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Research Article Issue
Batch fabrication of MoS2 devices directly on growth substrates by step engineering
Nano Research 2023, 16(11): 12794-12799
Published: 02 October 2023
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Monolayer molybdenum disulfide (MoS2) has emerged as one of the most promising channel materials for next-generation nanoelectronics and optoelectronics owing to its atomic thickness, dangling-bond-free flat surface, and high electrical quality. Currently, high-quality monolayer MoS2 wafers are primarily grown on sapphire substrates incompatible with conventional device fabrication, and thus transfer processes to a suitable substrate are typically required before the device can be processed. Here, we demonstrate the batch production of transfer-free MoS2 top-gate devices directly on sapphire growth substrates via step engineering. By introducing substrate steps on growth substrate sapphire, high-κ dielectric layers with superior quality and uniform can be directly deposited on the epitaxially grown monolayer MoS2. For the substrate with a maximum step density of 100 μm−1, the gate capacitance can reach ~ 1.87 μF∙cm−2, while the interface trap state density (Dit) can be as low as ~ 7.6 × 1010 cm−2∙eV−1. The direct deposition of high-quality dielectric layers on grown monolayer MoS2 enables the batch fabrication of top-gate devices devoid of transfer and thus excellent device yield of > 96%, holding great promise for large-scale two-dimensional (2D) integrated circuits.

Research Article Issue
Gate-tunable large-scale flexible monolayer MoS2 devices for photodetectors and optoelectronic synapses
Nano Research 2022, 15(6): 5418-5424
Published: 21 February 2022
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Photodetectors and optoelectronic synapses are vital for construction of artificial visual perception system. However, the hardware implementations of optoelectronic-neuromorphic devices based on conventional architecture usually suffer from poor scalability, light response range, and limited functionalities. Here, large-scale flexible monolayer MoS2 devices integrating photodetectors and optoelectronic synapses over the entire visible spectrum in one device have been realized, which can be used in photodetection, optical communication, artificial visual perception system, and optical artificial neural network. By modulating gate voltages, we enable MoS2-based devices to be photodetectors and also optoelectronic synapses. Importantly, the MoS2-based optoelectronic synapses could implement many synaptic functions and neuromorphic characteristics, such as short-term memory (STM), long-term memory (LTM), paired-pulse facilitation (PPF), long-term potentiation (LTP)/long-term depression (LTD), and “learning-experience” behavior. Furthermore, an associative learning behavior (the classical conditioning Pavlov’s dog experiment) was emulated using paired stimulation of optical and voltage pulses. These results facilitate the development of MoS2-based multifunctional optoelectronic devices with a simple device structure, showing great potential for photodetection, optoelectronic neuromorphic computing, human visual systems mimicking, as well as wearable and implantable electronics.

Review Article Issue
Monolayer MoS2 epitaxy
Nano Research 2021, 14(6): 1598-1608
Published: 22 August 2020
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Downloads:187

As an emerging two-dimensional (2D) semiconductor material, monolayer MoS2 has recently attracted considerable attention. Various promising applications of this material have been proposed for electronics, optoelectronics, sensing, catalysis, energy storage, and so on. To realize these practical applications, high-quality and large-area MoS2 with controllable properties is required. Among the many different synthesis techniques, epitaxy provides a promising route for producing MoS2 monolayers. Here, we review the epitaxial growth of monolayer MoS2 on various substrates, with a particular focus on large-scale films with large domain sizes and high domain alignments. Finally, we offer perspectives and challenges for future research and applications of this technology.

Research Article Issue
Bandgap broadening at grain boundaries in single-layer MoS2
Nano Research 2018, 11(11): 6102-6109
Published: 07 July 2018
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Two-dimensional semiconducting transition-metal dichalcogenides have attracted considerable interest owing to their unique physical properties and future device applications. In particular, grain boundaries (GBs) have been often observed in single-layer MoS2 grown via chemical vapor deposition, which can significantly influence the material properties. In this study, we examined the electronic structures of various GBs in single-layer MoS2 grown on highly oriented pyrolytic graphite using low-temperature scanning tunneling microscopy/spectroscopy. By measuring the local density of states of a series of GBs with tilt angles ranging from 0° to 25°, we found that the bandgaps at the GBs can be either broadened or narrowed with respect to the intrinsic single-layer MoS2. The bandgap broadening shows that the GBs can become more insulating, which may directly influence the transport properties of nanodevices based on polycrystalline single-layer MoS2 and be useful for optoelectronics.

Research Article Issue
Fabrication of high-quality all-graphene devices with low contact resistances
Nano Research 2014, 7(10): 1449-1456
Published: 06 August 2014
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All-graphene devices are new class of graphene devices with simple layouts and low contact resistances. Here we report a clean fabrication strategy for all-graphene devices via a defect-assisted anisotropic etching. The as-fabricated graphene is free of contamination and retains the quality of pristine graphene. The contact resistance at room temperature (RT) between a bilayer graphene channel and a multilayer graphene electrode can be as low as ~5 Ω·μm, the lowest ever achieved experimentally. Our results suggest the feasibility of employing such all-graphene devices in high performance carbon-based integrated circuits.

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