et al. Overview on the development and critical issues of water jet guided laser machining technology. Opt Laser Technol 2021;137:106820.
Huang Y, Liang E, Zhang G, et al. Research on laser beams focusing and coupling technology of water jet guided laser with high adjustment tolerance. Opt Commun 2022;508:127677.
Qiao HC, Cao ZH, Cui JF, et al. Experimental study on water jet guided laser micro-machining of mono-crystalline silicon. Opt Laser Technol 2021;140:107057.
Wu Y, Zhang G, Wang J, et al. The cutting process and damage mechanism of large thickness cfrp based on water jet guided laser processing. Opt Laser Technol 2021;141:107140.
Sun D, Han FZ, Ying WS, et al. Surface integrity of water jet guided laser machining of cfrp. Procedia CIRP 2018;71:71-74.
Sun D, Han FZ, Ying WS. The experimental investigation of water jet-guided laser cutting of cfrp. Int J Adv Manuf Technol 2019;102:719-729.
Liu Q, Zhao YG, Meng JB, et al. Experimental research and optimization of ti-6al-4v alloy microgroove machining based on waterjet-guided high-power laser. Materials 2022;15(21):7430.
Shi Y, Jiang ZL, Cao J, et al. Texturing of metallic surfaces for superhydrophobicity by water jet guided laser micro-machining. Appl Surf Sci 2020;500:144286.
Chao Y, Liu YZ, Xu ZF, et al. Improving superficial microstructure and properties of the laser-processed ultrathin kerf in ti-6al-4v alloy by water-jet guiding. J Mater Sci Technol 2023;156:32-53.
Cao ZH, Qiao HC, Zhang YN, et al. Study on reducing burrs of super alloy through structures in water jet guided laser ablation. J Manuf Processes 2022;77:809-818.
Deng C, Yeo H, Ki H. Electrodynamic simulation of laser beam propagation in waterjet-guided laser processing. Opt Express 2020; 28(8):11128-11143.
Huang YX, Zhao YW, Yang LF, et al. Theoretical study of water jet guided laser technology based on non-uniform electric field deflection water jet. Opt Commun 2019;442:31-39.
Ng EY-K, Guannan D. The stability of 30-μm-diameter water jet for jet-guided laser machining. Int J Adv Manuf Technol 2015;78:939-946.
Liu Q, Zhao YG, Meng JB, et al. Research on the influence of water-laser coupling cavity and nozzle structure on the flow characteristics of water beam fiber. IJST-T Mech Eng 2022;47:363-380.
Liu Q, Zhao YG, Meng JB, et al. Research on the removal mechanism of resin-based coatings by water jet-guided quasi-continuous laser cleaning. Appl Sci 2022;12(11):5450.
Hock K, Adelmann B, Hellmann R. Comparative study of remote fiber laser and water-jet guided laser cutting of thin metal sheets. Physics Procedia 2012;39:225-231.
Muhammad N, Li L. Underwater femtosecond laser micromachining of thin nitinol tubes for medical coronary stent manufacture. Appl PhysA 2012;107:849-861.
Charee W, Tangwarodomnukun V, Dumkum C. Laser ablation of silicon in water under different flow rates. Int J Adv Manuf Technol 2015;78:19-29.
Kruusing A. Underwater and water-assisted laser processing: Part 1—general features, steam cleaning and shock processing. Opt Lasers Eng 2004;41(2):307-327.
Wang WJ, Song HW, Liao K, et al. Water-assisted femtosecond laser drilling of 4h-sic to eliminate cracks and surface material shedding. Int J Adv Manuf Technol 2021;112:553-562.
Liu WD, Wu BX. Nanosecond laser grooving of water-immersed silicon carbide assisted by high intensity focused ultrasound (hifu). J Manuf Processes 2023;105:313-323.
Wang HX, Xu Y, Liu J, et al. Magnet-assisted laser hole-cutting in magnesium alloys with and without water immersion. J Manuf Processes 2021;61:539-560.
Patel D, Singh RP, Thareja RK. Craters and nanostructures with laser ablation of metal/metal alloy in air and liquid. Appl Surf Sci 2014;288:550-557.
Zhou J, Huang YX, Zhao Y, et al. Study on water-assisted laser ablation mechanism based on water layer characteristics. Opt Commun 2019;450:112-121.
Charee W, Tangwarodomnukun V. Dynamic features of bubble induced by a nanosecond pulse laser in still and flowing water. Opt Laser Technol 2018;100:230-243.
Charee W, Tangwarodomnukun V. Laser ablation of silicon in water at different temperatures. Int J Adv Manuf Technol 2020;107:2333-2344.
