Friction Open Access Editor-in-Chief: Jianbin Luo
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Keyword: chemical mechanical polishing
Research Article | Open Access
Effect of oxide film on nanoscale mechanical removal of pure iron
Jinwei LIU, Liang JIANG, Changbang DENG, [...], Wenhao DU, Linmao QIAN << Fewer
Published: 06 September 2018
2018, 6 (3): 307-315
Research Article | Open Access
Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire
Baichun ZHANG, Hong LEI, Yi CHEN
Published: 16 June 2017
2017, 5 (4): 429-436
Research Article | Open Access
Material removal mechanism of copper chemical mechanical polishing with different particle sizes based on quasi-continuum method
Aibin ZHU, Dayong HE, Shengli HE, Wencheng LUO
Published: 07 March 2017
2017, 5 (1): 99-107
Research Article | Open Access
Two material removal modes in chemical mechanical polishing: Mechanical plowing vs. chemical bonding
Yuan WU, Liang JIANG, Wenhui LI, [...], Jiaxin ZHENG, Yushan CHEN, Linmao QIAN << Fewer
Published: 15 December 2023
2024, 12 (5): 897-905
Total 4