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Keyword: micro-nano bubbles
Research Article | Open Access
Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments
Lei XU, Kihong PARK, Hong LEI, [...], Pengzhan LIU, Eungchul KIM, Yeongkwang CHO, Taesung KIM, Chuandong CHEN << Fewer
Published: 25 March 2023
2023, 11 (9): 1624-1640
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