This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis (FEA) tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems (MEMS) process. The test results yield sensitivities of 1.033
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Open Access
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Tsinghua Science and Technology 2014, 19(2): 161-167
Published: 15 April 2014
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