Friction Open Access Editor-in-Chief: Jianbin Luo
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Keyword: Photocatalysis-assisted chemical mechanical polishing
Research Article | Open Access
Improvement in the planarization of 4H-SiC (0001) achieved by photo-assisted chemical mechanical polishing (P-CMP) using nano TiO2-based composite abrasive with heterostructure
Available online: 23 August 2024
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