Friction Open Access Editor-in-Chief: Jianbin Luo
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Keyword: defects, scratch
Review Article | Open Access
Scratch formation and its mechanism in chemical mechanical planarization (CMP)
Tae-Young KWON, Manivannan RAMACHANDRAN, Jin-Goo PARK
Published: 14 November 2013
2013, 1 (4): 279-305
Total 1