Hu YH, Ling YH, Zhao F, et al. Enhanced corrosion resistance in accident-tolerant fecral alloy by water-assisted laser surface modification. J Mater Process Technol 2022;306:117640.
Hu T, Yuan S, Wei J, et al. Water jet guided laser grooving of sicf/sic ceramic matrix composites. Opt Laser Technol 2024;168:109991.
Alahmari AM, Ahmed N, Darwish S. Laser beam micro-machining under water immersion. Int J Adv Manuf Technol 2016;83:1671-1681.
Shao K, Zhou QL, Chen QS, et al. Research progress of water-laser compound machining technology. Coatings 2022;12(12):1887.
Li X, Huang S, Tang JP, et al. Effects of laser machining aluminum alloy in different media. Micromachines 2022;13(7):1130.
Bao JD, Long YH, Tong YQ, et al. Experiment and simulation study of laser dicing silicon with water-jet. Appl Surf Sci 2016;387:491-496.
Tangwarodomnukun V, Likhitangsuwat P, Tevinpibanphan O, et al. Laser ablation of titanium alloy under a thin and flowing water layer. Int J Mach Tools Manuf 2015;89:14-28.
Tangwarodomnukun V. Cavity formation and surface modeling of laser milling process under a thin-flowing water layer. Appl Surf Sci 2016;386:51-64.
Tangwarodomnukun V, Khamwiset K, Qi H. Investigation into laser machining of carbon fiber reinforced plastic in a flowing water layer. Int J Adv Manuf Technol 2019;104:3629-3645.
Jiang T, Yang CM, Yu YQ, et al. Water-jet assisted laser cutting of korean pine (pinus koraiensis): Process and parameters optimization. Bioresources 2020;15(2):2540-2549.
Chen XH, Li X, Wu C, et al. Optimization of processing parameters for water-jet-assisted laser etching of polycrystalline silicon. Appl Sci 2019;9(9):1882.
Mullick S, Madhukar YK, Roy S, et al. An investigation of energy loss mechanisms in water-jet assisted underwater laser cutting process using an analytical model. Int J Mach Tools Manuf 2015;91:62-75.
Guo B, Zhang J, Wu MT, et al. Water assisted pulsed laser machining of micro-structured surface on cvd diamond coating tools. J Manuf Processes 2020;56:591-601.
Zhang H, Gao P, Xu JW, et al. Effect of electrochemical dissolving in laser drilling assisted with jet electrochemical machining. Int J Electrochem Sci 2021;16:21056.
Yuan LX, Xu JW, Zhao JS. Experimental investigation on the process of jet electrochemical machining and guided laser beam machining. Key Eng Mater. 2011; 458: 325-330.
Yang Y, Wang YF, Gui YJ, et al. Improving performance of laser and shaped tube electrochemical machining by using retracted hybrid tubular tool electrode. Int J Adv Manuf Technol 2021; 118:1-13.
Saxena KK, Chen X, Qian J, et al. A tool-based precision hybrid laser-electrochemical micromachining process: Process analysis by multidisciplinary simulations and experiments. J Electrochem Soc 2020; 167(14):143502.
Li YL, Wang YF, Yang Y, et al. Study of the influence of conical guide on laser coupling stability in laser and electrochemical machining by optical simulation. Seventeenth National Conference on Laser Technology and Optoelectronics. 2022; 12501:87-96.
Zhang H, Xu JW, Wang JM. Investigation of a novel hybrid process of laser drilling assisted with jet electrochemical machining. Opt Lasers Eng 2009;47(11):1242-1249.
Hu YL, Hao WG, Liu GQ, et al. Research on electrolyte jet assisted laser micromachining technology. J Phys Conf Ser. 2019; 1187(3):032044.
Zhang H, Xu JW. Modeling and experimental investigation of laser drilling with jet electrochemical machining. Chin J Aeronaut 2010;23(4):454-460.
De Silva A, Pajak P, Mcgeough J, et al. Thermal effects in laser assisted jet electrochemical machining. CIRP Ann 2011;60(1):243-246.
Wang YF, Yang Y, Li YL, et al. Profile characteristics and evolution in combined laser and electrochemical machining. J Electrochem Soc 2022;169(9):093505.
Zhang Z, Feng Q, Cai M, et al. Research on stress-etching complex microstructure of aluminum alloy in laser electrochemical machining. Int J Adv Manuf Technol 2015;81:2157-2165.
Xu K, Shen WR, Yang S, et al. Laser-enhanced electrodeposition preparation technology of superhydrophobic micro-nano structure coating. Colloids Surf A 2023;657:130507.
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