Tsinghua Science and Technology Open Access Editor-in-Chief: Jiaguang SUN
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Properties and Morphology of TiN Films Deposited by Atomic Layer Deposition
Siyi Xie, Jian Cai, Qian Wang, [...], Lu Wang, Ziyu Liu << Fewer
Published: 15 April 2014
2014, 19 (2): 144-149
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