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Keyword: HfO₂

Research Article

High-fidelity transfer of area-selective atomic layer deposition grown HfO₂ through DNA origami-assisted nanolithography

Xiaowan Yuan, Daiqin Xiao, Wei Yao, [...], Zhihao Zhang, Lin Yang, Liyuan Zhang, Yibo Zeng, Jiaqi Liao, Shanxiong Luo, Chonghao Li, Hong Chen, Xiangmeng Qu << Fewer

Published: 28 February 2022

2022, 15 (6): 5687-5694

Total 1