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Keyword: material removal mode
Research Article | Open Access
Two material removal modes in chemical mechanical polishing: Mechanical plowing vs. chemical bonding
Yuan WU, Liang JIANG, Wenhui LI, [...], Jiaxin ZHENG, Yushan CHEN, Linmao QIAN << Fewer
Published: 15 December 2023
2024, 12 (5): 897-905
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